Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
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Acetamidinates: R2 Formamidinates: R<br />
= CH3 2 = H<br />
R 2<br />
R 1<br />
N<br />
N<br />
R 3<br />
M<br />
Harvard University<br />
Metal(II) Amidinates<br />
Propionamidinates: R 2 = CH 2 CH 3<br />
R 1<br />
N<br />
N<br />
R 3<br />
R 2<br />
R 1 <strong>and</strong> R 3 = alkyl groups<br />
monomer dimer<br />
R 2<br />
R 3 R1 R 3<br />
R 1<br />
N<br />
N<br />
R 3<br />
N N<br />
M<br />
M<br />
N N<br />
M-N bonds are generally reactive to H 2 O, NH 3 , H 2 , etc.<br />
The chelate structure adds to the thermal stability.<br />
The choices of R n affect the volatility, reactivity <strong>and</strong> stability.<br />
R 2<br />
R 2<br />
N<br />
N<br />
R 1<br />
R 1<br />
R 3<br />
R 2