Vacuum Catalogue - Edwards

More documents

Recommendations

Info

Global Support from EdwardsOur worldwide network of around 1000 service personnel is easily and simply accessed through your local Edwards Office.www.edwardsvacuum.com/service13Page462Location Contact Telephone Number Contact EmailUnited KingdomIrelandBeneluxAustriaSwitzerlandPolandCzech RepublicRussiaEastern EuropeMiddle EastSouth AfricaGermany+44 (0)1293 842202+49 (0)800 000 1457Aftersales@edwardsvacuum.comDEservice@edwardsvacuum.comItaly +39 (0)863 509516 ITmanutenzione@edwardsvacuum.comFrance, North Africa +33 (0) 1 47 98 24 01 FRserviceapresvente@edwardsvacuum.comIsrael +(972) 7 681 0633 Edwards.israel@edwardsvacuum.comAmericas (except Brazil) +(1) 1 800 848 9800 edwardsstokesservice@edwardsvacuum.comBrazil + 55 11 3952 5000 service@edwardsvacuum.com.brSE Asia, Australasia +(65) 6546 8408 Customer.careSG@edwardsvacuum.comKorea +(82) 41 621 7070 infokorea@edwardsvacuum.comTaiwan ROC +886-37-581000 Customer.CareTW@edwardsvacuum.comPeoples Republic of China and SAR +(86) 21 5866 9618 x25 CareSHA.Customer@edwardsvacuum.comJapan +81-47-458-8853 edj.service@edwardsvacuum.comIndia +91-20-40752210 India@edwardsvacuum.comShop online at www.edwardsvacuum.com
Guide to Pump Selection and Pipe InstallationOur experienced applications team are trained to provide expert advice on specifying the correct pumping system. Please contact your localEdwards office for further details.Rotary Pump Speed and Pump-Down TimeCalculationsTo estimate the pump speed you need to reach a given systempressure, P:S = (F × V)/t (1)To estimate the time to pump-down your system to a givenpressure, P:t = (F × V)/S (2)where t is the pump-down timeF is the pump-down factor at pressure PV is the volume of the vacuum systemS is the speed of the rotary pumpRead F from Figure 1. t, V and S must be in consistent units: forexample, t in hours, V in cubic metres (m 3 ) and S in cubic metres perhour (m 3 h -1 ).Speed and Power Curves22Speed and Power Curves-1C (l s )410310210110010-110-210-41025015010010 -3 10 -2 10 -1 10 0 10 1 10 2 mbar7040Ømm2516125F201816141210864220-2 -110 101 One-stage rotary pump2 Two-stage rotary pump or pump combination1010Figure 1 – Pump-down factor, F, as a function of system pressure, mbarF applies a correction for the change in the speed of rotary pumps asthe inlet pressure decreases. But F does not include a correction forthe effect of conductance of inter-connecting pipes (refer to thesection below if you want to apply this correction).These calculations apply to clean and leak tight vacuum systems. Itis difficult to extend these curves to below 0.1 mbar, because theeffect of system design and out-gassing become increasinglyimportant at lower pressures.For example, you have a 0.06 m 3 (60 l) vacuum system that you mustevacuate to 1 mbar in 0.05 hr (3 minutes). From Figure 1, at 1 mbarF=7.S = (F × V)/t = (7 × 0.06)/0.05 = 8.4 m 3 h -1So, you require a pump with a minimum speed of 8.4 m 3 h -1 and anultimate vacuum well below 1 mbar. Edwards RV8 pump is suitablefor this application.Effect of the Conductance of Connection PipesResistance to flow of gases and vapours through pipes cansignificantly affect the size of pump you require or the pump-downtime you can achieve with a given pump. If you know the dimensionsof the pipes in your system, you can correct