Design, Fabrication and Characterization of a Microwave Resonator ...

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3 Designs Procedure for the ResonatorsIn order to have a spatial tolerance at the connection from the center conductor of theconnector to the one of the resonator structure the inner strip of the tapering structure wasdesigned to have a diameter of 800 µm.For this dimension no matching to 50 Ω is possible within CPW technology. In order tominimize the effect of mismatch, the dimensions of the gap were adapted to the width of thedielectric of the connector. This avoids a parasitic reactance produced by discontinuities ingeometry.30
4 Fabrication and Measurement Setup4.1 Fabrication ProcessAll resonators were fabricated in the cleanroom facilities at the Walther-Meißner-Institut.Two optical masks with several different resonator geometries were designed within thisdiploma thesis and ordered from ML&C 1 . The relevant dimensions and design rules of theresonators are given in chapter 3 on page 27. An overview of the masks is found in AppendixB on page 73.Figure 4.1 shows the different fabrication steps.Figure 4.1: Overview of the Niobium CPW fabrication process.1 www.mlc-jena.de31
Page 4 and 5: Contents5.2.3 R27 on Silicon . . .
Page 6 and 7: 1 Motivation and Outlinethe antinod
Page 8 and 9: 2 Theoretical Description of a CPW
Page 14: 2 Theoretical Description of a CPW
Page 19 and 20: 2.2 Including Superconductivity in
Page 21 and 22: 2.2 Including Superconductivity in
Page 23 and 24: 2.3 Microwave Resonators2.3.2 Quali
Page 25 and 26: 2.3 Microwave ResonatorsFigure 2.11
Page 27 and 28: 2.3 Microwave ResonatorsFigure 2.13
Page 29 and 30: 2.4 The Scattering MatrixThe first
Page 31 and 32: 3 Designs Procedure for the Resonat
Page 33: 3.3 ConnectorsFigure 3.1: Coupling
Page 37 and 38: 4.2 Measurement SetupDevelop Resist
Page 39 and 40: 4.2 Measurement SetupFigure 4.3: Me
Page 41 and 42: 4.3 Calibration4.3 CalibrationIn or
Page 43 and 44: 5 MeasurementsThe first part of thi
Page 45 and 46: 5.1 First Experimentsname design W
Page 47 and 48: 5.2 Measurements - Design 1Figure 5
Page 49 and 50: 5.2 Measurements - Design 1The adva
Page 51 and 52: 5.2 Measurements - Design 15.2.2 R2
Page 53 and 54: 5.2 Measurements - Design 1Figure 5
Page 55 and 56: 5.3 Measurements - Yale DesignFigur
Page 57 and 58: 5.3 Measurements - Yale DesignFigur
Page 59 and 60: 5.4 Measurement - Design 2: R36 on
Page 61 and 62: 5.5 Discussion of the Experimental
Page 63 and 64: 5.5 Discussion of the Experimental
Page 65 and 66: 6 SimulationsThis chapter gives a b
Page 67 and 68: 6.1 Simulations in SonnetFigure 6.4
Page 69 and 70: 6.1 Simulations in SonnetFigure 6.5
Page 71 and 72: 6.2 Simulations Done at the Institu
Page 73 and 74: 7 Conclusion and OutlookThree centr
Page 75 and 76: A Specimen OverviewDesigns for Rose
Page 77 and 78: B Masks73
Page 79 and 80: B.2 Mask for Probing StationB.2 Mas
Page 81 and 82: Bibliography[1] INFORMATIK: Quanten
Page 83 and 84: List of Figures2.1 Different realiz
Page 85 and 86:
List of Figures6.6 Forward and back
Page 87 and 88:
List of Tables2.1 Values where (2.1
Page 89:
DanksagungVor allem möchte ich mic
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Design, Fabrication and Characterization of a Microwave Resonator ...

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