Vacuum Catalogue - Edwards

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STP-XA3203C Turbomolecular PumpThe STP-XA3203C turbo pump offers high performance in the process range of highvacuum to 2300 sccm process flow with enhanced throughput for all gases.2Page108This pump is based on a new platform design offering features to improve thermalmanagement, which enhances performance on harsh processes, increases the maximumprocess flow capability and reduces the effects of corrosion and deposition.The outstanding performance is suited to both light and harsh applications, such assemiconductor etch, implant, lithography and LCD processes.Features & Benefits●●●●●Advanced rotor designIncreased H 2 , N 2 and Ar performanceImproved performance in the process pressure range of highvacuum to 2300 sccmMaintenance free5-axis magnetic suspension systemDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 3200 ls -1 N 22. 2800 ls -1 Ar3. 2300 ls -1 H 2VG300 ISO320F ICF356 (DN320CF)A 400 (15.8) 425 (16.7) 356 (14.0)*B 18 (0.7) 20 (0.8) 28.5 (1.1)*C 415.5 (16.4) 415.5 (16.4) 454.5 (17.9)*D 370.5 (14.6) 370.5 (14.6) 409.5 (16.1)*E 339 (13.3) 339 (13.3) 378.5 (14.9)*F 280.5 (11.0) 280.5 (11.0) 320.5 (12.6)*G 223.5 (8.8) 223.5 (8.8) 262.5 (10.3)*H 341 (13.4) 341 (13.4) 380.5 (15.0)*J 348.5 (13.7) 348.5 (13.7) 388 (15.3)mm (inch)A Temperature management system (TMS) sensorB TMS Heater (TMS spec only)C TMS heater cover (TMS spec only)D Outlet port KF40E Cooling water port Rc 1/4 ISOF Purge port KF10Shop online at www.edwardsvacuum.com
Technical DataOrdering InformationInlet flangeISO320FPumping SpeedN 2-1 3200 lsH 2-1 2300 lsCompression ratioN 28 >10H 23 >6 x 10Ultimate pressure10 -7 PaMax allowable backing pressure 266 PaMax allowable gas flowN 2 (water cooled)2300 sccmProduct DescriptionSTP-XA3203C ISO320FSTP-XA3203C DN320CFSTP-XA3203C VG300Accessories & SparesSCU-1600 Control unitPower Cable 5mPower Cable 10MSTP straight connection cable, 5mSTP straight connection cable, 10mOrder No.YT660Z050PT660Z080YT660Z150Order No.YT76Z0Z00B75030020PT35Y0A00B75030010B750300402Page109Ar (water cooled)(3.8 Pam 3 s -1 )1900 sccm(3.2 Pam 3 s -1 )Rated speed27500 rpmStarting time8 minMounting positionAny orientationWater coolingFlow 3 lmin -1TemperaturePressureRecommended purge gas flow5-25 °C (41-77 °F)0.3 MPa50 sccmInput voltagePower consumptionPump weightController weight(8.4 x 10 -2 Pam 3 s -1 )200 to 240 (± 10) V a.c.1.5 kVA80 kg (176 lb)12 kg (26.4 lb)Shop online at www.edwardsvacuum.com
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PRODUCT CATALOGUE2012
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ContentsSmall Wet/Dry PumpsTurbomol
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Small Pumps and Pumping Systems1Pag
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Small Pumps and Accessories: Freque
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1Page6Technical DataNominal rotatio
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1Page8Technical DataNominal rotatio
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1Page10Technical DataNominal rotati
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1Page12Technical DataNominal rotati
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XDS35i Scroll Vacuum Pump1Page14The
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XDS46i Scroll Vacuum Pump1Page16The
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Technical DataOrdering InformationP
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E2M0.7 Two Stage Rotary Vane PumpTh
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E2M1.5 Two Stage Rotary Vane PumpTh
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RV3 Two Stage Rotary Vane PumpEdwar
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RV12 Two Stage Rotary Vane PumpEdwa
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E1M18 One Stage, E2M18 Two Stage Ro
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E2M28 Two Stage Rotary Vane PumpThe
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RV ATEX Two Stage Rotary Vane PumpA
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E1M18 One Stage, E2M18 Two Stage AT
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Electrical DataSmall Pump Accessori
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Ordering InformationProduct Descrip
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Vibration IsolatorsYou may need to
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Performance Curves1. D-LAB 34-100 2
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Turbomolecular Pumps2Page51nEXT Tur
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VentingTo maintain the cleanliness
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Technical DataInlet flangeDN100ISO-
Page 61 and 62: Technical DataInlet flangeDN100ISO-
Page 63 and 64: Technical DataInlet flangeDN160ISO-
Page 65 and 66: Technical DataOrdering InformationI
Page 67 and 68: Technical DataOrdering InformationM
Page 69 and 70: Technical DataMax input Power240WMa
Page 71 and 72: Technical DataPump / TIC powerEXT75
Page 75 and 76: Vibration IsolatorA vibration isola
Page 77 and 78: Technical DataPumping Speed for N 2
Page 79 and 80: STP Magnetically Levitated Turbomol
Page 81 and 82: STPs and the EnvironmentReducing En
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Page 115 and 116: Technical DataInlet flange sizeVF30
Page 119 and 120: Ordering InformationProduct Descrip
Page 121 and 122: Vapour Pumps3Page117High Throughput
Page 123 and 124: Vapour Pumps for Industrial Applica
Page 125 and 126: Technical DataOrdering InformationC
Page 131 and 132: Technical DataOrdering InformationP
Page 133 and 134: Technical DataOrdering InformationP
Page 135 and 136: Ordering informationProduct descrip
Page 137 and 138: 250/2000 Installation3711163P10**5P