the speed and pumpdowntime calculations. The conductance of 1 m lengths of pipes ofvarious diameters is shown in Figure 2.Please note these limitations for the data in this graph. The datashown in the dotted portions of the curves applies only to low velocity,viscous, laminar flow in long pipes (where the length of the pipe istypically many 100 times the pipe diameter). This data does not applyto turbulent flow (when the pipe conductance may be significantlyreduced) or to compressed gases (such as gases in short pipes orsubject to high speed flows). If your calculations are for short pipes(where the length of the pipe is typically < 100 times the pipediameter), or for pipe diameters and pressures shown by the dottedportions of the curves in Figure 2, please refer to Wutz 1 or Dushman 2 ,or contact Edwards for advice.110210310 mbar20 1 510 10 10 10 3 10 4 10 Pa-2 -110 100110 10210 10 3 104Figure 2 – Conductance of 1 m of round pipe, for air at 20 °C (the data shown in the dottedportions of the curves is for low velocity, viscous, laminar flow in long pipes)The conductance of a pipe at a given pressure is:C p = C/lwhere C p is the conductance of the pipeC is the conductance per metre, read from Figure 2l is the length of the pipe in metres.Then, you can use the value for C p to correct the pumping speed atthe end of the pipe when it is connected to the pump inlet; use thisequation:1/S p = (1/S) + (1/C p ) or S p = (C p × S)/(C p + S) (3)where S p is the pumping speed at the end of the pipeS is the speed of the pump.Use a similar procedure to make an approximate correction to thepump-down time calculation. First, read the value of C at the requiredsystem pressure from Figure 2, and calculate C p for your pipe at thatpressure. Then use the pump speed, S, and C p in equation (3) tocalculate the corrected speed, S p . Use this value of S p in equation (2)to estimate the pump-down time, t.If you use a narrow pipe between the pump and the process chamber,this restricts the effective pumping speed. It is usually moreeconomical to use a wider or shorter pipe and a smaller pump, thanto restrict the pumping speed of a larger pump. You should aim at theeffective pumping speed to be 80% or more of the pump’s speed. Youcan use equation (3) and the graph in Figure 2 to select the minimumsize of the pipe you need.For example, you need a pumping speed of 150 m 3 h -1 at 1.0 mbar inyour process chamber, and the pump must be 6 m away from thechamber. The E2M175 (135 m 3 h -1 at 1 mbar) is too small for thisapplication, even without losses in the pipelines. So, consider theE2M275 pump which has a pump speed of 230 m 3 h -1 . Use equation(3) to calculate the minimum conductance of the connecting pipe:C p = (S × S p )/(S – S p ) = (230 × 150)/(230 – 150) = 430 m 3 h -1The conductance per metre is then 430 × 6 = 2580 m 3 h -1 . In Figure 2,the nearest larger diameter pipe that has a conductance of 2580 m 3 h -1 or more at 1.0 mbar is 70 mm. Conveniently, this is the samediameter as the inlet of the E2M275 pump.1 Theory and Practice of Vacuum Technology, M Wutz, A Herman, and W Walcher,Friedr. Vieweg and Sohn, (1989)2 Scientific Foundations of Vacuum Technique, 3rd ed, S Dushman and J Lafferty, Wiley(1997)Pa13Page463Shop online at www.edwardsvacuum.com
Page 1 and 2:
PRODUCT CATALOGUE2012
Page 3:
ContentsSmall Wet/Dry PumpsTurbomol
