Vacuum Catalogue - Edwards

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iXL120 Dry Pump SystemiXL120 is a compact, low energy, 110 m 3 h -1 dry pump for wafer handling and other cleanduty applications. It provides fast pump down of load lock chambers with extremely lowenergy consumption.iXL120 is one of the smallest and lightest pumps available for load lock and cleanapplications. Its low vibration and low noise levels make it ideal for mounting on-tool orwithin a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allowsreduced utilities usage during idle periods, lowering utility costs and helping to save theenvironment!.Features & BenefitsDimensions7Page248●●●●●Class leading chamber pump down time reduces Total AverageCycle Time (TACT)Only 0.55kW power consumption helps minimise customer costof ownershipGreen Mode can reduce power consumption by up to 92%during idle periodsUp to 35 o C water supply helps reduce facility cooling waterrequirementsExtremely small and light, helping to save valuable fab spacePerformance CurvesOrdering InformationProduct DescriptioniXL120 E 200-460V 3/8 QC Water FittingsOrder No.A54113010iXL120 E 200-460V 1/4 QC Water FittingsA54113020iXL120 E 200-460V HIT 3/8 QC Water FittingsA54113610iXL120 E 200-460V MCM 3/8 QC Water FittingsA54113710iXL120 E 200-460V 3/8 QC Water Fittings Flow Cont ValveiXL120 E 200-460V SPI 1/4 QC Water Fittings Flow ContValveiXL120 E 200-460V HIT 3/8 QC Water Fittings Flow ContValveiXL120 E 200-460V MCM 3/8 QC Water Fittings Flow ContValveiXL120N E 200-460V 3/8 QC Water FittingsA54113011A54113221A54113611A54113711A54114010iXL120N E 200-460V 1/4 QC Water FittingsA54114020iXL120N E 200-460V SPI TIM 3/8 QC Water FittingsA54114210iXL120N E 200-460V TEL 3/8 QC Water FittingsA54114410iXL120N E 200-460V 3/8 QC Water Fittings Flow Cont ValveiXL120N E 200-460V TEL 3/8 QC Water Fittings Flow ContValveA54114011A54114411Shop online at www.edwardsvacuum.com
Technical DataProductiXL120Peak speed 110 m 3 h -165 cfm1833 lmin -1Ultimate pressure (typical) 0.013 mbar0.009 Torr1.3 PaPower at ultimate0.55 kWPower in Green Mode0.045 kWInlet connectionVerticalISO63HorizontalNW50Outlet connectionNW25Cooling water connection OptionalWater flow 1 lmin -1Weight59 kg7Page249Shop online at www.edwardsvacuum.com
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PRODUCT CATALOGUE2012
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ContentsSmall Wet/Dry PumpsTurbomol
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Small Pumps and Pumping Systems1Pag
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Small Pumps and Accessories: Freque
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1Page6Technical DataNominal rotatio
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1Page8Technical DataNominal rotatio
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1Page10Technical DataNominal rotati
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1Page12Technical DataNominal rotati
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XDS35i Scroll Vacuum Pump1Page14The
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XDS46i Scroll Vacuum Pump1Page16The
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Technical DataOrdering InformationP
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E2M0.7 Two Stage Rotary Vane PumpTh
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E2M1.5 Two Stage Rotary Vane PumpTh
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RV3 Two Stage Rotary Vane PumpEdwar
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RV12 Two Stage Rotary Vane PumpEdwa
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E1M18 One Stage, E2M18 Two Stage Ro
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E2M28 Two Stage Rotary Vane PumpThe
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RV ATEX Two Stage Rotary Vane PumpA
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E1M18 One Stage, E2M18 Two Stage AT
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Electrical DataSmall Pump Accessori
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Ordering InformationProduct Descrip
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Vibration IsolatorsYou may need to
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Performance Curves1. D-LAB 34-100 2
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Turbomolecular Pumps2Page51nEXT Tur
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VentingTo maintain the cleanliness
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Technical DataInlet flangeDN100ISO-
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Technical DataOrdering InformationI
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Technical DataOrdering InformationM
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Technical DataMax input Power240WMa
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Technical DataPump / TIC powerEXT75
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Vibration IsolatorA vibration isola
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Technical DataPumping Speed for N 2
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STP Magnetically Levitated Turbomol
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STPs and the EnvironmentReducing En
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Technical DataInlet flange sizeVF30
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Vapour Pumps3Page117High Throughput
