Jahresbericht 2005 - IPHT Jena

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88 Th. Stelzner, F. Falk, H. Stafast, D. Probst, H. Hoche “Plasma-enhanced CVD of hard SiCN thin films using bis-(trimethylsilyl)-carbodiimide or hexamethyl disilazane as single source precursors” Proc. Internat. Symp. EUROCVD-15, Bochum Vol. 2005-09 pp.1014–1020 W. Triebel, Ch. Mühlig, S. Kufert “Application of the laser induced deflection (LID) technique for low absorption measurements in bulk materials and coatings” Proc. SPIE 5965 (2005) pp 59651J-1–59651J-10 Presentations (Talks and Posters) H. Stafast „Der Laser als kontaktfreie Sonde“ Vortragsreihe Heinrich-Böll-Gymnasium/Rotary Club Talk at Heinrich-Böll-Gymnasium, Saalfeld, February 14, 2005 H. Stafast, D. Müller, W. Paa, W. Triebel, A. Burkert „Moderne Entwicklungen der planaren laserinduzierten Fluoreszenz für die Laserdiagnostik von Verbrennungsprozessen“ Poster at 19. Vortragstagung GDCh-Fachgruppe Photochemie, Jena, March 29–31, 2005 F. Falk „Laserkristallisation von Halbleitern“ Talk at WIAS-Kolloquium, Berlin, April 4, 2005 H. Stafast „Laserdiagnostik an Flammen – Methoden- und Geräteentwicklung“ Talk at Colloquium, Institute of Physical and Theoretical Chemistry, University of Frankfurt/Main, May 23, 2005 G. Andrä, J. Bergmann, F. Falk, E. Ose, S. Dauwe, T. Kieliba, C. Beneking “Characterization and Simulation of Multicrystalline LLC-Si Thin Film Solar Cells” Poster at 20th Europ. PVSEC, Barcelona, Spain, June 06–10, 2005 J. Bergmann, A. Bochmann, R. Stober „Mikromaterialbearbeitung mit dem Ultrakurzpulslaser“ Poster at “Laser 2005”, München, June 13–16, 2005 F. Falk “Laser crystallization – a way to produce crystalline silicon films on glass or on polymer substrates” Talk at 16th Amer. Conf. Crystal Growth and Epitaxy, Big Sky, Montana, USA, July 10–14, 2005 W. Paa, D. Müller, A. Gawlik, W. Triebel “Combined Multispecies PLIF Diagnostics with kHz Rate in a Technical Fuel Mixing System Relevant for Combustion Processes” Talk at SPIE Optics & Photonics 2005, San Diego, USA, July 31–August 4, 2005 LASERTECHNIK / LASER TECHNOLOGY A. Burkert, W. Triebel, Ch. Mühlig, D. Keutel, L. Partier, U. Natura, S. Gliech, S. Schröder, A. Duparré “Investigating the ArF laser stability of CaF 2 at elevated fluences” Talk at SPIE Optics & Photonics, San Diego, USA, July 31–August 4, 2005 F. Garwe, U. Hübner, T. Clausnitzer, E.-B. Kley, U. Bauerschäfer “Elongated gold nanostructures in silica for metamaterials: theory, technology and optical properties” Talk at SPIE, Warschaw, Poland, August 28– September 2, 2005 Th. Stelzner, F. Falk, H. Stafast, D. Probst, H. Hoche “Plasma-enhanced CVD of hard SiCN thin films using bis-(trimethylsilyl)-carbodiimide or hexamethyl disilazane as single source precursors” Talk at EUROCVD-15, Bochum, September 04–09, 2005 W. Triebel, Ch. Mühlig, S. Kufert “Application of the laser induced deflection (LID) technique for low absorption measurements in bulk materials and coatings” Talk at SPIE Optical Systems Design, Jena, September 12–16, 2005 Ch. Mühlig, W. Triebel, J. Bergmann, S. Kufert, S. Bublitz, H. Bernitzki, M. Klaus “Absorption and fluorescence measurements of DUV/VUV coatings” Talk at SPIE Optical Systems Design, Jena, September 12–16, 2005 W. Triebel “Characterization of DUV optical materials by LIF and direct absorption measurements” Talk at Boulder Damage Symposium, Boulder, USA, September 19–21, 2005 D. Müller, W. Paa, W. Triebel, C. Menzel, K. Lucka, H. Köhne „PLIF – Diagnostik von Formaldehyd mit kHz- Repetitionsrate in der Mischzone von flüssigen Brennstoffen und vorgeheizter Luft“ Talk at 22. Deutscher Flammentag, Braunschweig, September 21–22, 2005 H. Stafast “Laserdiagnostics in Flames – Development of methods and tools” Talk at Colloquium of Laser Research Institute, University of Stellenbosch, South Africa, October 11, 2005 F. Falk, G. Andrä „Herstellung von Dünnschichtsolarzellen mit Hilfe von Excimerlasern“ Talk at Technologieseminar: Laseranwendungen in der Photovoltaik, Göttingen, November 8, 2005
