Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
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R 2<br />
R 1<br />
N N<br />
R3 R1 N<br />
R 2<br />
C<br />
M<br />
C N N C<br />
R 1 R 3<br />
Harvard University<br />
Metal(III) Amidinates<br />
N<br />
monomer<br />
R 3<br />
R 2<br />
Formamidinates: R 2 = H<br />
Acetamidinates: R 2 = CH 3<br />
Propionamidinates: R 2 = CH 2 CH 3<br />
R 1 <strong>and</strong> R 3 = alkyl groups<br />
Structures of dimers are unknown, probably bridged
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