Vacuum Catalogue - Edwards

iXL120 Dry Pump SystemiXL120 is a compact, low energy, 110 m 3 h -1 dry pump for wafer handling and other cleanduty applications. It provides fast pump down of load lock chambers with extremely lowenergy consumption.iXL120 is one of the smallest and lightest pumps available for load lock and cleanapplications. Its low vibration and low noise levels make it ideal for mounting on-tool orwithin a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allowsreduced utilities usage during idle periods, lowering utility costs and helping to save theenvironment!.Features & BenefitsDimensions7Page248●●●●●Class leading chamber pump down time reduces Total AverageCycle Time (TACT)Only 0.55kW power consumption helps minimise customer costof ownershipGreen Mode can reduce power consumption by up to 92%during idle periodsUp to 35 o C water supply helps reduce facility cooling waterrequirementsExtremely small and light, helping to save valuable fab spacePerformance CurvesOrdering InformationProduct DescriptioniXL120 E 200-460V 3/8 QC Water FittingsOrder No.A54113010iXL120 E 200-460V 1/4 QC Water FittingsA54113020iXL120 E 200-460V HIT 3/8 QC Water FittingsA54113610iXL120 E 200-460V MCM 3/8 QC Water FittingsA54113710iXL120 E 200-460V 3/8 QC Water Fittings Flow Cont ValveiXL120 E 200-460V SPI 1/4 QC Water Fittings Flow ContValveiXL120 E 200-460V HIT 3/8 QC Water Fittings Flow ContValveiXL120 E 200-460V MCM 3/8 QC Water Fittings Flow ContValveiXL120N E 200-460V 3/8 QC Water FittingsA54113011A54113221A54113611A54113711A54114010iXL120N E 200-460V 1/4 QC Water FittingsA54114020iXL120N E 200-460V SPI TIM 3/8 QC Water FittingsA54114210iXL120N E 200-460V TEL 3/8 QC Water FittingsA54114410iXL120N E 200-460V 3/8 QC Water Fittings Flow Cont ValveiXL120N E 200-460V TEL 3/8 QC Water Fittings Flow ContValveA54114011A54114411Shop online at www.edwardsvacuum.com