Vacuum Catalogue - Edwards

STP Magnetically Levitated Turbomolecular PumpsIn April 2002, Edwards Acquired theTurbomolecular Pump Business of SeikoInstruments, Inc.• Distributed and supported globally by Edwards for nearly twentyyears• Designed by continuous improvement on existing proven reliabletechnology• Advanced materials and designs provide:- Class leading performance- Low vibration- Guaranteed reliability- Low cost of ownership• The broad product range covers all potential turbo pumpapplications.• Qualified by all major semiconductor OEM’s• Used in all major semiconductor fabrication plants• Installed base of over 80000 units, 85% in the semiconductorindustryKey Features• Multi-axis magnetic bearing system• High Throughput versions for high flow processes• Low vibration characteristics• Advanced controller technology• Full interfacing capabilityFeatures & Benefits• Improved pumping performance- Optimised for semiconductor process pressures- Maximised gas throughput for each flange size- Applications specific models• New generation universal controllers• Compact (1/2 rack) controller- Auto tune enabling "mix and match" pumps- Integrated TMS control- Improved diagnostics• High power d.c. motor drive- Fast ramp-up time- Self regeneration upon power failure, eliminating the need forbatteriesEdwards is a leader in clean and dry vacuum technology. The firstSTP pumps were sold in 1983 and there are now over 80000installations worldwide. 85% are operating on semiconductor processtools where they demonstrate exceptional levels of reliability. STPpumps are the first choice for applications demanding high up-time,hydrocarbon-free pumping, minimal maintenance and low vibration.• Proven reliability.• Clean oil-free high vacuum.• Complete range from 300 to 4500 l s -1 .• Application specific models.• Very low noise and vibration.• Low cost of ownership.• Virtually maintenance free.• Installation in any orientation.• Full remote control interface.• Supported globally by EdwardsProven Magnetic Bearing TechnologyThe rotor is entirely suspended by magnetic bearings so all contactbetween the rotor and the remainder of the pump is eliminated. Aswell as giving very low vibration, the elimination of contact means nobearing wear and no requirement for consequent pump maintenance.STP RangeUHV Series The Ultra High Vacuum series of magneticallylevitated turbo molecular pumps are the products of choicefor the semiconductor, surface science or high energyphysics industries. They offer unrivalled reliability,performance, cleanliness and class leading low vibrationlevels. The pumps are all d.c. powered, eliminating theneed for batteries, they use a half rack controller whichfeatures auto-tuning and advanced diagnostic features.The range contains pumps with speeds from 300 l s -1 to1000 l s -1 all of which are available in ISO or CF flangevariants.High Throughput Series The high throughput series ofmagnetically levitated turbo pumps generate the high gasflows required by the current generation of semiconductoretch, ion implant and LCD systems. All the pumps featurea five active axis magnetic bearing system and a d.c. drivefor increased robustness and stability. They use a Holweckstage to provide advanced throughput performance. Theyoperate via a half rack controller with auto-tuning,advanced diagnostics and an integrated temperaturemanagement system. The range operates with throughputspeeds from 300 l s -1 to 1300 l s -1 .2Page75Shop online at www.edwardsvacuum.com