Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

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A B C iH80 iH600 iH1000 Mass distribution on levelling-feet 1 2 3 4 iH80 75 kg 66 kg 51 kg 48 kg 1. Levelling-foot iH600 103 kg 119 kg 75 kg 118 kg 2. Levelling-foot iH1000 118 kg 115 kg 90 kg 107 kg 3. Levelling-foot 4. Levelling-foot 5. Centre of mass Figure 2-5 - Centres of mass dimensions (mm) and mass distribution 2-8 iH Dry Pumping Systems
1. 60Hz 2. 50Hz Figure 2-6 - Typical pumping speed and pump power curves for an iH80 iH Dry Pumping Systems 2-9
Page 1 and 2: Instruction Manual A533-50-880 Issu
Page 3 and 4: A533-50-880 Issue D Setup Password
Page 5 and 6: CONTENTS Section Title Page 1 INTRO
Page 7 and 8: Section Title Page 3.20.2 Configure
Page 9 and 10: Section Title Page 8 SERVICE, SPARE
Page 11 and 12: Illustrations (continued) Figure Ti
Page 13 and 14: 1 INTRODUCTION 1.1 Scope and defini
Page 15 and 16: 1.2ATEX directive implications •
Page 17 and 18: 1.4 Safety All of the components of
Page 19 and 20: 1. Inlet 2. HCMB oil filler-plug *
Page 21 and 22: 1. Two-way gearbox vent-valve 2. Ge
Page 23 and 24: 1.10 Electrical system Refer to Fig
Page 25 and 26: Figure 1-3 - Schematic diagram of t
Page 27 and 28: iH Dry Pumping Systems 1-15 Figure
Page 29 and 30: 1. Rear cover 16. Fuse F6 2. Coolin
Page 31 and 32: Figure 1-6 - Electrical components
Page 33 and 34: Note that when you first switch-on
Page 35 and 36: As supplied the first page of Norma
Page 37 and 38: 1.14 Drip tray The drip tray is fit
Page 39 and 40: A AW/6179/A 6 2 1 5 4 3 B 9 6 8 4 7
Page 41 and 42: A. iH80 B. iH600 C. iH1000 1. Warni
Page 43 and 44: 2TECHNICAL DATA Notes: Unless other
Page 45 and 46: A B C Side view Plan view Outlet Di
Page 47 and 48: A Side view 1. Inlet 3. Air-extract
Page 49: 2.4 Cooling-water supply Notes. Use
Page 53 and 54: Note: Discontinuity in curves are a
Page 55 and 56: Note: Discontinuity in curves are a
Page 57 and 58: Supply voltage and frequency iH80
Page 59 and 60: 2.10 Resource conservation Measures
Page 61 and 62: 2.13 Tracer gas analysis IH600 pump
Page 63 and 64: 3 INSTALLATION 3.1 Safety WARNING O
Page 65 and 66: Mounting3.21.2 Electrical Installat
Page 67 and 68: 1. iH system 2. Nut and washer 3. S
Page 69 and 70: 3.5 Reconfigure the nitrogen and/or
Page 71 and 72: 2. Wheel the iH system on its casto
Page 73 and 74: 3.7.2iH600/iH1000 systems The iH600
Page 75 and 76: Figure 3-5 - System arrangement to
Page 77 and 78: Use the following procedure to conn
Page 79 and 80: A B Remove the blanking panel Fit t
Page 81 and 82: A iH80 1. Inlet spool piece 4. HCMB
Page 83 and 84: 1. iH80 system 2. Electrics Box 3.
Page 85 and 86: A B C D iH80 system iH600 system Hi
Page 87 and 88: A iH80 1. Pin 1 (phase 1) 6. Electr
Page 89 and 90: Notes: On an iH1000 system, the ear
Page 91 and 92: 5. Inspect the water hoses, pipelin
Page 93 and 94: When you switch on an iH600 system,
Page 95 and 96: 3.21.2 Mounting The disconnect box
Page 97 and 98: 3.21.5 Cable connections Connect th
Page 99 and 100: 1. Customer supply: 1.36 inch diame
Page 101 and 102:
3.22.3 Piping connections Connect t
Page 103 and 104:
4 PUMP DISPLAY TERMINAL MENUS AND D
Page 105 and 106:
Other specific uses of the CANCEL b
Page 107 and 108:
8. Press the ENTER button; the disp
Page 109 and 110:
Switch on ▲ SELECT PUMP Process p
Page 111 and 112:
Normal DP DP BODY . kW . C ☞ Firs
Page 113 and 114:
Figure 4-6 - Status menu: sheet 2 o
Page 115 and 116:
Setup SETUP PASSWORD Password ▲
Page 117 and 118:
Next option Prev option [4-8/2] ▲
Page 119 and 120:
Units ▲ ☞ Press the CANCEL butt
Page 121 and 122:
Service SERVICE PASSWORD Password
Page 123 and 124:
▲ Serial Menu ☞ Use this menu t
Page 125 and 126:
Notes: You should only use this men
Page 127 and 128:
Next option Prev option [4-16/1]
Page 129 and 130:
Last parameter [4-17/2] ▲ View St
Page 131 and 132:
Messages MESSAGES English ENTER ▲
Page 133 and 134:
5 OPERATION 5.1 Introduction The fo
Page 135 and 136:
5.2.3 Gas purges WARNING If you use
Page 137 and 138:
5.4.2Change the display units If re
Page 139 and 140:
• The solenoid-valve(s) in the Ga
Page 141 and 142:
5.10 Manual shut-down WARNING If yo
Page 143 and 144:
If you need to shut down the iH sys
Page 145 and 146:
5.14 Restart the iH system after em
Page 147 and 148:
5.16 Operation of the load-lock pum
Page 149 and 150:
6 MAINTENANCE 6.1 Safety WARNING Ob
Page 151 and 152:
1. Tube fitting 2. Front (tapered)
Page 153 and 154:
6.5 Check the purge gas flow rates
Page 155 and 156:
1. Exhaust pipe insulation jacket 2
Page 157 and 158:
6.7 Check the HCMB pump oil-level (
Page 159 and 160:
3. Refer to Figure 1-1. Check that
Page 161 and 162:
1. Shut down the iH system (refer t
Page 163 and 164:
6.15 Relocate the iH system for mai
Page 165 and 166:
6.17 Fault finding WARNING Only per
Page 167 and 168:
6.18 Disconnect box and photohelic
Page 169 and 170:
Warning message Advisory message Me
Page 171 and 172:
Page 173 and 174:
Page 175 and 176:
Alarm message Advisory message Mean
Page 177 and 178:
Message PUMP STOPPED Press CANCEL E
Page 179 and 180:
7 STORAGE AND DISPOSAL 7.1 Storage
Page 181 and 182:
2. If the HCDP pump and HCMB pump (
Page 183 and 184:
8 SERVICE, SPARES AND ACCESSORIES 8
Page 185 and 186:
8.4.4 iH Enclosure Extraction Fan K
Page 187 and 188:
8.5.8 iH Pump Display Module When f
Page 189 and 190:
Return of BOC Edwards Equipment - P
Page 191 and 192:
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Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

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