Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
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Vapor Pressures of Lanthanum Precursors<br />
=> La(iPr 2 -fmd) 3 is most<br />
volatile La compound known,<br />
60 mTorr at 100 o C<br />
Harvard University<br />
N<br />
H<br />
C N<br />
N<br />
HC<br />
N<br />
La<br />
N<br />
N<br />
CH<br />
La(iPrCp) 3<br />
0.1<br />
Torr