Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...

JUNE 28 WEDNESDAY MORNING
JS2-WeM-INV.1 SURFACE ANALYSIS OF NITRIDES AND OXYNITRIDE COM-
POUNDS WITH ION BEAMS. E. Alves, N. P. Barradas, Instituto Tecnológico Nuclear, EN. 10,
2686-953 Sacavém .F. Vaz, L. Rebouta, C. Tavares, Universidade do Minho, Departamento de
Física, 4800-058 Guimarães, Portugal. U. Kreissig, Forschungszentrum Rossendorf e.V., Postfach
510119, 01314 Dresden, Germany.
Titanium nitride and oxynitride compounds exhibit interesting properties for applications in fields
ranging from protective/decorative coatings to solar panels. The properties of these compounds are
related to the oxide/nitride ratio and can be tailored by tuning this ratio. Then, accurate composition
measurements are fundamental to understand the behaviour of these structures. Ion beam based techniques
(IBA) are unique for this purpose. The composition throughout the entire thickness of the
films was determined by Rutherford Backscatering Spectrometry (RBS). To get information on the
profile of light elements (O, N) and detect the presence of hydrogen on the films, heavy ion elastic
recoil detection analysis (HI-ERDA) was performed.
The results indicate a nearly constant stoichiometry through the entire analysed depth. The oxygen
fraction in the films increases with gas flow, reaching a value of x~0.33 for a reactive gas flow mixture
of 6.25 sccm The colouration varied from the shiny golden for low oxygen contents (characteristic
of TiN films) to dark blue for higher oxygen contents. During growth mixed zirconium nitride
and oxide phases form. Furthermore, the deposition rate correlates with the oxygen content variations,
showing a continuous decrease with reactive gas flow.
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