Vacuum Catalogue - Edwards

More documents

Recommendations

Info

GX1000 Dry PumpThe GX Dry <strong>Vacuum</strong> Pump Series sets new standards for zero maintenance between majoroverhauls. Improved efficiency lowers the cost of ownership and provides continuouspumping duty throughout the pressure range.GX pumps are available in a wide range of peak speeds and variants to addressapplications from clean through to medium-duty processes. A modular design allows usersto configure GX drypumps to suit individual fab requirements. An ultra-compact footprintallows installation options including on-tool, close proximity, or remote.7Features & Benefits●●●●●Reduced Cost of OwnershipUp to a 50% reduction in utilities cost compared to iL/iHdrypumpsNo preventative maintenanceFlexible Installation OptionsSmall and light for easy installationDimensionsApplications●●●●●Load LockTransferMetrologyLithographyPVD ProcessPerformance CurvesPage2701. m 3 h -1 2. ft 3 min -1Shop online at www.edwardsvacuum.com
Technical DataPerformancePeak speed 800 m 3 h -1471 ft 3 min -113333 lmin -1Ultimate pressure1 x 10 -3 mbar7.5 x 10 -4 Torr0.10 PaPower at 700 Torr exhaustUltimate1.6 kWAUC (Active Utility Controller) 1.05 kWWater *Water inlet2 slmNitrogen 4 or 14 slm **Installation DetailsFootprint (excluding exhaust) 0.20 m 2Weight230 kgInlet connection ISO 100Outlet connectionNW25Noise at ultimate
Page 1 and 2:
PRODUCT CATALOGUE2012
Page 3:
ContentsSmall Wet/Dry PumpsTurbomol
Page 6 and 7:
Small Pumps and Pumping Systems1Pag
Page 8 and 9:
Small Pumps and Accessories: Freque
Page 10 and 11:
1Page6Technical DataNominal rotatio
Page 12 and 13:
1Page8Technical DataNominal rotatio
Page 14 and 15:
1Page10Technical DataNominal rotati
Page 16 and 17:
1Page12Technical DataNominal rotati
Page 18 and 19:
XDS35i Scroll Vacuum Pump1Page14The
Page 20:
XDS46i Scroll Vacuum Pump1Page16The
Page 23 and 24:
Technical DataOrdering InformationP
Page 25 and 26:
E2M0.7 Two Stage Rotary Vane PumpTh
Page 27 and 28:
E2M1.5 Two Stage Rotary Vane PumpTh
Page 29 and 30:
RV3 Two Stage Rotary Vane PumpEdwar
Page 31 and 32:
Page 33 and 34:
Page 35 and 36:
RV12 Two Stage Rotary Vane PumpEdwa
Page 37 and 38:
E1M18 One Stage, E2M18 Two Stage Ro
Page 39 and 40:
E2M28 Two Stage Rotary Vane PumpThe
Page 41 and 42:
RV ATEX Two Stage Rotary Vane PumpA
Page 43 and 44:
E1M18 One Stage, E2M18 Two Stage AT
Page 45 and 46:
Electrical DataSmall Pump Accessori
Page 47 and 48:
Ordering InformationProduct Descrip
Page 49 and 50:
Vibration IsolatorsYou may need to
Page 51 and 52:
Performance Curves1. D-LAB 34-100 2
Page 53 and 54:
Page 55 and 56:
Turbomolecular Pumps2Page51nEXT Tur
Page 57 and 58:
VentingTo maintain the cleanliness
Page 59 and 60:
Technical DataInlet flangeDN100ISO-
Page 61 and 62:
Page 63 and 64:
Page 65 and 66:
Technical DataOrdering InformationI
Page 67 and 68:
Technical DataOrdering InformationM
Page 69 and 70:
Technical DataMax input Power240WMa
Page 71 and 72:
