surface micromachining layers of polysilicon. Manymanufacturers are developing gyros and accelerometers using thistechnology. Their extremely small size combined with thestrength of silicon makes them ideal for very high-accelerationapplications. Between 3,000 and 10,000 devices can be producedon a single 5-in silicon wafer.<strong>Draper</strong> <strong>Laboratory</strong> has demonstrated a 4-deg/h bias drift,open-loop silicon tuning-fork gyroscope with folded beamsuspension in which the flexured masses are electrostaticallydriven into resonance with a comb-like structure (see Figure 2).Rotation is sensed capacitively along the axis normal to the planeof vibration. <strong>Draper</strong>’s first gyroscope is aimed at the automobilemarket and is being marketed through an alliance with BoeingNorth American. Devices with lower drift rates have beendeveloped for more demanding applications, such as autopilotcontrol and smart munitions. Future performance improvementsare expected to bring the performance of these devices to betterthan 0.1-deg/h bias drift.(proof mass, resonating flexure, and support structure) from asingle piece of quartz (see Figure 3). Using such techniques canresult in low-cost, highly reliable accelerometers with ameasurement accuracy of better than 100-µg bias error.Constructing this accelerometer from a single piece of quartzresults in high thermal stability, along with dynamic rangesapproaching those obtainable in the timekeeping industry.Silicon micromechanical resonator accelerometers are also beingdeveloped.Figure 3. Quartz resonant accelerometer.Silicon Micromechanical AccelerometersFigure 2. Micromechanical tuning-fork gyro.Resonating Beam AccelerometersResonant accelerometers (sometimes referred to as vibrating beamaccelerometers) have a principle of operation that is similar to thatof a violin. When the violin string is tightened, its frequency ofoperation goes up. Similarly, when the accelerometer proof massis loaded, one tine is put into tension and the other intocompression. These tines are excited continually at frequencies inthe hundreds of kilohertz range when unloaded. As a result,when “g” loaded, one tine frequency increases while the other tinefrequency decreases. This difference in frequency is a measure ofthe device’s acceleration. This form of accelerometer isessentially an open-loop device, in that the proof mass is notrebalanced to its center position during the application of a force.For accuracy, it relies on the scale-factor stability inherent in thematerial properties of the proof mass supports. Theseaccelerometers can be constructed using several differentfabrication techniques. One method is to etch the entire deviceMicromechanical accelerometers are either the force rebalancetype that use closed-loop capacitive sensing and electrostaticforcing, or the resonator type as described above. <strong>Draper</strong>’s forcerebalance micromechanical accelerometer is a typical example, inwhich the accelerometer is a monolithic silicon structure (i.e., noassembly of component parts) consisting of a torsional pendulumwith capacitive readout and electrostatic torquer (see Figure 4).This device is about 300 x 600 µm in size. The pendulum issupported by a pair of flexure pivots, and the readout andtorquing electrodes are built into the device beneath the tilt plate.The output of the angle sensor is integrated and then used to drivethe torquer to maintain the tilt plate in a fixed nulled position.The torque required to maintain this balance is proportional tothe input acceleration. Performance around 250-µg bias errorand 250 ppm of scale factor error have been achieved and furtherimprovements are expected.Future Technology ApplicationsSolid-state inertial sensors like those described previously havepotentially significant cost, size, and weight advantages overconventional instruments, which are resulting in a rethinking ofthe options for which such devices can be used in systems. Whilethere are many conventional military applications, there are alsomany newer applications that will emerge with the low cost andvery small size inherent in such sensors, particularly at the lowerperformance end of the spectrum. In nearly every case, whenthese newer solid-state inertial technologies have been evaluatedINS/GPS Technology Trends for Military Systems4
maintained in a rigid structure, whereas the FOG has its path infiber, making the FOG fundamentally much more susceptible toenvironmental effects such as temperature changes. Forcomparable performance applications, the selection between theFOG and the RLG will very likely depend on the scale-factorrequirements.Figure 4. Micromechanical pendulousrebalance accelerometer.against today’s technology, given comparable technicalrequirements, this new class of solid-state inertial sensorsbecomes the winner because the basis of selection is almostalways cost. A vision of the inertial instrument field for relevantmilitary applications for the near-term is shown in Tables 1 and 2for the gyro and accelerometer, respectively.The performance application region of about 0.01-deg/h bias driftfor gyros is expected to shift from current RLG applications toFOGs. The RLG is an excellent instrument, but itsmanufacturing is heavily dominated by precision machiningprocesses and alignment requirements, which force its costs toremain relatively high. It is quite possible that FOG performanceimprovements will allow applications in strategic missileapplications where the performance requirements exceed 0.001deg/h. However, one particular area the RLG is expected to retainits superiority is scale factor. The laser gyro has its optical pathTable 1. Near-term gyro requirements vs applications.The tactical lowest performance end of the gyro applicationspectrum will be dominated by micromechanical