Vacuum Catalogue - Edwards

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STP1003 Turbomolecular Vacuum Pump2Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the mostadvanced of semiconductor applications. Edwards’s rotor technology gives class-leadingperformance for maximum process flexibility. This pump has been approved for use bymajor equipment manufacturers in the semiconductor and magnetic media industries.Page92Features & Benefits●●●●●Advanced rotor technologyMaximized process flexibilityOil freeLow vibrationHigh reliabilityDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. N 22. He3. H 2A. Electrical connector B. Outlet port C. Purge portShop online at www.edwardsvacuum.com
Technical DataOrdering InformationInlet flangeOutlet portPurge portISO200FKF40KF10Pumping SpeedN -12 1000 lsH 2 800 ls-1Compression ratioN 82 >10H 2 >105Product DescriptionSTP1003C ISO200F InletSTP1003 ISO200F InletSTP1003C DN200CF InletSTP1003 DN200CF InletAccessories & SparesSCU-800 Control unitWater cooling coilSTP301/451/603/1003 Air Cooler 100-120 VACSTP301/451/603/1003 Air Cooler 200-240 VACVibration Isolator ISO200-KOrder No.YT39B0130YT390Z001PT39AZ003YT39B0010Order No.YT49Z2Z00YT170A001YT011A003YT011A005B580610002Page93Ultimate pressure with bake outheating (VG/ISO flange)10 -7 PaPower Cable 5mPower Cable 10mPT49Y0A00PT49Y0A01Ultimate pressure with bake outheating (ICF flange)(10 -9 Torr)10 -8 PaConnection Cable 3mSTP straight connection Cable, 5mSTP straight connection cable ,10mB75130050B75130020B75130060(10 -10 Torr)Max continuous outlet pressure 13 Pa(0.1 Torr)Rated speed35000 rpmStarting time6 minMax inlet flange temp 120 °CInput voltage100 to 120 (± 10) V a.c. orto 240 (± 10) V a.c.Power consumption at Start up 0.8 kVAPump weight31 kgController weight9 kgShop online at www.edwardsvacuum.com
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PRODUCT CATALOGUE2012
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ContentsSmall Wet/Dry PumpsTurbomol
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Small Pumps and Pumping Systems1Pag
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Small Pumps and Accessories: Freque
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1Page6Technical DataNominal rotatio
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1Page8Technical DataNominal rotatio
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1Page10Technical DataNominal rotati
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1Page12Technical DataNominal rotati
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XDS35i Scroll Vacuum Pump1Page14The
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XDS46i Scroll Vacuum Pump1Page16The
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Technical DataOrdering InformationP
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E2M0.7 Two Stage Rotary Vane PumpTh
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E2M1.5 Two Stage Rotary Vane PumpTh
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RV3 Two Stage Rotary Vane PumpEdwar
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RV12 Two Stage Rotary Vane PumpEdwa
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E1M18 One Stage, E2M18 Two Stage Ro
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E2M28 Two Stage Rotary Vane PumpThe
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RV ATEX Two Stage Rotary Vane PumpA
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E1M18 One Stage, E2M18 Two Stage AT
Page 45 and 46: Electrical DataSmall Pump Accessori
Page 47 and 48: Ordering InformationProduct Descrip
Page 49 and 50: Vibration IsolatorsYou may need to
Page 51 and 52: Performance Curves1. D-LAB 34-100 2
Page 53 and 54: Technical DataOrdering InformationP
Page 55 and 56: Turbomolecular Pumps2Page51nEXT Tur
Page 57 and 58: VentingTo maintain the cleanliness
Page 59 and 60: Technical DataInlet flangeDN100ISO-
Page 65 and 66: Technical DataOrdering InformationI
Page 67 and 68: Technical DataOrdering InformationM
Page 69 and 70: Technical DataMax input Power240WMa
Page 71 and 72: Technical DataPump / TIC powerEXT75
Page 75 and 76: Vibration IsolatorA vibration isola
Page 77 and 78: Technical DataPumping Speed for N 2
Page 79 and 80: STP Magnetically Levitated Turbomol
Page 81 and 82: STPs and the EnvironmentReducing En
Page 95: Technical DataOrdering InformationI
Page 115 and 116: Technical DataInlet flange sizeVF30
Page 119 and 120: Ordering InformationProduct Descrip
Page 121 and 122: Vapour Pumps3Page117High Throughput
Page 123 and 124: Vapour Pumps for Industrial Applica
Page 125 and 126: Technical DataOrdering InformationC
Page 135 and 136: Ordering informationProduct descrip
Page 137 and 138: 250/2000 Installation3711163P10**5P
Page 139 and 140: Notes3Page135Shop online at www.edw
Page 141 and 142: Measurement & Control4TIC Instrumen
Page 143 and 144: The Active Gauge Concept• Operate
Page 145 and 146: Technical DataElectrical DataConnec
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Technical DataOrdering InformationE
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Technical DataActive gauge compatib
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Technical DataMass85 gInternal volu
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Ordering InformationProduct Descrip
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Technical DataATC-E Electronics Mod
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Technical DataFull scale pressure r
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Technical DataFull scale pressure r
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Technical DataPressure RangeAIM-X10
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Technical DataPressure rangeAccurac
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Ordering InformationProduct Descrip
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CG16K dial gaugeEdwards CG16K capsu
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VS16K Adjustable Vacuum SwitchThe V
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Vacuum ValvesSpeedivalves 169Ball V
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SpeedivalveEdwards SP Speedivalves
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IBV series vacuum ball valvesBall v
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PVMK Manual Operation Right Angle I
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PVPK Pneumatic Operation Right Angl
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IPVPK Pneumatic Operation In-Line I
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PVEK Solenoid Operation Right Angle
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IPVEK Solenoid Operation In-Line Is
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LCPVEK Solenoid Operation Isolation
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LCPVEK Solenoid Operation Isolation
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BRV Backing/Roughing ValveEdwards b
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SIPVP Soft-Start Isolation ValvesSo
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BGV Manual Gate ValvesThe BGV basem
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BGV Pneumatic Gate ValvesThe BGV ba
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GV Manual and Pneumatic Gate Valves
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QSB Quarter Swing Butterfly ValveTh
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AV5A Air Admittance Valve With Coup
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LV10K Leak Valve NW10 FlangesThe LV
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Technical DataValveGV gate valvesPV
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Fittings and FlangesProduct Summary
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CF Flange Names There are many desc
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DimensionsNW Dimensions2.5ØAØBISO
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NW fittingsSize A B C D E F Orderin
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Size A B C D E F Ordering NumberNit
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Size A B C D E F Ordering NumberAEl
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Size A B C D E F Ordering NumberAFu
