Vacuum Catalogue - Edwards

Technical DataOrdering InformationInlet flangeDN63ISO-K, DN63CF,DN40NW or DN100ISO-KOutlet flangeDN16NWVent/purge port1/8 inch BSPPumping Speed ISO63/63CF(DN40NW)(ISO100)N -1 -1 -1 2 61 ls (42 ls ) (66 ls )He 57 ls -1 (49 ls -1 ) (59 ls -1 )H 2-1 -1 -1 53 ls (48 ls ) (54 ls )Compression ratioProduct DescriptionEXT75DX DN63ISO-KEXT75DX DN63CFEXT75DX DN40NWEXT75DX DN100ISOKEXT75DX DN100ISO-K (DN25NW Backing)EXT75iDX Turbo Pump DN40NWEXT75iDX Turbo Pump DN63ISO-KEXT75iDX Turbo Pump DN63ISO-K (NW25 Interstage)Accessories & SparesDX/nEXT Pump Profibus Communications ModuleOrder No.B72241000B72242000B72243000B72245000B72246000B72235000B72237000B72238000Order No.D397550002Page61N 2 >1 × 1011He 1 x 10 6H 2 5 x 104Recommended backing pump*RV5/nXDS6iMax continuous inlet pressure (lightgas pumping) †water cooling (water at 15 °C,ambient temp at 40 °C)2 × 10 -2 mbarforced air cooled, 35 °C ambient 1 × 10 -2 mbarPump rotational speedNominal rotational speed90000 rpmVariable from 49500 toStandby rotational speed90000 rpm (63000 rpmdefault)Variable from 50-120W (80WProgrammable power limit settingsdefault)Rotational speed;PowerAnalogue outputsconsumption; Pump temp;Controller tempStart time to 90% speed 110 s ‡Ultimate Pressure (ISO/CF)RV backing pump