Page 6 and 7:
Small Pumps and Pumping Systems1Pag
Page 8 and 9:
Small Pumps and Accessories: Freque
Page 10 and 11:
1Page6Technical DataNominal rotatio
Page 12 and 13:
1Page8Technical DataNominal rotatio
Page 14 and 15:
1Page10Technical DataNominal rotati
Page 16 and 17:
1Page12Technical DataNominal rotati
Page 18 and 19:
XDS35i Scroll Vacuum Pump1Page14The
Page 20:
XDS46i Scroll Vacuum Pump1Page16The
Page 23 and 24:
Technical DataOrdering InformationP
Page 25 and 26:
E2M0.7 Two Stage Rotary Vane PumpTh
Page 27 and 28:
E2M1.5 Two Stage Rotary Vane PumpTh
Page 29 and 30:
RV3 Two Stage Rotary Vane PumpEdwar
Page 31 and 32:
Page 33 and 34:
Page 35 and 36:
RV12 Two Stage Rotary Vane PumpEdwa
Page 37 and 38:
E1M18 One Stage, E2M18 Two Stage Ro
Page 39 and 40:
E2M28 Two Stage Rotary Vane PumpThe
Page 41 and 42:
RV ATEX Two Stage Rotary Vane PumpA
Page 43 and 44:
E1M18 One Stage, E2M18 Two Stage AT
Page 45 and 46:
Electrical DataSmall Pump Accessori
Page 47 and 48:
Ordering InformationProduct Descrip
Page 49 and 50:
Vibration IsolatorsYou may need to
Page 51 and 52:
Performance Curves1. D-LAB 34-100 2
Page 53 and 54:
Page 55 and 56:
Turbomolecular Pumps2Page51nEXT Tur
Page 57 and 58:
VentingTo maintain the cleanliness
Page 59 and 60:
Technical DataInlet flangeDN100ISO-
Page 61 and 62:
Page 63 and 64:
Page 65 and 66:
Technical DataOrdering InformationI
Page 67 and 68:
Technical DataOrdering InformationM
Page 69 and 70:
Technical DataMax input Power240WMa
Page 71 and 72:
Technical DataPump / TIC powerEXT75
Page 73 and 74:
Page 75 and 76:
Vibration IsolatorA vibration isola
Page 77 and 78:
Technical DataPumping Speed for N 2
Page 79 and 80:
STP Magnetically Levitated Turbomol
Page 81 and 82:
STPs and the EnvironmentReducing En
Page 83 and 84:
Page 85 and 86:
Page 87 and 88:
Page 89 and 90:
Page 91 and 92:
Page 93 and 94:
Page 95 and 96:
Page 97 and 98:
Page 99 and 100:
Page 101 and 102:
Page 103 and 104:
Page 105 and 106:
Page 107 and 108:
Page 109 and 110:
Page 111 and 112:
Page 113 and 114:
Page 115 and 116:
Technical DataInlet flange sizeVF30
Page 117 and 118:
Page 119 and 120:
Page 121 and 122:
Vapour Pumps3Page117High Throughput
Page 123 and 124:
Vapour Pumps for Industrial Applica
Page 125 and 126:
Technical DataOrdering InformationC
Page 127 and 128:
Page 129 and 130:
Page 131 and 132:
Page 133 and 134:
Page 135 and 136:
Ordering informationProduct descrip
Page 137 and 138:
250/2000 Installation3711163P10**5P
Page 139 and 140:
Notes3Page135Shop online at www.edw
Page 141 and 142:
Measurement & Control4TIC Instrumen
Page 143 and 144:
The Active Gauge Concept• Operate
Page 145 and 146:
Technical DataElectrical DataConnec
Page 147 and 148:
Technical DataOrdering InformationE
Page 149 and 150:
Technical DataActive gauge compatib
Page 151 and 152:
Technical DataMass85 gInternal volu
Page 153 and 154:
Page 155 and 156:
Technical DataATC-E Electronics Mod
Page 157 and 158:
Technical DataFull scale pressure r
Page 159 and 160:
Technical DataFull scale pressure r
Page 161 and 162:
Technical DataPressure RangeAIM-X10
Page 163 and 164:
Technical DataPressure rangeAccurac
Page 165 and 166:
Page 167 and 168:
CG16K dial gaugeEdwards CG16K capsu
Page 169 and 170:
VS16K Adjustable Vacuum SwitchThe V
Page 171 and 172:
Vacuum ValvesSpeedivalves 169Ball V
Page 173 and 174:
SpeedivalveEdwards SP Speedivalves
Page 175 and 176:
