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Special Issue; Products for Industrial Machinery - NTN

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<strong>NTN</strong> TECHNICAL REVIEW No.742006<br />

Rotary table<br />

Feed-water inlet<br />

Waterway <strong>for</strong> cooling<br />

Rotary shaft<br />

Water drain outlet<br />

Workpiece<br />

Air seal<br />

Chuck surface<br />

Air seal<br />

Air thrust bearing<br />

Motor<br />

Rotary encoder<br />

Air supply opening <strong>for</strong> air seal<br />

Fig. 2 Structure of the air spindle which we developed<br />

problem, the housing on the motor and bearing<br />

sections is water-cooled and the associated<br />

components are composed of materials with low<br />

thermal-expansion in order to inhibit their thermal<br />

de<strong>for</strong>mation and the displacement of the chuck face.<br />

Furthermore, air feed holes are provided in the bore<br />

sides of the motor stators <strong>for</strong> feeding compressed air<br />

to cool the motors.<br />

For evaluation of the control measure against<br />

thermal de<strong>for</strong>mation, the aerostatic bearing spindle<br />

was started from a standstill in a room temperature<br />

environment and allowed to run constantly at 20,000<br />

r/min, and displacement in the position of the<br />

workpiece was measured. This measurement result is<br />

graphically plotted in Fig. 4. Immediately after the start<br />

of operation, the shaft developed an elongation of<br />

5. Spindle Evaluation Test<br />

A dummy workpiece simulating an actual workpiece<br />

was mounted to the prototype spindle, and then the<br />

spindle was subjected to an accuracy evaluation test.<br />

Run-outs were measured at the locations shown in<br />

Fig. 3 with a capacitance type non-contact<br />

displacement gage. Jitter (variation in rotation<br />

frequency) was determined by measuring variation in<br />

the frequency of Z-phase signal (1 pulse/revolution) of<br />

the rotary encoder with a pulse jitter counter. The<br />

measurement result <strong>for</strong> non-repetitive run-out (NRRO)<br />

is summarized in Table 2 and that <strong>for</strong> jitter (variation in<br />

rotation frequency) is given in Table 3. As can be<br />

understood from the data in these tables, <strong>NTN</strong>’s<br />

aerostatic bearing spindle per<strong>for</strong>med very well from<br />

low speed to the maximum speed.<br />

Shaft<br />

elongation<br />

Radial<br />

run-out<br />

Axial run-out<br />

Dummy workpiece<br />

Fig. 3 A measurement position<br />

Table 2 A measurement result of NRRO<br />

Running speed<br />

r/min<br />

1000<br />

5000<br />

10000<br />

15000<br />

20000<br />

NRROnm<br />

Radial<br />

3.75<br />

3.75<br />

3.75<br />

3.75<br />

3.75<br />

NRROnm<br />

Axial<br />

3.75<br />

3.75<br />

3.75<br />

3.75<br />

6.25<br />

Running speed<br />

r/min<br />

Table 3 A measurement result of jitter (A dummy))<br />

Jitter<br />

nsec<br />

Accuracy<br />

%<br />

500 213.0 180.1 190.9 205.5 195.0 0.00018<br />

1800 82.1 72.7 68.5 84.3 67.6 0.00025<br />

5400 33.5 28.2 27.9 31.8 26.5 0.00031<br />

10000 20.8 21.2 17.4 21.2 18.8 0.00035<br />

15000 14.1 12.2 11.5 13.6 14.3 0.00036<br />

20000 9.3 10.3 10.9 10.8 10.2 0.00036<br />

-36-

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