Design, Fabrication and Characterization of a Microwave Resonator ...

6 Simulations6.2 Simulations Done at the Institute of NanoelectronicsSimulations on R21 were achieved by the Institute of Nanoelectronics of the Technical Universityof Munich in a collaboration within SFB 631. Here, the simulation of R21 on Sapphire,simulated with HFSS 2 , is presented. This group also simulated resonators with loopsin a gap, further information on this issue can be found in [4]. This structures were calculatedassuming perfect conductors.The group was able to simulate the R21 with a very sharp peak at 6.3170 GHz witha quality factor of about 1·10 5 in transmission. In Figure 6.6 the result of a simulationincluding forward and backward transmission and reflection is shown. Figure 6.7 showsthe optimization process with a higher density of probe frequencies, but consuming morecomputing power. Also the method of numerical sweeps was changed to a more accurateway which resulted in a change of resonance frequency.Figure 6.6: Forward and backward transmission S 21 and S 12 and forward and backward reflectionS 11 and S 22 of R21 simulated at the Institute of Nanoelectronics.In Figure 6.8 one can see a good agreement of simulation and measurement, with a deviationof 0.1 GHz. The quality factor of the measurement is 6000, the simulation gives1·10 5 .2 www.ansoft.com/products/hf/hfss/66