Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...

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JUNE 28 WEDNESDAY MORNING RIVA-SS-WeM-OR.2 PLANAR MAGNETRON DISCHARGE. AN EXPERIMENTAL PROFILE ANALYSIS OF THE TARGET EROSION BASED ON A TWO-DIMENSIONAL FLUID MODEL IN THE STEADY STATE. M. L. Escrivão, P. J. S. Pereira*, M. R. Teixeira and M. J. P. Maneira. CeFITec, Departa-mento de Física, Faculdade de Ciências e Tecnologia da Universidade Nova de Lisboa, Quin-ta da Torre, 2829-516, Caparica, Portugal. * Also in Área Científica da Matemática, Instituto Superior de Engenharia de Lisboa, Rua Conselheiro Emídio Navarro, 1949-014 Lisboa, Portugal . In the present work the erosion depth is measured along a diameter of a circular magnetron target. The horizontal and vertical components of the magnetic induction are measured at points of the plasma that are vertically above this diameter and at different distances from the target. The experimental profile of the target erosion is analysed on the basis of the plasma density distribution near the target which is obtained using a two-dimensional fluid model in the steady state. 90
JUNE 28 WEDNESDAY MORNING RIVA-SS-WeM-OR.1 USE OF A RADIO-FREQUENCY POWER SUPPLY COUPLED TO A HIGH TEMPERATURE FURNACE IN ULTRAVIOLET PHOTOELECTRON SPEC- TROSCOPY. E. M. C. C. Reis 1,2 , A. A. Dias 1,2 , O. M. N. D. Teodoro 1,2 and M. L. Costa 1,2 . 1 Centre for Physics and Technological Research, CEFITEC. 2 Departamento Física Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa, Monte de Caparica, 2829-516, Caparica, Portugal. e- mail: aad@fct.unl.pt Temperatures up to 2500 ºC have to be attained for analysing solid samples by Ultraviolet Photoelectron Spectroscopy (UVPES), using a high temperature furnace[i]. A radio-frequency (RF) power supply seems ideal for this purpose [ii]. The RF source, operating near the photoelectron spectrometer, creates an electromagnetic field that causes interference in photoelectron trajectories. In order to eliminate this effect the RF power supply should be used in a pulsed mode in conjunction with a linear gate in detector circuits. The frequency chosen to obtain these pulses is of 50 Hz, since that is the frequency used by the mains. The 50 Hz waves are rectified, being allowed to pass only the positive voltages, eliminating the negative ones. Considering that the maximum power available from the generator is reduced to less than half of its original value, as a result of the pulses, a considerable amount of power is necessary to raise the temperature. Modifications performed in both a RF power supply and detector circuits, together with its coupling to an existing high temperature furnace will be presented. References [i] J.M. Dyke, G. Levita, A. Morris, J. S. Ogden, A.A. Dias, M. Algarra, J.P. Santos, M.L. Costa, M.T. Barros, J. Phys. Chem. A 2004, 108, 5299-5307. [ii] D. Bulgin, J. Dyke, F. Goodfellow, N. Jonathan, E. Lee, A. Morris, J. Elec. Spec. Rel. Phen. 1977, 12, 67-76. “ 89
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Oliveira F. J. 140 Orts M.J. 76 Ota
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Gabouze N. 125 Galán L. 112, 113,
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AUTHOR’S INDEX Aouabdia Y. 46 Aba
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Sigilum Universitatis Studii Salama
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