Edwards IH Instruction Manual - Ideal Vacuum Products

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Turn on/off On ▲ ▼ ENTER ☞ is the previously selected device: DP, MB, Load Lock Pump, Nitrogen supply, Gas Ballast or Inlet Purge. Off ENTER ▲ ▼ Exit ☞ Return to [4-8/2] or [4-16/1] Figure 4-16 - <strong>Manual</strong> menu: sheet 3 of 3 4-26 iH Dry Pumping Systems
Last parameter [4-17/2] ▲ View Status DP DP POWER . A . kW ▲ ▼ MB MB POWER . A . kW ☞ On iH80 systems, will be shown instead of values. ▲ ▼ RUN HOURS PROCESS H ▲ ▼ PROCESS ▲ ▼ MB TEMP DP MOTOR ▲ C C ▼ ☞ On iH80 systems, will be shown instead of an MB TEMP value. Prev parameter [4-17/2] EXHAUST DP BODY C ▼ ☞ If an exhaust temperature sensor is fitted to the iH system, a temperature will be displayed instead of . Next parameter [4-17/2] Figure 4-17 - View Status menu: sheet 1 of 2 iH Dry Pumping Systems 4-27
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Instruction Manual A533-50-880 Issu
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A533-50-880 Issue D Setup Password
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CONTENTS Section Title Page 1 INTRO
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Section Title Page 3.20.2 Configure
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Section Title Page 8 SERVICE, SPARE
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Illustrations (continued) Figure Ti
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1 INTRODUCTION 1.1 Scope and defini
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1.2ATEX directive implications •
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1.4 Safety All of the components of
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1. Inlet 2. HCMB oil filler-plug *
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1. Two-way gearbox vent-valve 2. Ge
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1.10 Electrical system Refer to Fig
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Figure 1-3 - Schematic diagram of t
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iH Dry Pumping Systems 1-15 Figure
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1. Rear cover 16. Fuse F6 2. Coolin
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Figure 1-6 - Electrical components
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Note that when you first switch-on
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As supplied the first page of Norma
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1.14 Drip tray The drip tray is fit
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A AW/6179/A 6 2 1 5 4 3 B 9 6 8 4 7
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A. iH80 B. iH600 C. iH1000 1. Warni
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2TECHNICAL DATA Notes: Unless other
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A B C Side view Plan view Outlet Di
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A Side view 1. Inlet 3. Air-extract
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2.4 Cooling-water supply Notes. Use
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1. 60Hz 2. 50Hz Figure 2-6 - Typica
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Note: Discontinuity in curves are a
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Note: Discontinuity in curves are a
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Supply voltage and frequency iH80
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2.10 Resource conservation Measures
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2.13 Tracer gas analysis IH600 pump
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3 INSTALLATION 3.1 Safety WARNING O
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Mounting3.21.2 Electrical Installat
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1. iH system 2. Nut and washer 3. S
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3.5 Reconfigure the nitrogen and/or
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2. Wheel the iH system on its casto
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3.7.2iH600/iH1000 systems The iH600
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Figure 3-5 - System arrangement to
Page 77 and 78: Use the following procedure to conn
Page 79 and 80: A B Remove the blanking panel Fit t
Page 81 and 82: A iH80 1. Inlet spool piece 4. HCMB
Page 83 and 84: 1. iH80 system 2. Electrics Box 3.
Page 85 and 86: A B C D iH80 system iH600 system Hi
Page 87 and 88: A iH80 1. Pin 1 (phase 1) 6. Electr
Page 89 and 90: Notes: On an iH1000 system, the ear
Page 91 and 92: 5. Inspect the water hoses, pipelin
Page 93 and 94: When you switch on an iH600 system,
Page 95 and 96: 3.21.2 Mounting The disconnect box
Page 97 and 98: 3.21.5 Cable connections Connect th
Page 99 and 100: 1. Customer supply: 1.36 inch diame
Page 101 and 102: 3.22.3 Piping connections Connect t
Page 103 and 104: 4 PUMP DISPLAY TERMINAL MENUS AND D
Page 105 and 106: Other specific uses of the CANCEL b
Page 107 and 108: 8. Press the ENTER button; the disp
Page 109 and 110: Switch on ▲ SELECT PUMP Process p
Page 111 and 112: Normal DP DP BODY . kW . C ☞ Firs
Page 113 and 114: Figure 4-6 - Status menu: sheet 2 o
Page 115 and 116: Setup SETUP PASSWORD Password ▲
Page 117 and 118: Next option Prev option [4-8/2] ▲
Page 119 and 120: Units ▲ ☞ Press the CANCEL butt
Page 121 and 122: Service SERVICE PASSWORD Password
Page 123 and 124: ▲ Serial Menu ☞ Use this menu t
Page 125 and 126: Notes: You should only use this men
Page 127: Next option Prev option [4-16/1]
Page 131 and 132: Messages MESSAGES English ENTER ▲
Page 133 and 134: 5 OPERATION 5.1 Introduction The fo
Page 135 and 136: 5.2.3 Gas purges WARNING If you use
Page 137 and 138: 5.4.2Change the display units If re
Page 139 and 140: • The solenoid-valve(s) in the Ga
Page 141 and 142: 5.10 Manual shut-down WARNING If yo
Page 143 and 144: If you need to shut down the iH sys
Page 145 and 146: 5.14 Restart the iH system after em
Page 147 and 148: 5.16 Operation of the load-lock pum
Page 149 and 150: 6 MAINTENANCE 6.1 Safety WARNING Ob
Page 151 and 152: 1. Tube fitting 2. Front (tapered)
Page 153 and 154: 6.5 Check the purge gas flow rates
Page 155 and 156: 1. Exhaust pipe insulation jacket 2
Page 157 and 158: 6.7 Check the HCMB pump oil-level (
Page 159 and 160: 3. Refer to Figure 1-1. Check that
Page 161 and 162: 1. Shut down the iH system (refer t
Page 163 and 164: 6.15 Relocate the iH system for mai
Page 165 and 166: 6.17 Fault finding WARNING Only per
Page 167 and 168: 6.18 Disconnect box and photohelic
Page 169 and 170: Warning message Advisory message Me
Page 175 and 176: Alarm message Advisory message Mean
Page 177 and 178: Message PUMP STOPPED Press CANCEL E
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7 STORAGE AND DISPOSAL 7.1 Storage
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2. If the HCDP pump and HCMB pump (
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8 SERVICE, SPARES AND ACCESSORIES 8
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8.4.4 iH Enclosure Extraction Fan K
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8.5.8 iH Pump Display Module When f
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Return of BOC Edwards Equipment - P
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