Vacuum Catalogue - Edwards

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GX600 Dry PumpThe GX Dry <strong>Vacuum</strong> Pump Series sets new standards for zero maintenance between majoroverhauls. Improved efficiency lowers the cost of ownership and provides continuouspumping duty throughout the pressure range.GX pumps are available in a wide range of peak speeds and variants to addressapplications from clean through to medium-duty processes. A modular design allows usersto configure GX drypumps to suit individual fab requirements. An ultra-compact footprintallows installation options including on-tool, close proximity, or remote.7Features & Benefits●●●●●Reduced Cost of OwnershipUp to a 50% reduction in utilities cost compared to iL/iHdrypumpsNo preventative maintenanceFlexible Installation OptionsSmall and light for easy installationDimensionsApplications●●●Load LockTransferMetrologyPerformance CurvesPage2681. m 3 h -1 2. ft 3 min -1Shop online at www.edwardsvacuum.com
Technical DataPerformancePeak speed 620 m 3 h -1365 ft 3 min -110333 lmin -1Ultimate pressure7 x 10 -4 mbar5.25 x 10 -4 Torr0.07 PaPower at 700 Torr exhaustUltimate1.6 kWAUC (Active Utility Controller) 0.05 kWWater *Water inlet2 slmNitrogen0 slmInstallation DetailsFootprint (excluding exhaust) 0.20 m 2Weight220 kgInlet connection ISO 100Outlet connectionNW25Noise at ultimate
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PRODUCT CATALOGUE2012
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ContentsSmall Wet/Dry PumpsTurbomol
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Small Pumps and Pumping Systems1Pag
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Small Pumps and Accessories: Freque
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1Page6Technical DataNominal rotatio
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1Page8Technical DataNominal rotatio
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1Page10Technical DataNominal rotati
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1Page12Technical DataNominal rotati
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XDS35i Scroll Vacuum Pump1Page14The
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XDS46i Scroll Vacuum Pump1Page16The
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Technical DataOrdering InformationP
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E2M0.7 Two Stage Rotary Vane PumpTh
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E2M1.5 Two Stage Rotary Vane PumpTh
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RV3 Two Stage Rotary Vane PumpEdwar
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RV12 Two Stage Rotary Vane PumpEdwa
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E1M18 One Stage, E2M18 Two Stage Ro
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E2M28 Two Stage Rotary Vane PumpThe
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RV ATEX Two Stage Rotary Vane PumpA
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E1M18 One Stage, E2M18 Two Stage AT
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Electrical DataSmall Pump Accessori
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Ordering InformationProduct Descrip
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Vibration IsolatorsYou may need to
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Performance Curves1. D-LAB 34-100 2
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Turbomolecular Pumps2Page51nEXT Tur
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VentingTo maintain the cleanliness
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Technical DataInlet flangeDN100ISO-
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Technical DataOrdering InformationI
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Technical DataOrdering InformationM
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Technical DataMax input Power240WMa
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Technical DataPump / TIC powerEXT75
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Vibration IsolatorA vibration isola
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Technical DataPumping Speed for N 2
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STP Magnetically Levitated Turbomol
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STPs and the EnvironmentReducing En
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Technical DataInlet flange sizeVF30
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Vapour Pumps3Page117High Throughput
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Vapour Pumps for Industrial Applica
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Technical DataOrdering InformationC
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Ordering informationProduct descrip
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250/2000 Installation3711163P10**5P
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Notes3Page135Shop online at www.edw
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Measurement & Control4TIC Instrumen
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The Active Gauge Concept• Operate
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Technical DataElectrical DataConnec
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Technical DataOrdering InformationE
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Technical DataActive gauge compatib
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Technical DataMass85 gInternal volu
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Technical DataATC-E Electronics Mod
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Technical DataFull scale pressure r
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Technical DataFull scale pressure r
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Technical DataPressure RangeAIM-X10
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Technical DataPressure rangeAccurac
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CG16K dial gaugeEdwards CG16K capsu
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VS16K Adjustable Vacuum SwitchThe V
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Vacuum ValvesSpeedivalves 169Ball V
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SpeedivalveEdwards SP Speedivalves
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IBV series vacuum ball valvesBall v
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PVMK Manual Operation Right Angle I
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PVPK Pneumatic Operation Right Angl
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IPVPK Pneumatic Operation In-Line I
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PVEK Solenoid Operation Right Angle
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IPVEK Solenoid Operation In-Line Is
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LCPVEK Solenoid Operation Isolation
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LCPVEK Solenoid Operation Isolation
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BRV Backing/Roughing ValveEdwards b
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SIPVP Soft-Start Isolation ValvesSo
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BGV Manual Gate ValvesThe BGV basem
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BGV Pneumatic Gate ValvesThe BGV ba
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GV Manual and Pneumatic Gate Valves
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QSB Quarter Swing Butterfly ValveTh
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AV5A Air Admittance Valve With Coup
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LV10K Leak Valve NW10 FlangesThe LV
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Technical DataValveGV gate valvesPV
