CHEM02200704003 Nilamadhab Pandhy - Homi Bhabha National ...

Chapter 5
Presence of oxygen is due to the superficial oxide layers, and carbon at the surface is due
to contamination during sample handling. For both the elements tailing was observed with
increase in depth of sputtering, and intensity was much less as compared to major alloying
elements. In case of nitrogen implanted sample (Fig. 5.2b) enrichment of nitrogen on the surface
was observed in the form of two peaks. Owing to enrichment of nitrogen on the surface the
corresponding profiles for Fe, Cr, and Ni showed initial decrease by passing through a shallow
region, and attained steady state with increase in depth of sputtering [21].
Intensity (Arbitrary units)
Fe 54
Cr 50
Ni 58
O 16
C 12
N 14
0 100 200 300 400 500
Depth (nm)
Fig. 5.2b: SIMS analysis of nitrogen implanted 304L SS (dose 2.5×10 17 N + /cm 2 ) [21].
SIMS Study by Guemmaz et al [154] for nitrogen implanted 316L SS also revealed two peaks
in the nitrogen profile. The result obtained in the present study is in well agreement with study
carried out by Guemmaz et al, and the possible reason for such type of peaks is attributed to
different rate of sputtering of nitrogen from the surface, and from chromium nitride phase that
forms at higher doses [21, 154].