IBV series vacuum ball valvesBall v
Page 177 and 178:
PVMK Manual Operation Right Angle I
Page 179 and 180:
PVPK Pneumatic Operation Right Angl
Page 181 and 182:
IPVPK Pneumatic Operation In-Line I
Page 183 and 184:
PVEK Solenoid Operation Right Angle
Page 185 and 186:
IPVEK Solenoid Operation In-Line Is
Page 187 and 188:
LCPVEK Solenoid Operation Isolation
Page 189 and 190:
LCPVEK Solenoid Operation Isolation
Page 191 and 192:
BRV Backing/Roughing ValveEdwards b
Page 193 and 194:
SIPVP Soft-Start Isolation ValvesSo
Page 195 and 196:
BGV Manual Gate ValvesThe BGV basem
Page 197 and 198:
BGV Pneumatic Gate ValvesThe BGV ba
Page 199 and 200:
GV Manual and Pneumatic Gate Valves
Page 201 and 202:
QSB Quarter Swing Butterfly ValveTh
Page 203 and 204:
AV5A Air Admittance Valve With Coup
Page 205 and 206:
LV10K Leak Valve NW10 FlangesThe LV
Page 207 and 208:
Technical DataValveGV gate valvesPV
Page 209 and 210:
Fittings and FlangesProduct Summary
Page 211 and 212:
CF Flange Names There are many desc
Page 213 and 214:
DimensionsNW Dimensions2.5ØAØBISO
Page 215 and 216:
NW fittingsSize A B C D E F Orderin
Page 217 and 218:
Size A B C D E F Ordering NumberNit
Page 219 and 220:
Size A B C D E F Ordering NumberAEl
Page 221 and 222:
Size A B C D E F Ordering NumberAFu
Page 223 and 224:
Size A B C D E F Ordering NumberABA
Page 225 and 226:
Size A B C D E F Ordering NumberABC
Page 227 and 228:
ISO fittingsSize A B C D E F Orderi
Page 229 and 230:
Size A B C D E F Ordering NumberACe
Page 231 and 232:
Size A B C D E F Ordering NumberBAT
Page 233 and 234:
Size A B C D E F Ordering NumberABF
Page 235 and 236:
Size A B C D E F Ordering NumberACD
Page 237 and 238:
Size A B C D E F Ordering NumberElb
Page 239 and 240:
Size A B C D E F Ordering NumberDAB
Page 241 and 242:
Size A B C D E F Ordering NumberAC
Page 243 and 244:
Oils, Fluids, Sealants and GreasesW
Page 245 and 246:
Mechanical Pump Oil Selection Chart
Page 247 and 248:
Vapour Pump FluidsEdwards supplies
Page 249 and 250:
Greases and WaxesGreases and waxesS
Page 251 and 252:
Semiconductor PumpsiXL Dry Pumps 24
Page 253 and 254:
Technical DataProductiXL120Peak spe
Page 255 and 256:
Technical DataPeak speedUltimate va
Page 257 and 258:
Page 259 and 260:
Page 261 and 262:
Page 263 and 264:
Page 265 and 266:
Page 267 and 268:
Page 269 and 270:
Page 271 and 272:
Technical DataPerformancePeak speed
Page 273 and 274:
Page 275 and 276:
Page 277 and 278:
Product Selection GuideVacuumPROCES
Page 279 and 280:
Industrial Pumps and Pumping System
Page 281 and 282:
EV Oil Sealed Single Stage Rotary V
Page 283 and 284:
GXS industrial Dry Screw PumpDesign
Page 285 and 286:
Technical DataOrdering InformationG
Page 287 and 288:
Page 289 and 290:
Page 291 and 292:
Page 293 and 294:
Technical DataOrdering InformationD
Page 295 and 296:
Technical DataMass IDX1000 IDX13005
Page 297 and 298:
ITM High Capacity Inlet Dust Filter
Page 299 and 300:
Technical DataDisplacement50Hz 42.5
Page 301 and 302:
Technical DataDisplacement50Hz 80 m
Page 303 and 304:
Technical DataDisplacement50Hz 178
Page 305 and 306:
Technical DataDisplacement50Hz 292
Page 307 and 308:
Vibration IsolatorsYou may need to
Page 309 and 310:
Ordering Information - All Territor
Page 311 and 312:
Stokes Microvac Series Oil Sealed R
Page 313 and 314:
Stokes Microvac Model 412JThe Stoke
Page 315 and 316:
Stokes Microvac Model 912JThe Stoke
