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JUNE 28 WEDNESDAY AFTERNOON JS2-WeA-P.6 OPTICAL AND STRUCTURAL STUDY OF EB-PVD ZrO 2 THIN FILMS.I. M. Ochando, M. Vila and C. Prieto. Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas. Cantoblanco, 28049 – MADRID, Spain. Zirconium oxide is a widely used material because of its heat resistance, low thermal conductivity, high refractive index and high transparency in the visible and near infrared region, very high chemical inertness and high laser damage threshold. Due to these properties, its applications can be found in very different aspects of technology. For instance, zirconia has been applied as thermal barrier coating (1), optical filters, laser mirrors(2), buffer layer for high T C superconductor on Si (3), high temperature oxygen separation (4), oxygen sensors(5), and solid oxide fuel cells(6). Films of zirconia can be prepared by different techniques. Typically, thin films prepared by sputtering are used for gate dielectric in microelectronics applications and zirconia films prepared by electron beam physical vapour deposition (EB-PVD) are candidates for advanced thermal barrier coatings (TBC) for the new generation of land-based gas turbines as well as for optical applications. In the interest host materials with a high luminescent efficiency and superior stabilization, tetragonal ZrO2 is an attractive material due to the refractive index, electrical, chemical and mechanical characteristics. ZrO 2 thin films prepared on Si(100) substrates by electron beam physical vapour deposition (EB- PVD) are investigated by X-ray diffraction and optical absorption spectroscopy. Results show tetragonal stabilized phases of zirconium oxide independently of the yttria addition in the starting material. In this work, it is reported the variation of the crystallite size as a function of the deposition rate, showing that crystallites are in the nanometric range and that a remarkable crystallite size increase is observable for thin films prepared at low deposition rates. In addition, it is presented the optical absorption spectroscopy characterization in order to determine the refractive index; the obtained values does not depend on the deposition rate being in agreement with the bulk ones. It is shown EB-PVD prepared samples have good performance for optical and protective coatings. 2 3 4 5 6 S.M. Meier, D.K. Gupta, J Eng. Gas Turbines Power Trans. ASME 116 (1994) 250. W.H. Lowdermilk, D. Milam, F. Rainer, Thin Solid Films 73 (1980) 155. D.K. Fork, D.B. Fenner, G.A.N. Connell, J.M. Phillips, T.H. Geballe, Appl. Phys. Lett. 57 (1990) 1137. J. Han, Y.Zeng, G. Xomeritakis, Y.S. Lin, Solid State Ionics 98 (1997) 63. M. Sayer , K.Sreenivas, Science 247 (1990) 1056. N.Q. Minh, J. Am. Ceram. Soc. 76 (1993) 563. 138
JUNE 28 WEDNESDAY AFTERNOON JS2-WeA-P.5 ELABORATION AND CHARACTERIZATION OF THIN TITANIUM COATINGS ON HIGH CARBON STEEL SUBSTRATES. L. Mohammedi. Laboratory of Materials Physic. University of Ouargla – 30 000 – Algeria. R. Gheriani. Laboratory of Materials Physic. University of Ouargla – 30 000 – Algeria. R. Halimi. Laboratoire Couches Minces et Interfaces, Campus Chaâb Erssas, Université Mentouri de Constantine - 25 000 Constantine – Algérie. In this work we have elaborated, by cathodic sputtering, thin titanium coatings on steel substrates containing ≈ 2% Wt of carbon. The so prepared samples are submitted to various thermal anneals in vacuum between 400°C and 1000°C, and then characterized structurally and mechanically by X-ray diffraction (XRD), scanning electron microscopy (SEM), Auger electron spectroscopy (AES) and hardness tests. The analysis of samples showed the formation and the growth of titanium carbide above 400°C. It is established that carbon, iron and titanium atoms interdiffuse intensively, and form a diffusion zone which is, roughly, homogeneous and essentially constituted from titanium carbide. This new layer presents a good performances (for example, at 900°C, the value of microhardness is H v = 3200 kg mm -2 , which is larger than that of bulk TiC H v = 3000 kg mm -2 ). Key words: thin films, hard coatings, carbide, diffusion, titanium 137
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Sigilum Universitatis Studii Salama
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