Vacuum Catalogue - Edwards

STP-iXA2206C Turbomolecular vacuum pump2Page82The STP-iXA2206 series magnetically levitated turbomolecular pump provides industryleadingperformance and incorporates a small power supply into the onboard control unit –the latest technology of the well-established STP-iXA2205 series. The height of the pump isequal to the STP-A2203C and is also equal to the height of the STP-iXA2205 series withoutit’s power supply (iPS-1200). This fully integrated product offers easy installation and asmall footprint as an all-in-one solution for all application tools.Features & Benefits●●●●●Compact design including a fully integrated controllerInnovative, self-sensing magnetic bearing systemDigital 5-axis controlVibration levels reduced by 50% compared to the existing turbopumpsCan be configured to run corrosive processesDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemestries) formetal (aluminium), tungsten and dialectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping and stationPerformance CurvesInlet portflange VG250 ISO250F ICF305ØA 350 335 305ØB 296 296 296C 18 16 28D 235 245 275E 395 405 435F 312 322 352G 281 291 321H 283 293 323I 322 332 322Shop online at www.edwardsvacuum.com