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Special Issue; Products for Industrial Machinery - NTN

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Development of Aerostatic Bearing Spindle <strong>for</strong> Precision Machine Tools<br />

Journal bearings<br />

Thrust bearings<br />

AC servo motor<br />

Rotary encoder<br />

Rotary shaft<br />

Non-contact seal<br />

<strong>for</strong> vacuum chuck<br />

Thrust plate<br />

Fig. 1 Structure of air spindle<br />

3. Specifications of Prototype Spindle<br />

The specifications (target values) <strong>for</strong> <strong>NTN</strong>’s<br />

prototype aerostatic bearing spindle <strong>for</strong> machine tools<br />

are summarized in Table 1.<br />

Previously, the maximum running speed with this<br />

type of spindle was approximately 10,000 r/min. In<br />

contrast, the maximum targeted running speed with<br />

<strong>NTN</strong>’s spindle is 20,000 r/min. To ensure good<br />

machining accuracy, it has been determined that it<br />

should have an NRRO (non-repetitive run-out)<br />

comparable to that of an aerostatic spindle <strong>for</strong><br />

inspection devices and the axial displacement of the<br />

chuck face during steady running of the spindle should<br />

be limited to 1 m or smaller.<br />

Max. running speed<br />

Air feed pressure to bearing<br />

Radial rigidity<br />

Axial rigidity<br />

NRRO<br />

Radial<br />

Axial<br />

Displacement on chuck face<br />

Table 1 Specifications<br />

20,000 rmin<br />

0.49 MPa<br />

45 N/m<br />

227 N/m<br />

0.010m or less<br />

0.010m or less<br />

1m or less during steady running<br />

4. Structure of the Aerostatic Spindle<br />

<strong>for</strong> Machine Tools<br />

1) Realization of greater rigidity and higher accuracy<br />

The structure of the authors’ aerostatic bearing<br />

spindle is illustrated in Fig. 2. A total of four journal<br />

bearings are placed in the front and rear sides of the<br />

thrust bearings to enhance the rigidity of the aerostatic<br />

bearing spindle. Furthermore, seeking higher<br />

accuracy, the layout <strong>for</strong> the air feed holes on the<br />

journal bearings have been optimized in order to<br />

inhibit high order vibration that would otherwise occur<br />

due to the interaction between the <strong>for</strong>m errors on the<br />

rotary shaft and the layout of the air feed holes, as<br />

well as to improve the dynamic rigidity of the bearings.<br />

2) Realization of higher torque<br />

To attain both a higher torque on the driving section<br />

and a smaller spindle outside diameter, two motors<br />

are coupled in tandem, thereby the authors’ aerostatic<br />

bearing spindle features a torque twice as high<br />

compared to ordinary aerostatic bearing spindle<br />

designs.<br />

3) Control of chips and coolant<br />

For the vacuum chuck mechanism that secures<br />

workpieces, to prevent the coolant entering the chuck<br />

from reaching the bearing section, the suction holes<br />

are situated further apart from the bearings compared<br />

to conventional aerostatic bearing spindle<br />

arrangements. To avoid ingress of chips and coolant<br />

into the bearings, a non-contact air-seal has been<br />

incorporated and a narrow gap is provided between<br />

the rotary shaft and the fixed section (housing),<br />

thereby compressed air is allowed to gush out through<br />

this gap to prevent chips and coolant from reaching<br />

the bearings.<br />

4) Control of heat buildup<br />

Aerostatic bearings are known to generate less<br />

heat. However, when any aerostatic bearing is run at<br />

a higher speed, the heat buildup resulting from the<br />

shearing of gaseous matter in the bearing clearance<br />

cannot be ignored. In addition, the magnitude of heat<br />

generated from the motor arrangement of <strong>NTN</strong>’s<br />

prototype spindle was expected to be greater than that<br />

of similar conventional arrangements. To solve this<br />

-35-

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