Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...

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JUNE 27 TUESDAY MORNING WS-18-TuM-OR.6 LEAK CALIBRATION BY COMPARISON WITH REFERENCE STANDARD LEAKS. J. M. Hidalgo * and J. L. de Segovia ** * Telstar Industrial S. L., José Tapiolas 120, Tarrasa, Spain. ** Instituto de Ciencia de Materiales, CSIC, Cantoblanco, 2<strong>82</strong>49 Madrid, Spain. e-mail: jldesegovia@icmm.csic.es/j.mhidalgo@telstar.es For an industrial calibration laboratory the faster and reproducible method for helium leak calibration is by comparing the leak to be calibrated with standard leaks already calibrated at a National Calibration Laboratory or Accredited Laboratory, using a mass spectrometer tuned to Helium gas. In the present work all the possible sources of uncertainties are discussed and they relative contributions presented. Special consideration is given to the problem of the long term satiability contribution. The optimal capacity of measurement is obtained according to the results obtained by application of the specific calibration procedure. 68
JUNE 27 TUESDAY MORNING WS-18-TuM-INV6.5 LEAK DETECTION: CALIBRATIONS AND REFERENCE FLOWS ARE REQUIRED IN EVERY TYPE OF APPLICATIONS: PRACTICAL EXAM- PLES. A.Calcatelli, Istituto Nazionale di Ricerca Metrologica, I.N.RI.M., Turin, Italy.M.Bergoglio, Istituto Nazionale di Ricerca Metrologica, I.N.RI.M., Turin, Italy D. Mari, Istituto Nazionale di Ricerca Metrologica, I.N.RI.M., Turin, Italy Several methods and related instrumentation are used for leak detection from bubble emission to the ultrasound devices, to pressure/vacuum variation measurements (vacuum gauges, thermal conductivity sensors), to halogen leak detectors or detectors using radioisotopes, to the more recent instruments based on selective ion pump detection (SIPD) and finally to the application of mass spectrometry. The most diffused methods for the leak rates lower than 10 -3 Pa m 3 /s that is based on the application of mass spectrometry with tracer gas (generally helium) is considered (MSLD). MSLD represents the best choice for industrial control of tightening for its good sensitivity and obtainable speed of testing. The leak test may be performed with various methodologies (vacuum, pressure or vacuum-pressure) and its purpose may be to localize the leaks or to quantify them. Leak detection is considered, at European level, by the WG 6 (leak testing) of the CEN/TC 138 (Non Destructive Testing), and worldwide level by the SC 6 “Leak detection methods” of the ISO/TC 135 (Non Destructive Testing). At European level, several standards have been published regarding terminology as well as the choice of the method or the calibration of a leak detector and calibration of standard leaks. If the leak detector output must have a real meaning in term of gas flow-rate the instrument has to be calibrated and its uncertainty must be evaluated. Therefore, the calibration of a leak detector is performed with reference to known gas flow-rates by using the so-called standard leaks both of permeation or geometrical type (generally capillaries) which are used to generate flow from 10 -9 Pa m 3 /s to 10 -3 Pa m 3 /s; these standard leaks are calibrated with reference to atmospheric pressure or vacuum against primary gas flow-meters. The I.N.RI.M. primary flowmeters are shortly described which cover the following gas flow-rate ranges: • 2.10 -9 Pa m3/s e 2x10 -8 Pa m 3 /s with reference to vacuum, extended uncertainty 8% • 2x10 -8 - 3.10 -5 Pa m 3 /s with reference to vacuum, extended uncertainty from 2% to 0.5%. • 2.10 -5 Pa m 3 /s e 1.10 -3 Pa m 3 /s with reference to atmospheric pressure, extended uncertainty 2%. Some calibration results are presented together with the preliminary results of a bilateral comparison which is considered as preparatory for a more wide scale comparison. A device devoted to on line control of components which need that all the significant parameters be well defined starting from the mass spectrometer leak detector which is characterized from metrological point of view, that is to say essentially for what concerns linearity and repeatability of the out-put by using reference leaks. The whole machine must be well known in its working configuration for what concerns linearity and repeatability and the traceability chain must be made evident. 67
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Wüest M. 51 Wykes M. 82 Yamaguchi
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Oliveira F. J. 140 Orts M.J. 76 Ota
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Gabouze N. 125 Galán L. 112, 113,
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AUTHOR’S INDEX Aouabdia Y. 46 Aba
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AUTHORS’S INDEX 141
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PARALLEL SESSIONS 7
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PLENARY 5
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JUNE 26, 2006 Morning Session INDEX
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Sigilum Universitatis Studii Salama
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