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Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...

Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...

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JUNE 26 MONDAY MORNING<br />

WS-18-MoM-INV.2<br />

Metrology<br />

VACUUM STANDARDS AT CEM. C. Matilla. Spanish Centre of<br />

In the next future CEM will have three different vacuum standards to cover all the vacuum range.<br />

These standards are a dynamic expansion system, a static expansion system and a forced balance piston<br />

gauge. The dynamic expansion system is based on the known orifice flow technique in which a<br />

flowmeter is used to generate a known flow rate of gas in a vacuum chamber partitioned by an orifice<br />

of calculated conductance. It has been working for some years but it has suffered several modifications<br />

to make it more accurate. The forced piston balance is a recent acquisition. It is a pressure<br />

standard designed to cover the range from less than 1 Pa to 15 kPa gauge and absolute pressures. The<br />

instrument operates on the piston gauge principle in which the pressure on the piston is measured by<br />

a forced balanced load cell. We were encouraged to acquire it by the good results obtained by other<br />

metrology institutes. At the moment we are testing its performance and we are satisfied with its results.<br />

The static expansion system is based on Boyle´s law with corrections. It is a project in collaboration<br />

with EUITT (UPM), which has been founded by the R&D National Plan. This project will be<br />

finished in 2008.<br />

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