Design, Fabrication and Characterization of a Microwave Resonator ...
Design, Fabrication and Characterization of a Microwave Resonator ...
Design, Fabrication and Characterization of a Microwave Resonator ...
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Contents5.2.3 R27 on Silicon . . . . . . . . . . . . . . . . . . . . . . . . . . . . 485.3 Measurements – Yale <strong>Design</strong> . . . . . . . . . . . . . . . . . . . . . . . . . 505.3.1 R21 on Silicon . . . . . . . . . . . . . . . . . . . . . . . . . . . . 505.3.2 R21 on Sapphire . . . . . . . . . . . . . . . . . . . . . . . . . . . 545.4 Measurement – <strong>Design</strong> 2: R36 on Silicon . . . . . . . . . . . . . . . . . . 555.5 Discussion <strong>of</strong> the Experimental Results . . . . . . . . . . . . . . . . . . . 576 Simulations 616.1 Simulations in Sonnet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 616.1.1 Simulations <strong>of</strong> the Experimentally Realized Results . . . . . . . . . 626.1.2 Additional <strong>Design</strong>s . . . . . . . . . . . . . . . . . . . . . . . . . . 646.2 Simulations Done at the Institute <strong>of</strong> Nanoelectronics . . . . . . . . . . . . 667 Conclusion <strong>and</strong> Outlook 69A Specimen Overview 71B Masks 73B.1 Mask for Rosenberger Connector . . . . . . . . . . . . . . . . . . . . . . . 74B.2 Mask for Probing Station . . . . . . . . . . . . . . . . . . . . . . . . . . . 75Danksagung 85iv