12.07.2015 Views

Design, Fabrication and Characterization of a Microwave Resonator ...

Design, Fabrication and Characterization of a Microwave Resonator ...

Design, Fabrication and Characterization of a Microwave Resonator ...

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

Contents5.2.3 R27 on Silicon . . . . . . . . . . . . . . . . . . . . . . . . . . . . 485.3 Measurements – Yale <strong>Design</strong> . . . . . . . . . . . . . . . . . . . . . . . . . 505.3.1 R21 on Silicon . . . . . . . . . . . . . . . . . . . . . . . . . . . . 505.3.2 R21 on Sapphire . . . . . . . . . . . . . . . . . . . . . . . . . . . 545.4 Measurement – <strong>Design</strong> 2: R36 on Silicon . . . . . . . . . . . . . . . . . . 555.5 Discussion <strong>of</strong> the Experimental Results . . . . . . . . . . . . . . . . . . . 576 Simulations 616.1 Simulations in Sonnet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 616.1.1 Simulations <strong>of</strong> the Experimentally Realized Results . . . . . . . . . 626.1.2 Additional <strong>Design</strong>s . . . . . . . . . . . . . . . . . . . . . . . . . . 646.2 Simulations Done at the Institute <strong>of</strong> Nanoelectronics . . . . . . . . . . . . 667 Conclusion <strong>and</strong> Outlook 69A Specimen Overview 71B Masks 73B.1 Mask for Rosenberger Connector . . . . . . . . . . . . . . . . . . . . . . . 74B.2 Mask for Probing Station . . . . . . . . . . . . . . . . . . . . . . . . . . . 75Danksagung 85iv

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!