COUPLINGS
COUPLINGS
COUPLINGS
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
ApplicationSERVO FLEX SFC model for the 6-axis stage systemSERVO FLEX SFC model for the θ -axis rotation stage908070 6050 40 30201001020304050SERVO FLEX SFC model for the θ -axis swivel stageSERVO FLEX SFC model for the gantry mechanismSERVO FLEXApplication101001010SERVO FLEX SFC model for the semiconductorwafer-lifting shaftSERVO FLEX SFC model wafer stage X-axis with a semiconductormanufacturingmachine stepper for the Y-axisWafer holderWaferBall screwServo motorBall screwServo motor68COUPLING_E_66_69new.indd 68www.feyc.es9/15/10 4:30 PM