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Edwards IH Instruction Manual - Ideal Vacuum Products

Edwards IH Instruction Manual - Ideal Vacuum Products

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Declaration of Conform ity<br />

We, BOC <strong>Edwards</strong>,<br />

Manor Royal,<br />

Crawley,<br />

West Sussex RH10 2LW. UK<br />

declare under our sole responsibility that the product(s)<br />

iH Dry Pumping Systems with the following components:<br />

iH Dry Pumping Systems<br />

460V, 60H2, 3-phase<br />

200/208V, 5Ol 6OHz, 3-phase<br />

380/415V, 50H2, 3-phase<br />

230V, 60H2, 3-phase<br />

iHF Dry Pumping Systems<br />

460V, 60H2, 3-phase<br />

200/208V, 5Ol 60H2, 3-phase<br />

380/415V, 50H2, 3-phase<br />

230V, 60H2, 3-phase<br />

iH80 iH600 iH't000<br />

4533-s0-908 A533-51-908 A533-52-908<br />

As33-s0-94s A533-51-945 A533-52-945<br />

As33-s0-946 A533-51-946 A533-52-946<br />

A533-50-957 A533-51-957 A533-52-957<br />

iH80F iH600F iH1000F<br />

A533-57-908 A533-58-908 A533-59-908<br />

A533-57-945 A533-58-945 4533-59-945<br />

A533-57-946 A533-58-946 A533-59-946<br />

As33-s7-9s7 A533-58-957 As33-s9-957<br />

iH Alternative Nitrogen and Cooling-Water Connection Kits<br />

iH Interface Module Fitting Kit<br />

iH Enclosure Extraction Fan (For iH80 and iH600 Systems only)<br />

iH/iL Booster Pump Pressure Control Kit<br />

iH/iL Interstage Port Connection Kit<br />

iH/iL Light duty Exhaust Check Valve<br />

A505-34-000<br />

A505-35-000<br />

A505-39-000<br />

A505-40-000<br />

A505-53-000<br />

A505-56-000<br />

to which this declaration relates is in conformity with the following standard(s)<br />

or other normative document(s):<br />

EN60204-1:1997<br />

EN61326:1997<br />

(lndustrialocation<br />

Class A Emissions)<br />

ENl012-2: 1996<br />

sEMr s2-93A<br />

EN13463-1:2001<br />

Electrical Safety; Machines<br />

Electrical Equipment for Measurement, Control and Laboratory<br />

Use - EMC Requirements.<br />

Compressors and <strong>Vacuum</strong> Pumps - Safety Requirements,<br />

Part 2: <strong>Vacuum</strong> Pumps.<br />

Safety Guidelines for Semiconductor Manufacturing Equipment.<br />

Non Electrical Equipment for Potentially Explosive Atmospheres.<br />

following the provisions of<br />

73t023tEEC<br />

89/336/EEC<br />

94t9tEC<br />

98t37tEC<br />

Low Voltage Directive.<br />

Electromagnetic Compatibility Directive.<br />

Equipment for use in Potentially Explosive Atmospheres (ATEX Directive)<br />

(Category 3GD) Intemal Atmospheres Only.<br />

Machinery Safety Directive.<br />

5H"^<br />

Dr J. D. Wotson, Technicol Director<br />

Vocuum Equipment ond Exhaust Monogement Produa Divisions<br />

@^n.<br />

Dote and Ploce<br />

(Il<br />

o<br />

@<br />

N<br />

N<br />

This produa hos been manufactured under o quolity system registered to tSO9001<br />

N<br />

^&% BOC EDWARDS

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