NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
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1.2SF 6 (50 sccm)Absorbance0.80.4SF 60.0400 800 1200 1600 2000Wavenumber (cm -1 )圖 (3-4c) 電 漿 處 理 前 SF 6 之 圖 譜Absorbance0.180.120.060.00* SO 2SF 6SiF 4SF 6* NO 2SO 2F 2SO 2F 2SOF 2400 800 1200 1600 2000Wavenumber (cm -1 )圖 (3-4d) SF 6 電 漿 處 理 後 產 物 分 佈 圖 譜21
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