Edwards IH Instruction Manual - Ideal Vacuum Products
Edwards IH Instruction Manual - Ideal Vacuum Products
Edwards IH Instruction Manual - Ideal Vacuum Products
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Section Title Page<br />
5.17 Disconnect box and photohelic switch/gauge (accessories) 5-15<br />
5.17.1 Normal startup 5-15<br />
5.17.2 Restart after fault 5-15<br />
5.17.3 Shutdown 5-16<br />
5.17.4 Local EMO 5-16<br />
5.17.5 Remote EMO 5-16<br />
5.17.6 Photohelic gauge 5-16<br />
5.17.7 Brownout 5-16<br />
6 MAINTENANCE 6-1<br />
6.1 Safety 6-1<br />
6.2 Correct use of tube fittings 6-2<br />
6.2.1 Fit a tube fitting6-2<br />
6.2.2 Reconnect a tube fitting6-4<br />
6.3 Maintenance frequency 6-4<br />
6.4 Inspect the connections, pipelines, cables and fittings 6-4<br />
6.5 Check the purge gas flow rates 6-5<br />
6.6 Inspect and clean the exhaust-pipe, elbow and check-valve 6-5<br />
6.6.1 Dismantle, clean and refit the exhaust-pipe and elbow 6-5<br />
6.6.2 Clean and refit the check-valve (if fitted) 6-7<br />
6.7 Check the HCMB pump oil-level (iH600/iH1000 only) 6-9<br />
6.8 Check the HCDP pump oil-level 6-10<br />
6.9 Change the HCDP pump oil 6-11<br />
6.10 Change the HCMB pump oil (iH600/iH1000 only) 6-12<br />
6.11 Zero the gas module flow transducer 6-13<br />
6.12 Adjust the pump display terminal display viewing angle 6-13<br />
6.13 Replace a fuse 6-14<br />
6.14 Replace the pump display terminal 6-14<br />
6.15 Relocate the iH system for maintenance 6-15<br />
6.16 Check for free rotation of the HCDP pump 6-16<br />
6.17 Fault finding6-17<br />
6.17.1 Warning and alarm message fault finding 6-17<br />
6.17.2 Other fault finding6-17<br />
6.18 Disconnect box and photohelic switch/gauge (accessories) 6-19<br />
6.18.1 Introduction 6-20<br />
6.18.2 Fault finding6-20<br />
6.18.3 Fuse replacement 6-20<br />
7 STORAGE AND DISPOSAL 7-1<br />
7.1 Storage 7-1<br />
7.2 Disposal 7-1<br />
7.3 Transportation 7-2<br />
iv<br />
iH Dry Pumping Systems