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[9] O. Nast, T. Puzzer, L. M. Koschier, A. B. Sproul, and S. R. Wenham. Aluminum-induced crystallization of amorphous silicon on glass substrates above and below the eutectic temperature. Appl. Phys. Lett., 73(22):3214– 3216, 1998. [10] M. Volmer. Kinetik der Phasenbildung, volume 4 of Die Chemische Reaktion. Verlag von Theodor Steinkopff, Leipzig, 1939. [11] D.A. Porter and K.E. Easterling. Phase Transformations in Metals and Alloys. Chapman & Hall, London, UK, 2nd edition, 1992. [12] C. Spinella, S. Lombardo, and F. Priolo. Crystal grain nucleation in amorphous silicon. J. Appl. Phys., 84(10):5383–5414, 1998. [13] A.E. Kolmogorov. On statistic theory of crystallization of metals. Izv. Akad. Nauk SSR Ser. Fiz. Mat. Nauk, 1:355, 1937. original title translated from russian. [14] W.A. Johnson and R.F. Mehl. Reaction kinetics in processes of nucleation and growth. Trans. Am. Inst. Min. Metall. Pet. Eng., 135:416–442, 1939. [15] M. Avrami. Kinetics of phase change. i. J. Chem. Phys., 7:1103–1112, 1939. [16] M. Avrami. Kinetics of phase change. ii. J. Chem. Phys., 8:212–224, 1940. [17] M. Avrami. Granulation, phase change, and microstructure. J. Chem. Phys., 9:177–184, 1941. [18] M. Castro, F. Dominguer-Adame, A. Sanchez, and T. Rodriguez. Model for crystallization kinetics: Deviations from kolmogorov-johnson-mehl-avrami kinetics. Appl. Phys. Lett., 75(15):2205–2207, 1999. [19] C. Sagui and M. Grant. Theory of nucleation and growth during phase separation. Phys. Rev. E., 59(4):4175–4187, 1999.
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Nucleation and growth during the fo
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"Our ignorance is not so vast as ou
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Zusammenfassung Dünne Schichten au
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• Temperatureprofile mit hoher En
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3.2 In-situ optical microscopy . .
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1 Introduction ’Solar power is ho
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por deposition (PECVD) achieved par
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phous silicon interface layer is ex
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2 State of the art This chapter giv
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2.1 Kinetics of phase change 9 Figu
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2.1 Kinetics of phase change 11 [e
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2.2 Solid Phase Crystallization (SP
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2.2 Solid Phase Crystallization (SP
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2.3 Metal-Induced Crystallization (
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2.4 Aluminum-Induced Layer Exchange
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2.5 Current research involving ALIL
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Page 51 and 52:
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3 Experimental This thesis is focus
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3.1 Sample preparation 39 does not
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3.1 Sample preparation 41 � �
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3.2 In-situ optical microscopy 43 m
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3.2 In-situ optical microscopy 45 B
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3.3 Electron Back Scatter Diffracti
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4 Results In order to understand an
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4.1 Interlayer 51 (a) (b) Figure 4.
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4.1 Interlayer 53 Figure 4.2: TEM c
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4.1 Interlayer 55 c o u n ts [a .u
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4.1 Interlayer 57 R C [% ] 1 0 0 8
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4.1 Interlayer 59 � � ��
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4.1 Interlayer 61 � � ��
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4.1 Interlayer 63 -2 ] N G [m m 8 6
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4.1 Interlayer 65 TA = 450 °C TA =
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4.1 Interlayer 67 (111) (100) (110)
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4.1 Interlayer 69 4.1.2 Molybdenum
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4.1 Interlayer 71 Fig. 4.17 optical
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4.1 Interlayer 73 R C [% ] 1 0 0 8
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4.2 Temperature profiles 75 face la
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4.2 Temperature profiles 77 � �
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4.2 Temperature profiles 79 R C [%
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4.2 Temperature profiles 81 a small
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4.2 Temperature profiles 83 � �
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4.2 Temperature profiles 85 (a) (b)
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4.2 Temperature profiles 87 (a) (b)
Page 105 and 106: 4.2 Temperature profiles 89 (a) (b)
Page 107 and 108: 4.2 Temperature profiles 91 ��
Page 109 and 110: 4.2 Temperature profiles 93 in. Thu
Page 111 and 112: 4.2 Temperature profiles 95 ��
Page 113 and 114: 5 Discussion Two of the most import
Page 115 and 116: 5.1 Definition of three crucial Si
Page 125 and 126: 5.2 The ALILE process in the phase
Page 127 and 128: 5.2 The ALILE process in the phase
Page 129 and 130: 5.3 Depletion regions in the ALILE
Page 131 and 132: 5.4 Comparison of the qualitative m
Page 137 and 138: 5.5 Preferential orientation model
Page 145 and 146: 6 Conclusions In the aluminum-induc
Page 147 and 148: A Preferential orientation calculat
Page 149 and 150: The area of the base of the pyramid
Page 151 and 152: B Abbreviations, symbols and units
Page 153 and 154: symbol unit meaning ∆G a eV activ
Page 155: Bibliography [1] M. Rogol, S. Doi,
Page 159 and 160: [38] J. Jang, J.Y. Oh, S.K. Kim, Y.
Page 161 and 162: [58] N.-P. Harder, T. Puzzer, P. Wi
Page 163 and 164: [72] G. Ekanayake, S. Summers, and
Page 165 and 166: [87] H.R. Philipp and E.A. Taft. An
Page 167 and 168: list of publications journal papers
Page 169 and 170: B. Rau, J. Klein, J. Schneider, E.
Page 171: (2002), 87. S. Gall, M. Muske, I. S
Page 174 and 175: tion. Special thank’s go to Dr. M
Page 176: 10/95-09/98 student electrical engi
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