Design, Fabrication and Characterization of a Microwave Resonator ...

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4 Fabrication and Measurement Setup38
5 MeasurementsThe first part of this chapter deals with problems and failures that occured in our measurements,the second part presents the successful experiments in detail. The measurementswere done using all three designs of resonators described in chapter 3 in the order design 1,Yale design, design 2.5.1 First ExperimentsThis section is dedicated to the first measurements, according to Murphy: ”Everything thatcan go wrong goes wrong.” Most of them were done using equipment already available atthe Walther-Meißner-Institut before the gold plated box was fabricated (see section 4.2).Here, an overview of the measurement results and possible explanations as to why theseexperiments failed are given. All measurements were done on Sapphire.name design W S length frequency capacitance substrate[µm] [µm] [mm] [GHz] value materialR20 Yale 5 10 9.759 6.4174 undercoupled 6.2 fF SapphireTable 5.1: Description of the resonator R20 on Sapphire.The resonator R20 was first measured in the Hybrid box, where we observed differentpeaks with quality factors from 30 to 130 at 4 K. The quality factors were not increasingwhen cooling the resonator to 1.5 K. We could not find matching harmonics for any of thesepeaks. An evaluation of the phase data showed no phase shifts. Another measurement in thegold plated box showed no peaks in the spectrum.name design W S length frequency capacitance substrate[µm] [µm] [mm] [GHz] value materialR22 Yale 5 10 9.515 6.5819 undercoupled 0.58 fF SapphireTable 5.2: Description of the resonator R22 on Sapphire.R22 which is of the same geometry as R20 but with different resonator length was measuredin the Hybrid box. We saw a peak shifted approximately by 0.14 GHz in comparisonto R20 (see Figure 5.1). We were not sure whether this is the resonance peak, because nophase shift was observed.R24 in the Gold plated box showed peaks with quality factors from 20 to 100. We concludedthat these peaks are no resonances because no change in phase occurred in the phase39
Page 4 and 5: Contents5.2.3 R27 on Silicon . . .
Page 6 and 7: 1 Motivation and Outlinethe antinod
Page 8 and 9: 2 Theoretical Description of a CPW
Page 14: 2 Theoretical Description of a CPW
Page 19 and 20: 2.2 Including Superconductivity in
Page 21 and 22: 2.2 Including Superconductivity in
Page 23 and 24: 2.3 Microwave Resonators2.3.2 Quali
Page 25 and 26: 2.3 Microwave ResonatorsFigure 2.11
Page 27 and 28: 2.3 Microwave ResonatorsFigure 2.13
Page 29 and 30: 2.4 The Scattering MatrixThe first
Page 31 and 32: 3 Designs Procedure for the Resonat
Page 33 and 34: 3.3 ConnectorsFigure 3.1: Coupling
Page 35 and 36: 4 Fabrication and Measurement Setup
Page 37 and 38: 4.2 Measurement SetupDevelop Resist
Page 39 and 40: 4.2 Measurement SetupFigure 4.3: Me
Page 41: 4.3 Calibration4.3 CalibrationIn or
Page 45 and 46: 5.1 First Experimentsname design W
Page 47 and 48: 5.2 Measurements - Design 1Figure 5
Page 49 and 50: 5.2 Measurements - Design 1The adva
Page 51 and 52: 5.2 Measurements - Design 15.2.2 R2
Page 53 and 54: 5.2 Measurements - Design 1Figure 5
Page 55 and 56: 5.3 Measurements - Yale DesignFigur
Page 57 and 58: 5.3 Measurements - Yale DesignFigur
Page 59 and 60: 5.4 Measurement - Design 2: R36 on
Page 61 and 62: 5.5 Discussion of the Experimental
Page 63 and 64: 5.5 Discussion of the Experimental
Page 65 and 66: 6 SimulationsThis chapter gives a b
Page 67 and 68: 6.1 Simulations in SonnetFigure 6.4
Page 69 and 70: 6.1 Simulations in SonnetFigure 6.5
Page 71 and 72: 6.2 Simulations Done at the Institu
Page 73 and 74: 7 Conclusion and OutlookThree centr
Page 75 and 76: A Specimen OverviewDesigns for Rose
Page 77 and 78: B Masks73
Page 79 and 80: B.2 Mask for Probing StationB.2 Mas
Page 81 and 82: Bibliography[1] INFORMATIK: Quanten
Page 83 and 84: List of Figures2.1 Different realiz
Page 85 and 86: List of Figures6.6 Forward and back
Page 87 and 88: List of Tables2.1 Values where (2.1
Page 89: DanksagungVor allem möchte ich mic

Design, Fabrication and Characterization of a Microwave Resonator ...

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