Technical DataPump / TIC powerEXT75
Page 73 and 74:
Page 75 and 76:
Vibration IsolatorA vibration isola
Page 77 and 78:
Technical DataPumping Speed for N 2
Page 79 and 80:
STP Magnetically Levitated Turbomol
Page 81 and 82:
STPs and the EnvironmentReducing En
Page 83 and 84:
Page 85 and 86:
Page 87 and 88:
Page 89 and 90:
Page 91 and 92:
Page 93 and 94:
Page 95 and 96:
Page 97 and 98:
Page 99 and 100:
Page 101 and 102:
Page 103 and 104:
Page 105 and 106:
Page 107 and 108:
Page 109 and 110:
Page 111 and 112:
Page 113 and 114:
Page 115 and 116:
Technical DataInlet flange sizeVF30
Page 117 and 118:
Page 119 and 120:
Page 121 and 122:
Vapour Pumps3Page117High Throughput
Page 123 and 124:
Vapour Pumps for Industrial Applica
Page 125 and 126:
Technical DataOrdering InformationC
Page 127 and 128:
Page 129 and 130:
Page 131 and 132:
Page 133 and 134:
Page 135 and 136:
Ordering informationProduct descrip
Page 137 and 138:
250/2000 Installation3711163P10**5P
Page 139 and 140:
Notes3Page135Shop online at www.edw
Page 141 and 142:
Measurement & Control4TIC Instrumen
Page 143 and 144:
The Active Gauge Concept• Operate
Page 145 and 146:
Technical DataElectrical DataConnec
Page 147 and 148:
Technical DataOrdering InformationE
Page 149 and 150:
Technical DataActive gauge compatib
Page 151 and 152:
Technical DataMass85 gInternal volu
Page 153 and 154:
Page 155 and 156:
Technical DataATC-E Electronics Mod
Page 157 and 158:
Technical DataFull scale pressure r
Page 159 and 160:
Technical DataFull scale pressure r
Page 161 and 162:
Technical DataPressure RangeAIM-X10
Page 163 and 164:
Technical DataPressure rangeAccurac
Page 165 and 166:
Page 167 and 168:
CG16K dial gaugeEdwards CG16K capsu
Page 169 and 170:
VS16K Adjustable Vacuum SwitchThe V
Page 171 and 172:
Vacuum ValvesSpeedivalves 169Ball V
Page 173 and 174:
SpeedivalveEdwards SP Speedivalves
Page 175 and 176:
IBV series vacuum ball valvesBall v
Page 177 and 178:
PVMK Manual Operation Right Angle I
Page 179 and 180:
PVPK Pneumatic Operation Right Angl
Page 181 and 182:
IPVPK Pneumatic Operation In-Line I
Page 183 and 184:
PVEK Solenoid Operation Right Angle
Page 185 and 186:
IPVEK Solenoid Operation In-Line Is
Page 187 and 188:
LCPVEK Solenoid Operation Isolation
Page 189 and 190:
LCPVEK Solenoid Operation Isolation
Page 191 and 192:
BRV Backing/Roughing ValveEdwards b
Page 193 and 194:
SIPVP Soft-Start Isolation ValvesSo
Page 195 and 196:
BGV Manual Gate ValvesThe BGV basem
Page 197 and 198:
BGV Pneumatic Gate ValvesThe BGV ba
Page 199 and 200:
GV Manual and Pneumatic Gate Valves
Page 201 and 202:
QSB Quarter Swing Butterfly ValveTh
Page 203 and 204:
AV5A Air Admittance Valve With Coup
Page 205 and 206:
LV10K Leak Valve NW10 FlangesThe LV
Page 207 and 208:
Technical DataValveGV gate valvesPV
Page 209 and 210:
Fittings and FlangesProduct Summary
Page 211 and 212:
CF Flange Names There are many desc
Page 213 and 214:
DimensionsNW Dimensions2.5ØAØBISO
Page 215 and 216:
NW fittingsSize A B C D E F Orderin