Page 139 and 140: Notes3Page135Shop online at www.edw
Page 141 and 142: Measurement & Control4TIC Instrumen
Page 143 and 144: The Active Gauge Concept• Operate
Page 145 and 146: Technical DataElectrical DataConnec
Page 147 and 148: Technical DataOrdering InformationE
Page 149 and 150: Technical DataActive gauge compatib
Page 151 and 152: Technical DataMass85 gInternal volu
Page 153 and 154: Ordering InformationProduct Descrip
Page 155 and 156: Technical DataATC-E Electronics Mod
Page 157 and 158: Technical DataFull scale pressure r
Page 159 and 160: Technical DataFull scale pressure r
Page 161 and 162: Technical DataPressure RangeAIM-X10
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Technical DataPressure rangeAccurac
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Ordering InformationProduct Descrip
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CG16K dial gaugeEdwards CG16K capsu
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VS16K Adjustable Vacuum SwitchThe V
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Vacuum ValvesSpeedivalves 169Ball V
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SpeedivalveEdwards SP Speedivalves
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IBV series vacuum ball valvesBall v
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PVMK Manual Operation Right Angle I
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PVPK Pneumatic Operation Right Angl
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IPVPK Pneumatic Operation In-Line I
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PVEK Solenoid Operation Right Angle
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IPVEK Solenoid Operation In-Line Is
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LCPVEK Solenoid Operation Isolation
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LCPVEK Solenoid Operation Isolation
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BRV Backing/Roughing ValveEdwards b
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SIPVP Soft-Start Isolation ValvesSo
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BGV Manual Gate ValvesThe BGV basem
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BGV Pneumatic Gate ValvesThe BGV ba
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GV Manual and Pneumatic Gate Valves
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QSB Quarter Swing Butterfly ValveTh
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AV5A Air Admittance Valve With Coup
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LV10K Leak Valve NW10 FlangesThe LV
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Technical DataValveGV gate valvesPV
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Fittings and FlangesProduct Summary
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CF Flange Names There are many desc
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DimensionsNW Dimensions2.5ØAØBISO
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NW fittingsSize A B C D E F Orderin
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Size A B C D E F Ordering NumberNit
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Size A B C D E F Ordering NumberAEl
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Size A B C D E F Ordering NumberAFu
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Size A B C D E F Ordering NumberABA
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Size A B C D E F Ordering NumberABC
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ISO fittingsSize A B C D E F Orderi
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Size A B C D E F Ordering NumberACe
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Size A B C D E F Ordering NumberBAT
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Size A B C D E F Ordering NumberABF
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Size A B C D E F Ordering NumberACD
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Size A B C D E F Ordering NumberElb
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Size A B C D E F Ordering NumberDAB
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Size A B C D E F Ordering NumberAC
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Oils, Fluids, Sealants and GreasesW
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Mechanical Pump Oil Selection Chart
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Vapour Pump FluidsEdwards supplies
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Greases and WaxesGreases and waxesS
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Semiconductor PumpsiXL Dry Pumps 24
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Technical DataProductiXL120Peak spe
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Technical DataPeak speedUltimate va
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Technical DataPerformancePeak speed
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Product Selection GuideVacuumPROCES
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Industrial Pumps and Pumping System
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EV Oil Sealed Single Stage Rotary V
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GXS industrial Dry Screw PumpDesign
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Technical DataOrdering InformationG
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Technical DataOrdering InformationD
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Technical DataMass IDX1000 IDX13005
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ITM High Capacity Inlet Dust Filter
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Technical DataDisplacement50Hz 42.5
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Technical DataDisplacement50Hz 80 m
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Technical DataDisplacement50Hz 178
