Activity Report 2010 - CNRS

6 – NANO-
CHARACTERISATION
AND NANO-METROLOGY
This cross-theme is animated by a
scientific committee composed of 5
renowned experts who belong to the
main Grenoble institutes. This group
helps the community to identify the
needs for new instrumental and
methodological developments that will
improve the sensitivity and scale down
the spatial resolution of our instruments
to measure physical and structural
properties at the nanometer scale. It is
worth noting that this effort, started in
2007, has lead a general movement of
structuring the cross-theme “Nanocharacterisation
and metrology” at the
full scale of the Grenoble University. The
scientific instrumentation is one of the
well identified highly unifying themes of
the GUI+ IDEX project.
Broad scientific and instrumental
activities are relevant of «Nano-
Characterisation -Nanometrology», as for
instance:
Electron (with aberration
correction) and x-ray microscopies.
These include diffraction, coherent
diffraction, spectroscopy, tomography,
holography, …
Advanced surface/subsurface
spectroscopy, surface imaging, and
surface crystallography. Atomic Force
Microscopy (AFM) (STM), Scanning
Tunnelling Microscopy, Scanning Gate
Microscopy (SGM), PhotoEmission
Electron Microscopy (PEEM), Angle
Resolved Photoelectron Spectroscopy
(ARPES), Medium Energy Ion Scattering
(MEIS), Grazing Incidence X-ray
(GISAXS)..., to measure electronic,
magnetic and structural properties at the
surface and/or subsurface.
In operando and in situ
studies. In situ X-ray studies, in real
time, of nucleation and growth of thin
film, nanostructures, … In situ, in
operando studies as a function of
temperature, external field (electric or
magnetic field, stress, electric current),
external stress, gas, ...
Instrumentation at very low
temperature and / or high magnetic
field. Nuclear Magnetic Resonance.
Cryogenic Nano-detectors, ...
Combined techniques. Raman
scattering with Atomic Force Microscopy,
X-ray spectroscopy with X-ray diffraction
…
Micro Electro-Mechanical
System, Nano Electro Mechanical
System.
Advanced instrumentation.
Manipulation and study of micro- nanosized
object (optical tweezers, …), ...
The field “Nanocharacterisation” enjoys
an exceptional scientific environment:
the large scale facilities (ESRF for
X rays, ILL for neutrons, Laboratoire
National des Champs Magnétiques
Intenses (GHMFL) for high magnetic field,
...) and the Léti,
a unique expertise in the field of
instrumentation at very low temperatures
in particular at Institut Néel and Institut
des Nanosciences et Cryogénie (INAC),
nine technological facilities
gathering state of the art instruments (or
equipment)
excellent clean room-based
facilities for nanofabrication (Nanofab at
Institut Néel or “Plateforme
Technologique Avancée” at MINATEC).
One should also mention a strong
expertise in surface imaging, including
near field spectroscopy, Transmission
Electron Microscopy and crystallography.
The French Collaborative Research Group
at the ESRF, run by CNRS and CEA, has
set up three dedicated beam lines and
developed world leading methods and
instruments for studying the growth and
structural properties of nanostructures.
Several activities in the field of
nanocharacterisation and nanometrology
benefit of a dedicated Focus Ion Beam
dual instrument bought by the
Foundation in 2008.
In 2009 a Chair of Excellence was
granted to Pr John KIRTLEY (Stanford
University, USA).
In 2010, it was decided to focus the call
applications onto the topic “Coherent
Diffraction Imaging at the nanometer
scale”. Accordingly, a Chair of Excellence
has been granted to Pr Jian Min ZUO
(University of Illinois, USA).
Fig. 1: Juan Min ZUO, Chair of Excellence 2010
CONTACTS
Hubert RENEVIER
hubert.renevier@inpg.fr
Tel: +33 4 56 52 93 43
Joël CHEVRIER
joel.chevrier@grenoble.cnrs.fr
Tel: +33 4 76 88 74 63
SCIENTIFIC REPORT
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