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Vapour Pumps for Industrial Applica
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Technical DataOrdering InformationC
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Ordering informationProduct descrip
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250/2000 Installation3711163P10**5P
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Notes3Page135Shop online at www.edw
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Measurement & Control4TIC Instrumen
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The Active Gauge Concept• Operate
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Technical DataElectrical DataConnec
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Technical DataOrdering InformationE
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Technical DataActive gauge compatib
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Technical DataMass85 gInternal volu
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Technical DataATC-E Electronics Mod
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Technical DataFull scale pressure r
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Technical DataFull scale pressure r
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Technical DataPressure RangeAIM-X10
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Technical DataPressure rangeAccurac
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CG16K dial gaugeEdwards CG16K capsu
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VS16K Adjustable Vacuum SwitchThe V
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Vacuum ValvesSpeedivalves 169Ball V
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SpeedivalveEdwards SP Speedivalves
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IBV series vacuum ball valvesBall v
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PVMK Manual Operation Right Angle I
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PVPK Pneumatic Operation Right Angl
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IPVPK Pneumatic Operation In-Line I
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PVEK Solenoid Operation Right Angle
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IPVEK Solenoid Operation In-Line Is
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LCPVEK Solenoid Operation Isolation
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LCPVEK Solenoid Operation Isolation
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BRV Backing/Roughing ValveEdwards b
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SIPVP Soft-Start Isolation ValvesSo
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BGV Manual Gate ValvesThe BGV basem
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BGV Pneumatic Gate ValvesThe BGV ba
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GV Manual and Pneumatic Gate Valves
Page 201 and 202: QSB Quarter Swing Butterfly ValveTh
Page 203 and 204: AV5A Air Admittance Valve With Coup
Page 205 and 206: LV10K Leak Valve NW10 FlangesThe LV
Page 207 and 208: Technical DataValveGV gate valvesPV
Page 209 and 210: Fittings and FlangesProduct Summary
Page 211 and 212: CF Flange Names There are many desc
Page 213 and 214: DimensionsNW Dimensions2.5ØAØBISO
Page 215 and 216: NW fittingsSize A B C D E F Orderin
Page 217 and 218: Size A B C D E F Ordering NumberNit
Page 219 and 220: Size A B C D E F Ordering NumberAEl
Page 221 and 222: Size A B C D E F Ordering NumberAFu
Page 223 and 224: Size A B C D E F Ordering NumberABA
Page 225 and 226: Size A B C D E F Ordering NumberABC
Page 227 and 228: ISO fittingsSize A B C D E F Orderi
Page 229 and 230: Size A B C D E F Ordering NumberACe
Page 231 and 232: Size A B C D E F Ordering NumberBAT
Page 233 and 234: Size A B C D E F Ordering NumberABF
Page 235 and 236: Size A B C D E F Ordering NumberACD
Page 237 and 238: Size A B C D E F Ordering NumberElb
Page 239 and 240: Size A B C D E F Ordering NumberDAB
Page 241 and 242: Size A B C D E F Ordering NumberAC
Page 243 and 244: Oils, Fluids, Sealants and GreasesW
Page 245 and 246: Mechanical Pump Oil Selection Chart
Page 247 and 248: Vapour Pump FluidsEdwards supplies
Page 249 and 250: Greases and WaxesGreases and waxesS
Page 251: Semiconductor PumpsiXL Dry Pumps 24
Page 255 and 256: Technical DataPeak speedUltimate va
Page 259 and 260: Technical DataOrdering InformationP
Page 271 and 272: Technical DataPerformancePeak speed
Page 277 and 278: Product Selection GuideVacuumPROCES
Page 279 and 280: Industrial Pumps and Pumping System
Page 281 and 282: EV Oil Sealed Single Stage Rotary V
Page 283 and 284: GXS industrial Dry Screw PumpDesign
Page 285 and 286: Technical DataOrdering InformationG
Page 293 and 294: Technical DataOrdering InformationD
Page 295 and 296: Technical DataMass IDX1000 IDX13005
Page 297 and 298: ITM High Capacity Inlet Dust Filter
Page 299 and 300: Technical DataDisplacement50Hz 42.5
Page 301 and 302: Technical DataDisplacement50Hz 80 m
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Technical DataDisplacement50Hz 178
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Technical DataDisplacement50Hz 292
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Vibration IsolatorsYou may need to
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Ordering Information - All Territor
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Stokes Microvac Series Oil Sealed R