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Technical DataDisplacement50Hz 292
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Vibration IsolatorsYou may need to
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Ordering Information - All Territor
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Stokes Microvac Series Oil Sealed R
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Stokes Microvac Model 412JThe Stoke
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Stokes Microvac Model 912JThe Stoke
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Oil Reservoir HeaterEdwards model 2
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MB/MV Series VerticallyOriented Boo
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Stokes 612MB Multi-Stage Pumping Sy
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Stokes 1721 Mechanical Booster Pump
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Stokes 1733HD Mechanical Booster Pu
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Stokes 1738BP Mechanical Booster Pu
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Stokes 1738 HCBP Mechanical Booster
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Stokes 1738HDBP Mechanical Booster
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Stokes 1739BP Mechanical Booster Pu
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Stokes 1739HCBP Mechanical Booster
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Stokes 1739HDBP Mechanical Booster
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Stokes 1754HC Mechanical Booster Pu
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EV40 Oil Sealed PumpThe EV rotary v
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EV100 Oil Sealed PumpThe EV rotary
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EV200 Rotary vane pumpThe EV rotary
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EV400 Rotary vane pumpThe EV rotary
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Accessories for Single Stage Oil Se
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EH Mechanical Booster PumpsBroad Ap
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EH250 Mechanical Booster PumpThe EH
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EH500 Mechanical booster pumpThe EH
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EH1200 Mechanical booster pumpThe E
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Mechanical Booster Pump Accessories
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Stokes 607 Series Mechanical Booste
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Stokes 61B Series By-Pass Mechanica
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HV8000 Mechanical booster pumpThe E
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HV30000 Mechanical Booster PumpThe
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Chemical Dry PumpsCXS Chemical dry
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CXS Chemical Dry Screw PumpDesigned
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CXS160 chemical dry pumpEdwards pio
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CXS250 chemical dry pumpEdwards pio
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CDX1000 Dry Vacuum PumpEdwards CDX1
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EDP80 - Dry Chemical PumpsEDP pumps
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EDP160 - Dry Chemical PumpsEDP pump
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Liquid Ring PumpsHR Series Liquid R
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ApplicationsSome of the more common
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Liquid Ring Pump Applications in Po
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Features & Benefits• Two stage li
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Exhaust Gas Treatment ApplicationsT
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EHR2390 Liquid Ring PumpWithin Edwa
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SHR2750 Liquid Ring PumpWithin Edwa
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SHR21200 Liquid Ring PumpWithin Edw
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SHR22500 Liquid Ring PumpWithin Edw
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LR1A300 Liquid Ring PumpEdwards off
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LR1A1300 Liquid Ring PumpEdwards of
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LR1A12000 Liquid Ring PumpEdwards o
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LR1B3500 Liquid Ring PumpEdwards of
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LR1B11000 Liquid Ring PumpEdwards o
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Shelf Dryers11Page449Shop online at
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Data Summary Stokes Vacuum Shelf Dr
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Process Vacuum12Page453Shop online
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Deaeration EquipmentMultistage Ejec
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Boiler Feedwater and Process Water
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ServiceGuide to Pump Selection and
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Certified ProductsEdwards Certified
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Guide to Pump Selection and Pipe In
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Effect of the Pipe Between the Seco
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Material Safety Data SheetsThe foll
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Shop online at www.edwardsvacuum.co
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RoHS ComplianceThe EU RoHS (Restric
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