Design, Fabrication and Characterization of a Microwave Resonator ...

5 Measurements5.3.2 R21 on Sapphirename design W S length frequency capacitance substrate[µm] [µm] [mm] [GHz] value materialR21 Yale 5 10 9.759 6.4171 overcoupled 6.2 fF SapphireTable 5.9: Description of the resonator R21 on Sapphire.R21 on Sapphire leads to a shift of the resonance frequency of 0.11 GHz compared toR21 on Silicon (see Figure 5.18). Again the quality is lower on Sapphire than on Silicon.Figure 5.18: Comparison of transmission S 21 of R21 on Silicon and Sapphire.It is worth mentioning that no power distortion effect resulting definitely from the resonatorwas observed on any Sapphire sample. Although there are power distortion effectsvisible at values larger than -5 dBm, these discontinuities can also be referred to the NVAwhich is not calibrated above -5 dBm.54