Design, Fabrication and Characterization of a Microwave Resonator ...

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5 Measurements5.3.2 R21 on Sapphirename design W S length frequency capacitance substrate[µm] [µm] [mm] [GHz] value materialR21 Yale 5 10 9.759 6.4171 overcoupled 6.2 fF SapphireTable 5.9: Description of the resonator R21 on Sapphire.R21 on Sapphire leads to a shift of the resonance frequency of 0.11 GHz compared toR21 on Silicon (see Figure 5.18). Again the quality is lower on Sapphire than on Silicon.Figure 5.18: Comparison of transmission S 21 of R21 on Silicon and Sapphire.It is worth mentioning that no power distortion effect resulting definitely from the resonatorwas observed on any Sapphire sample. Although there are power distortion effectsvisible at values larger than -5 dBm, these discontinuities can also be referred to the NVAwhich is not calibrated above -5 dBm.54
5.4 Measurement – Design 2: R36 on Silicon5.4 Measurement – Design 2: R36 on Siliconname design W S length frequency capacitance substrate[µm] [µm] [mm] [GHz] value materialR36 design 2 20 50 9.854 6.38 overcoupled 31 fF SiliconTable 5.10: Description of the resonator R36 on Silicon.The dimensions of the design 2 used for R36 are larger than in the two other designs.The capacitor is designed to be in between the overcoupled and undercoupled cases. InFigure 5.19 the transmission near the resonance at 4.5 and 1.5 K is shown. The qualityfactors are around 300. One could assume the value of coupling capacitance to be too highfor better quality factors. The shift in resonance frequency can again be attributed to thechange in the dielectric constant, caused by liquid Helium entering the box.Figure 5.19: Transmission S 21 of R36 on Silicon at 4 K and 1.5 K.Figure 5.20 shows the transmission and reflection of R36 near the resonance. The qualitiesin reflection and transmission are of the same order of magnitude.From comparison with the other designs (see Figure 5.5 and Figure 5.14) one could suggestthat the higher the coupling, the higher the quality factor of reflection compared to thequality factor of transmission. The phase change at 5.69 GHz in Figure 5.7a verifies theresonance at this frequency.55
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Contents5.2.3 R27 on Silicon . . .
Page 6 and 7:
1 Motivation and Outlinethe antinod
Page 8 and 9: 2 Theoretical Description of a CPW
Page 14: 2 Theoretical Description of a CPW
Page 19 and 20: 2.2 Including Superconductivity in
Page 21 and 22: 2.2 Including Superconductivity in
Page 23 and 24: 2.3 Microwave Resonators2.3.2 Quali
Page 25 and 26: 2.3 Microwave ResonatorsFigure 2.11
Page 27 and 28: 2.3 Microwave ResonatorsFigure 2.13
Page 29 and 30: 2.4 The Scattering MatrixThe first
Page 31 and 32: 3 Designs Procedure for the Resonat
Page 33 and 34: 3.3 ConnectorsFigure 3.1: Coupling
Page 35 and 36: 4 Fabrication and Measurement Setup
Page 37 and 38: 4.2 Measurement SetupDevelop Resist
Page 39 and 40: 4.2 Measurement SetupFigure 4.3: Me
Page 41 and 42: 4.3 Calibration4.3 CalibrationIn or
Page 43 and 44: 5 MeasurementsThe first part of thi
Page 45 and 46: 5.1 First Experimentsname design W
Page 47 and 48: 5.2 Measurements - Design 1Figure 5
Page 49 and 50: 5.2 Measurements - Design 1The adva
Page 51 and 52: 5.2 Measurements - Design 15.2.2 R2
Page 53 and 54: 5.2 Measurements - Design 1Figure 5
Page 55 and 56: 5.3 Measurements - Yale DesignFigur
Page 57: 5.3 Measurements - Yale DesignFigur
Page 61 and 62: 5.5 Discussion of the Experimental
Page 63 and 64: 5.5 Discussion of the Experimental
Page 65 and 66: 6 SimulationsThis chapter gives a b
Page 67 and 68: 6.1 Simulations in SonnetFigure 6.4
Page 69 and 70: 6.1 Simulations in SonnetFigure 6.5
Page 71 and 72: 6.2 Simulations Done at the Institu
Page 73 and 74: 7 Conclusion and OutlookThree centr
Page 75 and 76: A Specimen OverviewDesigns for Rose
Page 77 and 78: B Masks73
Page 79 and 80: B.2 Mask for Probing StationB.2 Mas
Page 81 and 82: Bibliography[1] INFORMATIK: Quanten
Page 83 and 84: List of Figures2.1 Different realiz
Page 85 and 86: List of Figures6.6 Forward and back
Page 87 and 88: List of Tables2.1 Values where (2.1
Page 89: DanksagungVor allem möchte ich mic
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Design, Fabrication and Characterization of a Microwave Resonator ...

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