NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
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CF 4Conversion Rate (%)908580757065N 2=20 slm , CF 4=50 sccm , Power=1200W600 50 100 150 200 250O 2Flow rate (sccm)( 圖 4-4 ) 氧 氣 進 料 流 量 對 CF 4 轉 化 率 之 影 響(N 2 =20 slm, CF 4 =50 sccm, Power=1200 W)Byproducts Flow Rate (sccm)50403020100CO 2COF 2NO 2SiF 40 50 100 150 200 250O2 Flow Rate (sccm)( 圖 4-5 ) 氧 氣 進 料 流 量 對 產 物 生 成 之 影 響(N 2 =20 slm, CF 4 =50 sccm, Power=1200 W)27
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