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Stokes Microvac Model 412JThe Stoke
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Stokes Microvac Model 912JThe Stoke
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Oil Reservoir HeaterEdwards model 2
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MB/MV Series VerticallyOriented Boo
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Stokes 612MB Multi-Stage Pumping Sy
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Stokes 1721 Mechanical Booster Pump
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Stokes 1733HD Mechanical Booster Pu
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Stokes 1738BP Mechanical Booster Pu
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Stokes 1738 HCBP Mechanical Booster
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Stokes 1738HDBP Mechanical Booster
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Stokes 1739BP Mechanical Booster Pu
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Stokes 1739HCBP Mechanical Booster
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Stokes 1739HDBP Mechanical Booster
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Stokes 1754HC Mechanical Booster Pu
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EV40 Oil Sealed PumpThe EV rotary v
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EV100 Oil Sealed PumpThe EV rotary
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EV200 Rotary vane pumpThe EV rotary
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EV400 Rotary vane pumpThe EV rotary
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Accessories for Single Stage Oil Se
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EH Mechanical Booster PumpsBroad Ap
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EH250 Mechanical Booster PumpThe EH
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EH500 Mechanical booster pumpThe EH
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EH1200 Mechanical booster pumpThe E
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Mechanical Booster Pump Accessories
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Stokes 607 Series Mechanical Booste
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Stokes 61B Series By-Pass Mechanica
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HV8000 Mechanical booster pumpThe E
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HV30000 Mechanical Booster PumpThe
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Chemical Dry PumpsCXS Chemical dry
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CXS Chemical Dry Screw PumpDesigned
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CXS160 chemical dry pumpEdwards pio
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CXS250 chemical dry pumpEdwards pio
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CDX1000 Dry Vacuum PumpEdwards CDX1
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EDP80 - Dry Chemical PumpsEDP pumps
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EDP160 - Dry Chemical PumpsEDP pump
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Liquid Ring PumpsHR Series Liquid R
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ApplicationsSome of the more common
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Liquid Ring Pump Applications in Po
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Features & Benefits• Two stage li
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Exhaust Gas Treatment ApplicationsT
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EHR2390 Liquid Ring PumpWithin Edwa
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SHR2750 Liquid Ring PumpWithin Edwa
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SHR21200 Liquid Ring PumpWithin Edw
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SHR22500 Liquid Ring PumpWithin Edw
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LR1A300 Liquid Ring PumpEdwards off
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LR1A1300 Liquid Ring PumpEdwards of
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LR1A12000 Liquid Ring PumpEdwards o
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LR1B3500 Liquid Ring PumpEdwards of
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LR1B11000 Liquid Ring PumpEdwards o
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Shelf Dryers11Page449Shop online at
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Data Summary Stokes Vacuum Shelf Dr
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Process Vacuum12Page453Shop online
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Deaeration EquipmentMultistage Ejec
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Boiler Feedwater and Process Water
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ServiceGuide to Pump Selection and
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Certified ProductsEdwards Certified
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Guide to Pump Selection and Pipe In
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Effect of the Pipe Between the Seco
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Material Safety Data SheetsThe foll
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Shop online at www.edwardsvacuum.co
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RoHS ComplianceThe EU RoHS (Restric
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