Vacuum Catalogue - Edwards

STP-XA4503C Turbomolecular PumpThe STP-XA4503C magnetic bearing turbomolecular pump has a wide process window,from high vacuum, to high flow requirements with enhanced throughput for all gases.2Page110This pump is based on a new design, offering features to improve thermal management,which enhances performance on harsh processes, increases the maximum process flowcapability and reduces the effects of corrosion and deposition.It has been designed to handle light and harsh duty applications, such as etch, implant,lithography and FPD processes.Features & BenefitsOrdering Information●●●●●Advanced Rotor DesignIncreased Argon performanceHighest pumping speed in its classWide process windowHigher throughput at lower pressureProduct DescriptionSTP-XA4503C ISO320F InletAccessories & SparesPower Cable 10MPower Cable 5mSCU-1600 Control unitOrder No.YT670Z040Order No.PT35Y0A00B75030020YT76Z0Z00STP straight connection cable, 10mB75030040STP straight connection cable, 5mB75030010DimensionsPerformance CurvesA. TMS Sensor E. Cooling water port 2-RC ¼ (ISO)B. Tms Heater (built in) F. Purge port KF10C. Heater cover G. Inlet port VG350D. Outlet port KF40 H. TMS – Temperature management systemShop online at www.edwardsvacuum.com