F. Falk „Mikromaterialbearbeitung mit dem Ultrakurzpuls-Laser“ Poster at TransferX-Messe, Dresden, November 09–11, 2005 W. Triebel „Charakterisierung UV-optischer Dünnschichten durch LIF und direkte Absorptionsmessung“ Talk at TransferX-Messe, Dresden, November 09–11, 2005 Patents G. Andrä, F. Falk „Dünnschichtsolarzelle und Verfahren zur Herstellung eines Halbleiterbauelements“ DE 10 2005 045 096.2 (21.09. 2005) Lectures H. Stafast „Angewandte Lasertechniken“, 2-stündige Wahlvorlesung über 4 Semester an der Friedrich- Schiller-Universität, Winter 2004/2005 bis Winter 2005/2006 F. Falk „Photovoltaik“, 2-stündige Wahlvorlesung an der Friedrich-Schiller-Universität, Winter 2004/2005 „Elastizitätstheorie“, 2-stündige Wahlvorlesung an der Friedrich-Schiller-Universität, Sommer 2005 „Thermodynamik der Phasenübergänge“, 2stündige Wahlvorlesung an der Friedrich-Schiller- Universität, Winter 2005/2006 PhD Theses Torsten Scheidt: Charge Carrier Dynamics and Defect Generation at the Si/SiO2 Interface Probed by Femtosecond Optical Second Harmonic Generation*) Friedrich-Schiller-University, Jena, Faculty of Physics and Astronomy Supervisor: Prof. H. Stafast *) work at University of Stellenbosch, South Africa Christian Mühlig: Zur Absorption gepulster ArF- Laserstrahlung in hochtransparenten optischen Materialien Friedrich-Schiller-University, Jena, Faculty of Physics and Astronomy Supervisor: Prof. H. Stafast Diploma and Bachelor Theses Markus Arold: Massenspektroskopie an Ausgangsstoffen zur PE-CVD von Si-C-N-Schichten Friedrich-Schiller-University, Jena, Faculty of Physics and Astronomy Supervisor: Prof. H. Stafast LASERTECHNIK / LASER TECHNOLOGY Björn Eisenhawer: Wachstum von Si-Nanowires mittels Chemical Vapor Deposition Friedrich-Schiller-University, Jena, Faculty of Physics and Astronomy Supervisors: Dr. F. Falk/Dr. G. Andrä Sven Germershausen: Untersuchungen zur Laserkristallisation von Germaniumschichten auf Glassubstraten University of Applied Sciences, Jena, SciTec Supervisor: Dr. G. Andrä Michael Kaiser: Präparation von Solarzellen in multikristallinen LLC-Si-Schichten Technical University of Ilmenau, Mechanical Engineering Supervisors: Dr. F. Falk/Dr. G. Andrä Laboratory Exercises Ch. Noppeney, Fachhochschule Jena, Physikalische Technik Ch. Voigtländer, Friedrich-Schiller-Universität, Jena, Technische Physik J. Grasemann, O. Pabst, D. Rettig, Carl-Zeiss- Gymnasium (Spezialklasse), Jena M. Aubel und R. Pagel, Staatl. Berufsbildendes Schulzentrum Jena Göschwitz, Höhere Berufsfachschule M. Röder, FH Coburg Commitees G. Andrä – Executive Committee, INPUT Solar, Thuringia W. Triebel – Program Committee “Optical Diagnostics”, SPIE Conf., San Diego, USA, August 2005 – DUV/VUV Optics, Common working group of PhotonicNet and OptoNet – GET-UP initiative for start-up companies Award H. Stafast, professor extraordinary of University of Stellenbosch, South Africa Exhibitions – LASER 2005, World of Photonics, Munich – TransferX fair, Dresden – Faszination Licht, Goethegalerie, Jena New Equipment Thin film deposition unit with several material sources 89
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INSTITUT FÜR PHYSIKALISCHE HOCHTEC
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Inhaltsverzeichnis / Content INHALT
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A. Vorwort Das IPHT konnte das Jahr
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Ein besonderer Höhepunkt war im Ra
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ORGANISATION / ORGANIZATION B. Orga
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Mitglieder des IPHT e.V. / Members
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Finanzen des Instituts / Budget of
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MAGNETIK & QUANTENELEKTRONIK / MAGN
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• Lawrence Berkely National Labor
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J. Bierlich, T. Habisreuther, M. Ze
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Dr. R. Mattheis Editorial Board IEE
Page 39 and 40: 2. Optik / Optics 2.1 Übersicht Da
Page 41 and 42: Ein wichtiges internationales Forum
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Page 45 and 46: OPTIK / OPTICS Coating material NA
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