12.07.2015 Views

Vacuum Catalogue - Edwards

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STP-iXR1606 Turbomolecular vacuum pump2Page80STP-iXR1606 series magnetically levitated turbo-molecular pump provides industry-leadingperformance and incorporates latest technology small power supply into the onboardcontrol which is the same concept with STP-iXA2206/iXA3306 series. The pumpingperformance is improved by the newest developed revolutionary rotor design. This fullyintegrated product offers easy installation and small footprint as an all-in-one solution for allapplication tools.Features & Benefits●●●●●Eliminates connection cable between pump and control unit.Eliminates installation space and cost required by conventionalrack type control unit.Compact design results in easy installation and small foot print.Highest pumping speed in the 8” TMP class, along with the STP-A1603.32% reduced power consumption in the high gas flow area.DimensionsApplications●●●Glass CoatingSolar PVDIndustrial SputteringPerformance CurvesInletportflangeVG150VG200VG250ISO160F ISO200F ISO250FICF203ICF253ICF305ØA 235 300 350 225 285 335 203 253 305ØB 237 237 237 237 237 237 237 237 237C 15 16 16 15 16 16 22 25 28D 420 380 380 420 380 380 420 418 380ØE 210 270 320 200 260 310 181 231.8 284F 22.5 22.5 15 22.5 15 15 9 7.5 5.625G 8-Ø12 8-Ø158-Ø12 12-Ø11 12-Ø1112-Ø1520-Ø8.424-Ø8.432-Ø8.4H 313 273 273 313 273 273 313 311 273I 263 223 223 263 223 223 263 261 223Shop online at www.edwardsvacuum.com

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