Page 217 and 218:
Size A B C D E F Ordering NumberNit
Page 219 and 220:
Size A B C D E F Ordering NumberAEl
Page 221 and 222:
Size A B C D E F Ordering NumberAFu
Page 223 and 224: Size A B C D E F Ordering NumberABA
Page 225 and 226: Size A B C D E F Ordering NumberABC
Page 227 and 228: ISO fittingsSize A B C D E F Orderi
Page 229 and 230: Size A B C D E F Ordering NumberACe
Page 231 and 232: Size A B C D E F Ordering NumberBAT
Page 233 and 234: Size A B C D E F Ordering NumberABF
Page 235 and 236: Size A B C D E F Ordering NumberACD
Page 237 and 238: Size A B C D E F Ordering NumberElb
Page 239 and 240: Size A B C D E F Ordering NumberDAB
Page 241 and 242: Size A B C D E F Ordering NumberAC
Page 243 and 244: Oils, Fluids, Sealants and GreasesW
Page 245 and 246: Mechanical Pump Oil Selection Chart
Page 247 and 248: Vapour Pump FluidsEdwards supplies
Page 249 and 250: Greases and WaxesGreases and waxesS
Page 251 and 252: Semiconductor PumpsiXL Dry Pumps 24
Page 253 and 254: Technical DataProductiXL120Peak spe
Page 255 and 256: Technical DataPeak speedUltimate va
Page 259 and 260: Technical DataOrdering InformationP
Page 271 and 272: Technical DataPerformancePeak speed
Page 273: Technical DataPerformancePeak speed
Page 277 and 278: Product Selection GuideVacuumPROCES
Page 279 and 280: Industrial Pumps and Pumping System
Page 281 and 282: EV Oil Sealed Single Stage Rotary V
Page 283 and 284: GXS industrial Dry Screw PumpDesign
Page 285 and 286: Technical DataOrdering InformationG
Page 293 and 294: Technical DataOrdering InformationD
Page 295 and 296: Technical DataMass IDX1000 IDX13005
Page 297 and 298: ITM High Capacity Inlet Dust Filter
Page 299 and 300: Technical DataDisplacement50Hz 42.5
Page 301 and 302: Technical DataDisplacement50Hz 80 m
Page 303 and 304: Technical DataDisplacement50Hz 178
Page 305 and 306: Technical DataDisplacement50Hz 292
Page 307 and 308: Vibration IsolatorsYou may need to
Page 309 and 310: Ordering Information - All Territor
Page 311 and 312: Stokes Microvac Series Oil Sealed R
Page 313 and 314: Stokes Microvac Model 412JThe Stoke
Page 315 and 316: Stokes Microvac Model 912JThe Stoke
Page 317 and 318: Oil Reservoir HeaterEdwards model 2
Page 319 and 320: MB/MV Series VerticallyOriented Boo
Page 321 and 322: Stokes 612MB Multi-Stage Pumping Sy
Page 323 and 324: Stokes 1721 Mechanical Booster Pump
Page 325 and 326:
Stokes 1722 Mechanical Booster Pump
Page 327 and 328:
Stokes 1733 Mechanical Booster Pump
Page 329 and 330:
Stokes 1733HD Mechanical Booster Pu
Page 331 and 332:
Stokes 1738BP Mechanical Booster Pu
Page 333 and 334:
Stokes 1738 HCBP Mechanical Booster
Page 335 and 336:
Stokes 1738HDBP Mechanical Booster
Page 337 and 338:
Stokes 1739BP Mechanical Booster Pu
Page 339 and 340:
Stokes 1739HCBP Mechanical Booster
Page 341 and 342:
Stokes 1739HDBP Mechanical Booster
Page 343 and 344:
Stokes 1754HC Mechanical Booster Pu
Page 345 and 346:
EV40 Oil Sealed PumpThe EV rotary v
Page 347 and 348:
EV100 Oil Sealed PumpThe EV rotary
Page 349 and 350:
EV200 Rotary vane pumpThe EV rotary
Page 351 and 352:
EV400 Rotary vane pumpThe EV rotary
Page 353 and 354:
Accessories for Single Stage Oil Se
Page 355 and 356:
EH Mechanical Booster PumpsBroad Ap
Page 357 and 358:
EH250 Mechanical Booster PumpThe EH
Page 359 and 360:
EH500 Mechanical booster pumpThe EH
Page 361 and 362:
EH1200 Mechanical booster pumpThe E
Page 363 and 364:
Page 365 and 366:
Page 367 and 368:
Mechanical Booster Pump Accessories
Page 369 and 370:
Stokes 607 Series Mechanical Booste
Page 371 and 372:
Page 373 and 374:
Stokes 61B Series By-Pass Mechanica
Page 375 and 376:
Page 377 and 378:
HV8000 Mechanical booster pumpThe E
Page 379 and 380:
HV30000 Mechanical Booster PumpThe
Page 381 and 382:
Chemical Dry PumpsCXS Chemical dry
Page 383 and 384:
CXS Chemical Dry Screw PumpDesigned
Page 385 and 386:
CXS160 chemical dry pumpEdwards pio
Page 387 and 388:
CXS250 chemical dry pumpEdwards pio
Page 389 and 390:
CDX1000 Dry Vacuum PumpEdwards CDX1
Page 391 and 392:
EDP80 - Dry Chemical PumpsEDP pumps
Page 393 and 394:
EDP160 - Dry Chemical PumpsEDP pump
Page 395 and 396:
Page 397 and 398:
Page 399 and 400:
Liquid Ring PumpsHR Series Liquid R
Page 401 and 402:
ApplicationsSome of the more common
Page 403 and 404:
Liquid Ring Pump Applications in Po
Page 405 and 406:
Features & Benefits• Two stage li
Page 407 and 408:
Exhaust Gas Treatment ApplicationsT
Page 409 and 410:
EHR2390 Liquid Ring PumpWithin Edwa
Page 411 and 412:
SHR2750 Liquid Ring PumpWithin Edwa
Page 413 and 414:
SHR21200 Liquid Ring PumpWithin Edw
Page 415 and 416:
SHR22500 Liquid Ring PumpWithin Edw
Page 417 and 418:
LR1A300 Liquid Ring PumpEdwards off
Page 419 and 420:
Page 421 and 422:
Page 423 and 424:
LR1A1300 Liquid Ring PumpEdwards of
Page 425 and 426:
Page 427 and 428:
Page 429 and 430:
Page 431 and 432:
LR1A12000 Liquid Ring PumpEdwards o
Page 433 and 434:
Page 435 and 436:
Page 437 and 438:
LR1B3500 Liquid Ring PumpEdwards of
Page 439 and 440:
Page 441 and 442:
Page 443 and 444:
LR1B11000 Liquid Ring PumpEdwards o
Page 445 and 446:
Page 447 and 448:
Page 449 and 450:
Page 451 and 452:
Page 453 and 454:
Shelf Dryers11Page449Shop online at
Page 455 and 456:
Data Summary Stokes Vacuum Shelf Dr
Page 457 and 458:
Process Vacuum12Page453Shop online
Page 459 and 460:
Deaeration EquipmentMultistage Ejec
Page 461 and 462:
Boiler Feedwater and Process Water
Page 463 and 464:
ServiceGuide to Pump Selection and
Page 465 and 466:
Certified ProductsEdwards Certified
Page 467 and 468:
Guide to Pump Selection and Pipe In
Page 469 and 470:
Effect of the Pipe Between the Seco
Page 471 and 472:
Material Safety Data SheetsThe foll
Page 473 and 474:
Shop online at www.edwardsvacuum.co
Page 475 and 476:
Page 477 and 478:
Page 479 and 480:
Page 481 and 482:
Page 483 and 484:
RoHS ComplianceThe EU RoHS (Restric
show all

Vacuum Catalogue - Edwards

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?