inertial sensors.These could be, for example, gyros and accelerometersphotolithographically constructed in silicon or quartz andsubsequently etched in very large numbers as a single batch. Themilitary market will push the development of these sensors forapplications such as “competent” and “smart” munitions, aircraftand missile autopilots, short time-of-flight tactical missileguidance, fire control systems, radar antenna motioncompensation, “smart skins” using embedded inertial sensors,multiple intelligent small projectiles such as flechettes or even“bullets,” and wafer-scale INS/GPS systems.The potential commercial market for micromechanical inertialsensors is orders of magnitude larger than any contemplatedmilitary market. The application of micromechanical gyrotechnology to the automobile industry is one case where, forexample, a true skid detector requires a measure of inertial rate inorder to operate successfully. Products designed for this industrymust be inexpensive and reliable, both characteristics ofsolid-state technology. Many other micromechanical inertialsensor applications exist for automobiles such as airbags, braking,leveling, and GPS-augmented navigation systems. Additionalcommercial applications can be found in products such ascamcorders, factory automation, general aviation, and medicalelectronics. The performance of the micromechanicalinstruments will likely continue to improve as more commercialapplications are found for this technology.Table 2. Near-term accelerometer requirements vs applications.σµ σINS/GPS Technology Trends for Military Systems5
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Letter from thePresident and CEO,Vi
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Information TechnologyMilton AdamsE
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BiographyMilton Adams has been at D
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Figure 4. Control chart for boron d
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References[1] Barbour, N., J. Conne
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Draper Laboratory continues to engi
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Validating the Validating Tool:Defi
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calculates miscellaneous terms, suc
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Table 1. Suggested specification sh
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User Accuracy as aFunction of Simul
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20-min averaging, this clock lockin
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Table 2. Sample high-level summary
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AcknowledgmentR.L. Greenspan, J.A.
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Systems IntegrationRich MartoranaPe
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BiographyAnthony Kourepenis is an A
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control is employed to maintain the
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Table 1. Summary of automotive yaw
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Resolution (60 Hz) deg/h10000000100
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References[1] Greiff, P., B. Boxenh
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Guidance, Navigation, and Control A
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An Integrated Safety AnalysisMethod
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Infrastructure ModelsSystemRequirem
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Figures 6 and 7 illustrate the bloc
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Notice that each flight track descr
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Table 7. Safety statistics at 1700-
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Guidance, Navigation, and Control A
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An Optimal Guidance Law forPlanetar
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Note that the states in the three d
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Crossrange (Kft)10090807060504030Cl
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The 1997 Charles StarkDraper PrizeT
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The 1997 Charles StarkDraper Prize1
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“Draper encourages its personnel
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Gimballed Vibrating GyroscopeHaving
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“Draper encourages its personnel
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Optical Source Isolator withPolariz
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“Draper encourages its personnel
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Hunting Suppressor forPolyphase Ele
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“Draper encourages its personnel
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Sensor Having an Off-Frequency Driv
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proof mass from transients and enha
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1997 Published PapersThe following
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monitoring of space structures and
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measured by kinematic degrees of fr
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i.e., what percent of the earth’s
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McConley, M. W.; Dahleh, M. A.; Fer
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unaffordable, or even misguided. Bu
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The Draper DistinguishedPerformance
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Educational Activitiesat Draper Lab