Vacuum Catalogue - Edwards

STP-iX455 Turbomolecular vacuum pump2Page78The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motordrive system, providing a 50% reduction in vibration compared to previous generation turbopumps. An integrated controller eliminates the need for a conventional, rack-mountedcontroller and interconnecting cables, and does not require water cooling.The pump features 450 ls -1 pumping speed for nitrogen. The STP-iX455 is an excellent fitfor electron microscope, metrology, lithography and other vibration sensitive applications.Features & Benefits●●●●●Compact Design including a fully integrated controllerInovative, Self-Sensing magnetic bearing systemDigital 5-axis controlVibration levels reduced by 50% compared to the existing turbopumpsCan be configured to run corrosive processesDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. He 2. H 2Compression Ration CR vs Backing PressureInlet Flange A B1. N 2 (450ls -1 ) 2. H 2 (460ls -1 ) 3. N 2 (300ls -1 ) 4. H 2 (300ls -1 )ISO100 130 (5.12) 12 (0.47)DN100CF 152 (5.98) 21 (0.83)(ISO160, VG150) (ISO160, VG150) (ISO100, VG100) (ISO100, VG100)VG100 182 (7.17) 12 (0.47)ISO160 180 (7.09) 12 (0.47)DN160CF 203 (7.99) 22 (0.87)VG150 235 (9.25) 12 (0.47)Shop online at www.edwardsvacuum.com