Design, Fabrication and Characterization of a Microwave Resonator ...

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6 Simulations6.2 Simulations Done at the Institute of NanoelectronicsSimulations on R21 were achieved by the Institute of Nanoelectronics of the Technical Universityof Munich in a collaboration within SFB 631. Here, the simulation of R21 on Sapphire,simulated with HFSS 2 , is presented. This group also simulated resonators with loopsin a gap, further information on this issue can be found in [4]. This structures were calculatedassuming perfect conductors.The group was able to simulate the R21 with a very sharp peak at 6.3170 GHz witha quality factor of about 1·10 5 in transmission. In Figure 6.6 the result of a simulationincluding forward and backward transmission and reflection is shown. Figure 6.7 showsthe optimization process with a higher density of probe frequencies, but consuming morecomputing power. Also the method of numerical sweeps was changed to a more accurateway which resulted in a change of resonance frequency.Figure 6.6: Forward and backward transmission S 21 and S 12 and forward and backward reflectionS 11 and S 22 of R21 simulated at the Institute of Nanoelectronics.In Figure 6.8 one can see a good agreement of simulation and measurement, with a deviationof 0.1 GHz. The quality factor of the measurement is 6000, the simulation gives1·10 5 .2 www.ansoft.com/products/hf/hfss/66
6.2 Simulations Done at the Institute of NanoelectronicsFigure 6.7: Simulated transmission S 21 of R21 with increasing density of probe frequencies.Figure 6.8: Comparison between measurement and simulation of the transmission S 21 ofR21 on Silicon.67
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Contents5.2.3 R27 on Silicon . . .
Page 6 and 7:
1 Motivation and Outlinethe antinod
Page 8 and 9:
2 Theoretical Description of a CPW
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Page 12 and 13:
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Page 19 and 20: 2.2 Including Superconductivity in
Page 21 and 22: 2.2 Including Superconductivity in
Page 23 and 24: 2.3 Microwave Resonators2.3.2 Quali
Page 25 and 26: 2.3 Microwave ResonatorsFigure 2.11
Page 27 and 28: 2.3 Microwave ResonatorsFigure 2.13
Page 29 and 30: 2.4 The Scattering MatrixThe first
Page 31 and 32: 3 Designs Procedure for the Resonat
Page 33 and 34: 3.3 ConnectorsFigure 3.1: Coupling
Page 35 and 36: 4 Fabrication and Measurement Setup
Page 37 and 38: 4.2 Measurement SetupDevelop Resist
Page 39 and 40: 4.2 Measurement SetupFigure 4.3: Me
Page 41 and 42: 4.3 Calibration4.3 CalibrationIn or
Page 43 and 44: 5 MeasurementsThe first part of thi
Page 45 and 46: 5.1 First Experimentsname design W
Page 47 and 48: 5.2 Measurements - Design 1Figure 5
Page 49 and 50: 5.2 Measurements - Design 1The adva
Page 51 and 52: 5.2 Measurements - Design 15.2.2 R2
Page 53 and 54: 5.2 Measurements - Design 1Figure 5
Page 55 and 56: 5.3 Measurements - Yale DesignFigur
Page 57 and 58: 5.3 Measurements - Yale DesignFigur
Page 59 and 60: 5.4 Measurement - Design 2: R36 on
Page 61 and 62: 5.5 Discussion of the Experimental
Page 63 and 64: 5.5 Discussion of the Experimental
Page 65 and 66: 6 SimulationsThis chapter gives a b
Page 67 and 68: 6.1 Simulations in SonnetFigure 6.4
Page 69: 6.1 Simulations in SonnetFigure 6.5
Page 73 and 74: 7 Conclusion and OutlookThree centr
Page 75 and 76: A Specimen OverviewDesigns for Rose
Page 77 and 78: B Masks73
Page 79 and 80: B.2 Mask for Probing StationB.2 Mas
Page 81 and 82: Bibliography[1] INFORMATIK: Quanten
Page 83 and 84: List of Figures2.1 Different realiz
Page 85 and 86: List of Figures6.6 Forward and back
Page 87 and 88: List of Tables2.1 Values where (2.1
Page 89: DanksagungVor allem möchte ich mic
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