Edwards IH Instruction Manual - Ideal Vacuum Products
Edwards IH Instruction Manual - Ideal Vacuum Products
Edwards IH Instruction Manual - Ideal Vacuum Products
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Declaration of Conform ity<br />
We, BOC <strong>Edwards</strong>,<br />
Manor Royal,<br />
Crawley,<br />
West Sussex RH10 2LW. UK<br />
declare under our sole responsibility that the product(s)<br />
iH Dry Pumping Systems with the following components:<br />
iH Dry Pumping Systems<br />
460V, 60H2, 3-phase<br />
200/208V, 5Ol 6OHz, 3-phase<br />
380/415V, 50H2, 3-phase<br />
230V, 60H2, 3-phase<br />
iHF Dry Pumping Systems<br />
460V, 60H2, 3-phase<br />
200/208V, 5Ol 60H2, 3-phase<br />
380/415V, 50H2, 3-phase<br />
230V, 60H2, 3-phase<br />
iH80 iH600 iH't000<br />
4533-s0-908 A533-51-908 A533-52-908<br />
As33-s0-94s A533-51-945 A533-52-945<br />
As33-s0-946 A533-51-946 A533-52-946<br />
A533-50-957 A533-51-957 A533-52-957<br />
iH80F iH600F iH1000F<br />
A533-57-908 A533-58-908 A533-59-908<br />
A533-57-945 A533-58-945 4533-59-945<br />
A533-57-946 A533-58-946 A533-59-946<br />
As33-s7-9s7 A533-58-957 As33-s9-957<br />
iH Alternative Nitrogen and Cooling-Water Connection Kits<br />
iH Interface Module Fitting Kit<br />
iH Enclosure Extraction Fan (For iH80 and iH600 Systems only)<br />
iH/iL Booster Pump Pressure Control Kit<br />
iH/iL Interstage Port Connection Kit<br />
iH/iL Light duty Exhaust Check Valve<br />
A505-34-000<br />
A505-35-000<br />
A505-39-000<br />
A505-40-000<br />
A505-53-000<br />
A505-56-000<br />
to which this declaration relates is in conformity with the following standard(s)<br />
or other normative document(s):<br />
EN60204-1:1997<br />
EN61326:1997<br />
(lndustrialocation<br />
Class A Emissions)<br />
ENl012-2: 1996<br />
sEMr s2-93A<br />
EN13463-1:2001<br />
Electrical Safety; Machines<br />
Electrical Equipment for Measurement, Control and Laboratory<br />
Use - EMC Requirements.<br />
Compressors and <strong>Vacuum</strong> Pumps - Safety Requirements,<br />
Part 2: <strong>Vacuum</strong> Pumps.<br />
Safety Guidelines for Semiconductor Manufacturing Equipment.<br />
Non Electrical Equipment for Potentially Explosive Atmospheres.<br />
following the provisions of<br />
73t023tEEC<br />
89/336/EEC<br />
94t9tEC<br />
98t37tEC<br />
Low Voltage Directive.<br />
Electromagnetic Compatibility Directive.<br />
Equipment for use in Potentially Explosive Atmospheres (ATEX Directive)<br />
(Category 3GD) Intemal Atmospheres Only.<br />
Machinery Safety Directive.<br />
5H"^<br />
Dr J. D. Wotson, Technicol Director<br />
Vocuum Equipment ond Exhaust Monogement Produa Divisions<br />
@^n.<br />
Dote and Ploce<br />
(Il<br />
o<br />
@<br />
N<br />
N<br />
This produa hos been manufactured under o quolity system registered to tSO9001<br />
N<br />
^&% BOC EDWARDS