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Test During Burn-in Evolution - BiTS Workshop

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Wafer-Level <strong>Burn</strong>-<strong>in</strong> with BIST• Logical convergence of:– <strong>Test</strong> <strong>Dur<strong>in</strong>g</strong> <strong>Burn</strong>-<strong>in</strong> <strong>Evolution</strong> (Full functional)– <strong>Burn</strong>-<strong>in</strong> Process <strong>Evolution</strong> (Wafer-level)– <strong>Test</strong> <strong>Evolution</strong> (Logic BIST)• Key enabl<strong>in</strong>gtechnologies:– Full wafer contact– Massively parallel test<strong>in</strong>g– Logic BIST<strong>BiTS</strong> 2003 Steps 13

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