NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
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Peak Reduction Rate (%)100908070605040302010SF 6 /O 2 =50/50 sccmOnly SF 6 50 sccmCF 4 /O 2 =50/50 sccm600 800 1000 1200 1400Power (W)( 圖 4-6 ) 氧 氣 進 料 與 微 波 功 率 對 SF 6 轉 化 之 影 響Products Intensity0.250.200.150.100.05SiF 4SOF 2SO 2 F 2SO 2NO 20.00600 800 1000 1200 1400Power (W)( 圖 4-7 ) 微 波 功 率 對 產 物 生 成 之 影 響 (N 2 =20 slm, SF 6 =50 sccm)29
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