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Acknowledgement I want to thank Prof. Dr. Christian Boit for accepting my proposal as Ph.D. stu- dent on an almost blind date; furthermore for being friendly, critical, supportive, constructive and at al times interested in the progress of my work. I want to thank Prof. Dr. Walther Fuhs for all the scientific, political and personal discussions; for all the support throughout my four years at SE1; for many times proof reading this initially exhausting thesis and for many rides home. Most and for all I thank Dr. Stefan Gall for supervising my work and for being a friend; for being honest and true all times; for being both severe and fun; for being supportive and giving me all these opportunities to present my results to the scientific community; for all I was able to learn on science and the scientific world; and of course for the cool time together in Japan. I want to thank my colleagues and room mates Dr. Juliane Klein and Martin Muske for all the hilarious times, especially on Friday afternoons. I want to thank Juliane especially for all the on and off topic discussions. I want to thank Martin especially for being the best aluminum-induced layer exchange processer in the world. I want to thank all students who directly contributed results to my work: Desmond Low for programming the heating stage controller; Michela DeVincentis for doing Hall measurements; Robert Heimburger for the heating step experiments; Andreas Schneider for the cooling step experiments. I want to thank Dr. Björn Rau for doing all the work. No really, it seems to me that Björn did all the work on making and measuring solar cells, helping in report writing, proof reading of papers, revising posters and talks... I want to thank Björn for remaining calm, friendly and in a good mood during all this stress. I want to thank Dr. Andrey Sarikov for theoretical discussions of the ALILE process. I want to thank Kati Hübener for caring and the interesting discussions on the ALILE process. I want to thank all members of the METEOR project for the interesting coopera-
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Nucleation and growth during the fo
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"Our ignorance is not so vast as ou
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Zusammenfassung Dünne Schichten au
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• Temperatureprofile mit hoher En
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3.2 In-situ optical microscopy . .
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1 Introduction ’Solar power is ho
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por deposition (PECVD) achieved par
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phous silicon interface layer is ex
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2 State of the art This chapter giv
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2.1 Kinetics of phase change 9 Figu
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2.1 Kinetics of phase change 11 [e
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2.2 Solid Phase Crystallization (SP
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2.2 Solid Phase Crystallization (SP
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2.3 Metal-Induced Crystallization (
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2.4 Aluminum-Induced Layer Exchange
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2.5 Current research involving ALIL
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3 Experimental This thesis is focus
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3.1 Sample preparation 39 does not
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3.1 Sample preparation 41 � �
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3.2 In-situ optical microscopy 43 m
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3.2 In-situ optical microscopy 45 B
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3.3 Electron Back Scatter Diffracti
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4 Results In order to understand an
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4.1 Interlayer 51 (a) (b) Figure 4.
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4.1 Interlayer 53 Figure 4.2: TEM c
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4.1 Interlayer 55 c o u n ts [a .u
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4.1 Interlayer 57 R C [% ] 1 0 0 8
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4.1 Interlayer 59 � � ��
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4.1 Interlayer 61 � � ��
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4.1 Interlayer 63 -2 ] N G [m m 8 6
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4.1 Interlayer 65 TA = 450 °C TA =
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4.1 Interlayer 67 (111) (100) (110)
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4.1 Interlayer 69 4.1.2 Molybdenum
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4.1 Interlayer 71 Fig. 4.17 optical
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4.1 Interlayer 73 R C [% ] 1 0 0 8
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4.2 Temperature profiles 75 face la
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4.2 Temperature profiles 77 � �
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4.2 Temperature profiles 79 R C [%
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4.2 Temperature profiles 81 a small
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4.2 Temperature profiles 83 � �
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4.2 Temperature profiles 85 (a) (b)
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4.2 Temperature profiles 91 ��
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4.2 Temperature profiles 93 in. Thu
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4.2 Temperature profiles 95 ��
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5 Discussion Two of the most import
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5.1 Definition of three crucial Si
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Page 121 and 122: 5.1 Definition of three crucial Si
Page 123 and 124: 5.1 Definition of three crucial Si
Page 125 and 126: 5.2 The ALILE process in the phase
Page 127 and 128: 5.2 The ALILE process in the phase
Page 129 and 130: 5.3 Depletion regions in the ALILE
Page 131 and 132: 5.4 Comparison of the qualitative m
Page 137 and 138: 5.5 Preferential orientation model
Page 145 and 146: 6 Conclusions In the aluminum-induc
Page 147 and 148: A Preferential orientation calculat
Page 149 and 150: The area of the base of the pyramid
Page 151 and 152: B Abbreviations, symbols and units
Page 153 and 154: symbol unit meaning ∆G a eV activ
Page 155 and 156: Bibliography [1] M. Rogol, S. Doi,
Page 157 and 158: [20] R.W. Bower, R. Baron, J.W. May
Page 159 and 160: [38] J. Jang, J.Y. Oh, S.K. Kim, Y.
Page 161 and 162: [58] N.-P. Harder, T. Puzzer, P. Wi
Page 163 and 164: [72] G. Ekanayake, S. Summers, and
Page 165 and 166: [87] H.R. Philipp and E.A. Taft. An
Page 167 and 168: list of publications journal papers
Page 169 and 170: B. Rau, J. Klein, J. Schneider, E.
Page 171: (2002), 87. S. Gall, M. Muske, I. S
Page 175 and 176: curriculum vitae: Jens Schneider, b
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