Page 317 and 318:
Oil Reservoir HeaterEdwards model 2
Page 319 and 320:
MB/MV Series VerticallyOriented Boo
Page 321 and 322:
Stokes 612MB Multi-Stage Pumping Sy
Page 323 and 324:
Stokes 1721 Mechanical Booster Pump
Page 325 and 326:
Page 327 and 328:
Page 329 and 330:
Stokes 1733HD Mechanical Booster Pu
Page 331 and 332:
Stokes 1738BP Mechanical Booster Pu
Page 333 and 334:
Stokes 1738 HCBP Mechanical Booster
Page 335 and 336:
Stokes 1738HDBP Mechanical Booster
Page 337 and 338:
Stokes 1739BP Mechanical Booster Pu
Page 339 and 340:
Stokes 1739HCBP Mechanical Booster
Page 341 and 342:
Stokes 1739HDBP Mechanical Booster
Page 343 and 344:
Stokes 1754HC Mechanical Booster Pu
Page 345 and 346:
EV40 Oil Sealed PumpThe EV rotary v
Page 347 and 348:
EV100 Oil Sealed PumpThe EV rotary
Page 349 and 350:
EV200 Rotary vane pumpThe EV rotary
Page 351 and 352:
EV400 Rotary vane pumpThe EV rotary
Page 353 and 354:
Accessories for Single Stage Oil Se
Page 355 and 356:
EH Mechanical Booster PumpsBroad Ap
Page 357 and 358:
EH250 Mechanical Booster PumpThe EH
Page 359 and 360:
EH500 Mechanical booster pumpThe EH
Page 361 and 362:
EH1200 Mechanical booster pumpThe E
Page 363 and 364:
Page 365 and 366:
Page 367 and 368:
Mechanical Booster Pump Accessories
Page 369 and 370:
Stokes 607 Series Mechanical Booste
Page 371 and 372:
Page 373 and 374:
Stokes 61B Series By-Pass Mechanica
Page 375 and 376:
Page 377 and 378:
HV8000 Mechanical booster pumpThe E
Page 379 and 380:
HV30000 Mechanical Booster PumpThe
Page 381 and 382:
Chemical Dry PumpsCXS Chemical dry
Page 383 and 384:
CXS Chemical Dry Screw PumpDesigned
Page 385 and 386:
CXS160 chemical dry pumpEdwards pio
Page 387 and 388:
CXS250 chemical dry pumpEdwards pio
Page 389 and 390:
CDX1000 Dry Vacuum PumpEdwards CDX1
Page 391 and 392:
EDP80 - Dry Chemical PumpsEDP pumps
Page 393 and 394:
EDP160 - Dry Chemical PumpsEDP pump
Page 395 and 396:
Page 397 and 398:
Page 399 and 400:
Liquid Ring PumpsHR Series Liquid R
Page 401 and 402:
ApplicationsSome of the more common
Page 403 and 404:
Liquid Ring Pump Applications in Po
Page 405 and 406:
Features & Benefits• Two stage li
Page 407 and 408:
Exhaust Gas Treatment ApplicationsT
Page 409 and 410:
EHR2390 Liquid Ring PumpWithin Edwa
Page 411 and 412:
SHR2750 Liquid Ring PumpWithin Edwa
Page 413 and 414:
SHR21200 Liquid Ring PumpWithin Edw
Page 415 and 416: SHR22500 Liquid Ring PumpWithin Edw
Page 417 and 418: LR1A300 Liquid Ring PumpEdwards off
Page 423 and 424: LR1A1300 Liquid Ring PumpEdwards of
Page 431 and 432: LR1A12000 Liquid Ring PumpEdwards o
Page 437 and 438: LR1B3500 Liquid Ring PumpEdwards of
Page 443 and 444: LR1B11000 Liquid Ring PumpEdwards o
Page 453 and 454: Shelf Dryers11Page449Shop online at
Page 455 and 456: Data Summary Stokes Vacuum Shelf Dr
Page 457 and 458: Process Vacuum12Page453Shop online
Page 459 and 460: Deaeration EquipmentMultistage Ejec
Page 461 and 462: Boiler Feedwater and Process Water
Page 463 and 464: ServiceGuide to Pump Selection and
Page 465: Certified ProductsEdwards Certified
Page 469 and 470: Effect of the Pipe Between the Seco
Page 471 and 472: Material Safety Data SheetsThe foll
Page 473 and 474: Shop online at www.edwardsvacuum.co
Page 483 and 484: RoHS ComplianceThe EU RoHS (Restric
show all

Vacuum Catalogue - Edwards

Create successful ePaper yourself

Delete template?

Save as template?