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Size A B C D E F Ordering NumberABA
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Size A B C D E F Ordering NumberABC
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ISO fittingsSize A B C D E F Orderi
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Size A B C D E F Ordering NumberACe
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Size A B C D E F Ordering NumberBAT
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Size A B C D E F Ordering NumberABF
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Size A B C D E F Ordering NumberACD
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Size A B C D E F Ordering NumberElb
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Size A B C D E F Ordering NumberDAB
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Size A B C D E F Ordering NumberAC
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Oils, Fluids, Sealants and GreasesW
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Mechanical Pump Oil Selection Chart
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Vapour Pump FluidsEdwards supplies
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Greases and WaxesGreases and waxesS
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Semiconductor PumpsiXL Dry Pumps 24
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Technical DataProductiXL120Peak spe
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Technical DataPeak speedUltimate va
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Technical DataPerformancePeak speed
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Product Selection GuideVacuumPROCES
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Industrial Pumps and Pumping System
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EV Oil Sealed Single Stage Rotary V
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GXS industrial Dry Screw PumpDesign
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Technical DataOrdering InformationG
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Technical DataOrdering InformationD
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Technical DataMass IDX1000 IDX13005
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ITM High Capacity Inlet Dust Filter
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Technical DataDisplacement50Hz 42.5
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Technical DataDisplacement50Hz 80 m
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Technical DataDisplacement50Hz 178
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Technical DataDisplacement50Hz 292
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Vibration IsolatorsYou may need to
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Ordering Information - All Territor
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Stokes Microvac Series Oil Sealed R
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Stokes Microvac Model 412JThe Stoke
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Stokes Microvac Model 912JThe Stoke
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Oil Reservoir HeaterEdwards model 2
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MB/MV Series VerticallyOriented Boo
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Stokes 612MB Multi-Stage Pumping Sy
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Stokes 1721 Mechanical Booster Pump
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Stokes 1733HD Mechanical Booster Pu
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Stokes 1738BP Mechanical Booster Pu
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Stokes 1738 HCBP Mechanical Booster
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Stokes 1738HDBP Mechanical Booster
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Stokes 1739BP Mechanical Booster Pu
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Stokes 1739HCBP Mechanical Booster
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Stokes 1739HDBP Mechanical Booster
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Stokes 1754HC Mechanical Booster Pu
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EV40 Oil Sealed PumpThe EV rotary v
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EV100 Oil Sealed PumpThe EV rotary
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EV200 Rotary vane pumpThe EV rotary
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EV400 Rotary vane pumpThe EV rotary
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Accessories for Single Stage Oil Se
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EH Mechanical Booster PumpsBroad Ap
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EH250 Mechanical Booster PumpThe EH
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EH500 Mechanical booster pumpThe EH
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EH1200 Mechanical booster pumpThe E
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Mechanical Booster Pump Accessories
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Stokes 607 Series Mechanical Booste
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Stokes 61B Series By-Pass Mechanica
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HV8000 Mechanical booster pumpThe E
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HV30000 Mechanical Booster PumpThe
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Chemical Dry PumpsCXS Chemical dry
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CXS Chemical Dry Screw PumpDesigned
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CXS160 chemical dry pumpEdwards pio
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CXS250 chemical dry pumpEdwards pio
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CDX1000 Dry Vacuum PumpEdwards CDX1
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EDP80 - Dry Chemical PumpsEDP pumps
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EDP160 - Dry Chemical PumpsEDP pump
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Liquid Ring PumpsHR Series Liquid R
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ApplicationsSome of the more common
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Liquid Ring Pump Applications in Po
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Features & Benefits• Two stage li
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Exhaust Gas Treatment ApplicationsT
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EHR2390 Liquid Ring PumpWithin Edwa
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SHR2750 Liquid Ring PumpWithin Edwa
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SHR21200 Liquid Ring PumpWithin Edw
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SHR22500 Liquid Ring PumpWithin Edw
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LR1A300 Liquid Ring PumpEdwards off
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LR1A1300 Liquid Ring PumpEdwards of
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LR1A12000 Liquid Ring PumpEdwards o
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LR1B3500 Liquid Ring PumpEdwards of
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LR1B11000 Liquid Ring PumpEdwards o
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Shelf Dryers11Page449Shop online at
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Data Summary Stokes Vacuum Shelf Dr
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Process Vacuum12Page453Shop online
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Deaeration EquipmentMultistage Ejec
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Boiler Feedwater and Process Water
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ServiceGuide to Pump Selection and
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Certified ProductsEdwards Certified
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Guide to Pump Selection and Pipe In
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Effect of the Pipe Between the Seco
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Material Safety Data SheetsThe foll
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Shop online at www.edwardsvacuum.co
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RoHS ComplianceThe EU RoHS (Restric
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