NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
NSC95-EPA-Z-033-002
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CF4 Conversion Rate (%)100806040200N 2 =20 slm, CF 4 =50 sccm0 20 40 60 80 100O2 Flow Rate (sccm)( 圖 4-10 ) 改 變 O 2 流 量 對 轉 化 率 之 影 響(N 2 =20 slm, CF 4 =50 sccm, T=1600 K)Mole Fraction0.<strong>002</strong>00.00160.00120.00080.0004COF 2CO 2CO0.00000 20 40 60 80 100O2 Flow Rate (sccm)( 圖 4-11 ) 改 變 O 2 流 量 對 產 物 生 成 之 影 響(N 2 =20 slm, CF 4 =50 sccm, T=1600 K)32
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