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Edwards IH Instruction Manual - Ideal Vacuum Products

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3.2Installation checklist<br />

The operations required to install the iH system and the sections of this instruction manual<br />

which describe those operations are shown in Table 3-1.<br />

Installation operation<br />

Section<br />

Unpack and inspect 3.3<br />

Remove the enclosure panels 3.4<br />

Reconfigure the nitrogen and water connections (if required) 3.5<br />

Locate the iH system 3.6<br />

Check the pump oil-level(s) 3.7<br />

iH80 systems 3.7.1<br />

iH600/iH1000 systems 3.7.2<br />

Install or replace the Pump Display Terminal and optional accessories<br />

3.8<br />

(if necessary)<br />

Install the Pump Display Terminal 3.8.1<br />

Install optional accessories 3.8.2<br />

Connect the iH inlet to your vacuum system 3.9<br />

Connect the iH exhaust outlet to your exhaust extraction system 3.10<br />

Connect to your factory extraction system (optional) 3.11<br />

Connect the nitrogen supply 3.12<br />

Leak test the system 3.13<br />

Install additional safety equipment (optional) 3.14<br />

Connect to your emergency stop circuit (optional) 3.15<br />

Electrical supply and RF earth (ground) connections 3.16<br />

Reconfigure the iH system for your electrical supply (if necessary) 3.16.1<br />

Reconfigure the pump(s) for your electrical supply (if necessary) 3.16.2<br />

Connect the electrical supply to the iH system 3.16.3<br />

Connect an additional RF earth (optional) 3.16.4<br />

Refit the enclosure panels 3.17<br />

Connect the cooling-water pipelines 3.18<br />

Adjust the interstage purge flow rates if necessary 3.19<br />

Commission the iH system 3.20<br />

Switch on an iH80/iH1000 system 3.20.1<br />

Configure and switch on an iH600 system 3.20.2<br />

Install Disconnect Box (accessory) 3.21<br />

Unpack and Inspect 3.21.1<br />

Table 3-1 - Installation checklist<br />

3-2 iH Dry Pumping Systems

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