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Fittings and FlangesProduct Summary
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CF Flange Names There are many desc
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DimensionsNW Dimensions2.5ØAØBISO
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NW fittingsSize A B C D E F Orderin
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Size A B C D E F Ordering NumberNit
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Size A B C D E F Ordering NumberAEl
Page 221 and 222: Size A B C D E F Ordering NumberAFu
Page 223 and 224: Size A B C D E F Ordering NumberABA
Page 225 and 226: Size A B C D E F Ordering NumberABC
Page 227 and 228: ISO fittingsSize A B C D E F Orderi
Page 229 and 230: Size A B C D E F Ordering NumberACe
Page 231 and 232: Size A B C D E F Ordering NumberBAT
Page 233 and 234: Size A B C D E F Ordering NumberABF
Page 235 and 236: Size A B C D E F Ordering NumberACD
Page 237 and 238: Size A B C D E F Ordering NumberElb
Page 239 and 240: Size A B C D E F Ordering NumberDAB
Page 241 and 242: Size A B C D E F Ordering NumberAC
Page 243 and 244: Oils, Fluids, Sealants and GreasesW
Page 245 and 246: Mechanical Pump Oil Selection Chart
Page 247 and 248: Vapour Pump FluidsEdwards supplies
Page 249 and 250: Greases and WaxesGreases and waxesS
Page 251 and 252: Semiconductor PumpsiXL Dry Pumps 24
Page 253 and 254: Technical DataProductiXL120Peak spe
Page 255 and 256: Technical DataPeak speedUltimate va
Page 259 and 260: Technical DataOrdering InformationP
Page 271: Technical DataPerformancePeak speed
Page 275 and 276: Technical DataPerformancePeak speed
Page 277 and 278: Product Selection GuideVacuumPROCES
Page 279 and 280: Industrial Pumps and Pumping System
Page 281 and 282: EV Oil Sealed Single Stage Rotary V
Page 283 and 284: GXS industrial Dry Screw PumpDesign
Page 285 and 286: Technical DataOrdering InformationG
Page 293 and 294: Technical DataOrdering InformationD
Page 295 and 296: Technical DataMass IDX1000 IDX13005
Page 297 and 298: ITM High Capacity Inlet Dust Filter
Page 299 and 300: Technical DataDisplacement50Hz 42.5
Page 301 and 302: Technical DataDisplacement50Hz 80 m
Page 303 and 304: Technical DataDisplacement50Hz 178
Page 305 and 306: Technical DataDisplacement50Hz 292
Page 307 and 308: Vibration IsolatorsYou may need to
Page 309 and 310: Ordering Information - All Territor
Page 311 and 312: Stokes Microvac Series Oil Sealed R
Page 313 and 314: Stokes Microvac Model 412JThe Stoke
Page 315 and 316: Stokes Microvac Model 912JThe Stoke
Page 317 and 318: Oil Reservoir HeaterEdwards model 2
Page 319 and 320: MB/MV Series VerticallyOriented Boo
Page 321 and 322: Stokes 612MB Multi-Stage Pumping Sy
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Stokes 1721 Mechanical Booster Pump
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Stokes 1733HD Mechanical Booster Pu
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Stokes 1738BP Mechanical Booster Pu
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Stokes 1738 HCBP Mechanical Booster
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Stokes 1738HDBP Mechanical Booster
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Stokes 1739BP Mechanical Booster Pu
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Stokes 1739HCBP Mechanical Booster
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Stokes 1739HDBP Mechanical Booster
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Stokes 1754HC Mechanical Booster Pu
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EV40 Oil Sealed PumpThe EV rotary v
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EV100 Oil Sealed PumpThe EV rotary
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EV200 Rotary vane pumpThe EV rotary
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EV400 Rotary vane pumpThe EV rotary
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Accessories for Single Stage Oil Se
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EH Mechanical Booster PumpsBroad Ap
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EH250 Mechanical Booster PumpThe EH
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EH500 Mechanical booster pumpThe EH
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EH1200 Mechanical booster pumpThe E
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Mechanical Booster Pump Accessories
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Stokes 607 Series Mechanical Booste
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Stokes 61B Series By-Pass Mechanica
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HV8000 Mechanical booster pumpThe E
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HV30000 Mechanical Booster PumpThe
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Chemical Dry PumpsCXS Chemical dry
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CXS Chemical Dry Screw PumpDesigned
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CXS160 chemical dry pumpEdwards pio
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CXS250 chemical dry pumpEdwards pio
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CDX1000 Dry Vacuum PumpEdwards CDX1
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EDP80 - Dry Chemical PumpsEDP pumps
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EDP160 - Dry Chemical PumpsEDP pump
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Liquid Ring PumpsHR Series Liquid R
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ApplicationsSome of the more common
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Liquid Ring Pump Applications in Po
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Features & Benefits• Two stage li
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Exhaust Gas Treatment ApplicationsT
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EHR2390 Liquid Ring PumpWithin Edwa
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SHR2750 Liquid Ring PumpWithin Edwa
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SHR21200 Liquid Ring PumpWithin Edw
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SHR22500 Liquid Ring PumpWithin Edw
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LR1A300 Liquid Ring PumpEdwards off
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LR1A1300 Liquid Ring PumpEdwards of
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LR1A12000 Liquid Ring PumpEdwards o
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LR1B3500 Liquid Ring PumpEdwards of
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LR1B11000 Liquid Ring PumpEdwards o
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Shelf Dryers11Page449Shop online at
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Data Summary Stokes Vacuum Shelf Dr
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Process Vacuum12Page453Shop online
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Deaeration EquipmentMultistage Ejec
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Boiler Feedwater and Process Water
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ServiceGuide to Pump Selection and
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Certified ProductsEdwards Certified
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Guide to Pump Selection and Pipe In
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Effect of the Pipe Between the Seco
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Material Safety Data SheetsThe foll
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Shop online at www.edwardsvacuum.co
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RoHS ComplianceThe EU RoHS (Restric
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Vacuum Catalogue - Edwards

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