Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
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Definitions of Chemical Vapor <strong>Deposition</strong> (CVD)<br />
<strong>and</strong> <strong>Atomic</strong> <strong>Layer</strong> <strong>Deposition</strong> (<strong>ALD</strong>)<br />
Structures <strong>and</strong> materials made by <strong>ALD</strong><br />
Properties needed <strong>for</strong> CVD <strong>and</strong> <strong>ALD</strong> precursors:<br />
Volatility, Stability, Reactivity<br />
How to design those properties into precursors:<br />
metal amidinates<br />
High-k insulators: La 2 O 3 , LaAlO 3<br />
Harvard University<br />
Outline