Edwards IH Instruction Manual - Ideal Vacuum Products
Edwards IH Instruction Manual - Ideal Vacuum Products
Edwards IH Instruction Manual - Ideal Vacuum Products
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Warning message Advisory message Meaning/recommended action<br />
WARNING 1011 SEE MANUAL There is a phase imbalance in the electrical<br />
supply to the HCMB pump. Check the<br />
electrical supply and the connections to the iH<br />
system. If the electrical supply and<br />
connections are correct, the pump motor may<br />
be faulty.<br />
WARNING 1201 When started, no electrical current was drawn<br />
by the HCDP pump. Check whether the pump<br />
motor is open circuit.<br />
WARNING 1401<br />
SERVICE DUE (R)<br />
WARNING 1601<br />
SERVICE DUE (P)<br />
WARNING 1801<br />
SERVICE DUE (P)<br />
WARNING 2001<br />
SERVICE DUE (C)<br />
xxxxx HRS RUN<br />
SINCE SERVICE<br />
xxxxx HRS RUN<br />
SINCE SERVICE<br />
xxxxx CYCLES<br />
SINCE SERVICE<br />
xxxxx CYCLES<br />
SINCE SERVICE<br />
If not, the current sensor may have failed.<br />
The iH system has operated for xxxxx hours<br />
since it was last serviced. Service the iH<br />
system.<br />
The iH system has operated for xxxxx hours<br />
since it was last serviced. Service the iH<br />
system.<br />
The iH system has been operated for xxxxx<br />
process cycles since it was last serviced.<br />
Service the iH system.<br />
The iH system has been operated for xxxxx<br />
switch-on/off cycles since it was last serviced.<br />
Service the system.<br />
WARNING 3113 There is a fault in the ADC (analogue-to-digital<br />
convertor) in the Control SMA; the Control<br />
SMA must be replaced.<br />
WARNING 3501 (a) the gas module mass flow transducer has<br />
drifted outside the valid range allowed for<br />
zeroing, or (b) you cannot zero the transducer<br />
because the nitrogen purge is switched on or<br />
the HCDP pump is on.<br />
WARNING 3509<br />
TOTAL N2 FLOW LO<br />
WARNING 3511<br />
TOTAL N2 FLOW HI<br />
WARNING 3911<br />
EXHAUST PRESSURE<br />
FLOW LOW<br />
CHECK GAS MODULE<br />
FLOW HIGH<br />
CHECK GAS MODULE<br />
EXHAUST BLOCKED<br />
SERVICE PUMP<br />
The total nitrogen flow is too low. There may<br />
be a fault in the Gas Module.<br />
The total nitrogen flow is too high. There may<br />
be a fault in the Gas Module.<br />
The pressure in the exhaust pipeline is too<br />
high. There may be process debris or<br />
condensation in the exhaust pipeline, or a<br />
valve in the pipeline may be shut. You may<br />
have too many pumping systems connected to<br />
the exhaust pipeline.<br />
Table 6-1 - Warning messages (continued)<br />
iH Dry Pumping Systems 6-23
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