Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...
Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...
Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...
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JUNE 27 TUESDAY MORNING<br />
JS1-TuM-INV-1 REACTIVE SPUTTERING OF METAL OXIDES AND NI-<br />
TRIDES FOR INDUSTRIAL APPLICATIONS. Victor Bellido-González, Benoit Daniel,<br />
Sarah Powell GENCOA, Physics Road, Liverpool L24 9HP (UK). E-mail: victor@gencoa.com<br />
Magnetron sputtering has become one of the key industrial vacuum coating technologies in regards<br />
to many of today’s applications. In magnetron sputtering, a material called target (e.g. Ti),<br />
suffers ion bombardment by ions of a mainly inert gas (e.g. Argon) and in that bombardment material<br />
is removed and transported onto a desired surface to be coated. The plasma trap around that<br />
target is based on a electric-magnetic cross field (ExB). Some of these processes also involve the<br />
reaction between the element or elements of the target material and a gas. That reaction produced<br />
a coating of very different nature to the target material itself and the process is called reactive<br />
magnetron sputtering. Two groups of these reactive gases are Nitrogen which will give as a result<br />
a nitride of the elements of the target (e.g. TiN) and Oxygen which will give as a result an<br />
oxide of the elements of the target (e.g. TiOx). In some cases the target itself is of a oxide or nitride<br />
nature and generally some sort of degree of reactive sputtering is maintained in order to taylor<br />
specific coating properties (e.g. Ito target sputtering in atmospheres containing O 2 or H 2 ). In<br />
this presentation some of the current issues in the control of such processes will be exposed. Also<br />
practical applications of oxides and nitrides will be explained based on our industrial experience.<br />
These will include multilayer oxides for optical coatings, transparent conductive oxides for<br />
photovoltaic and display technology, oxides for scratch resistance technology, nitrides for decorative<br />
and hard coat applications, solar-thermal absorbers, etc. A short comparison with some<br />
other technologies such as cathodic arc will be exposed as these technologies can be sometimes<br />
found competing on a similar ground of applications.<br />
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